| Original language | Finnish |
|---|---|
| Pages (from-to) | 54-57 |
| Journal | Sähkö |
| Volume | 57 |
| Issue number | 11 |
| Publication status | Published - 1984 |
| MoE publication type | D1 Article in a trade journal |
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Ohut- ja paksukalvotekniikan käyttö mikroantureissa
- Markku Ylilammi
Research output: Contribution to journal › Article › Professional