Ohutkalvotyhjöpakkauksella suojattujen pintamikromekaanisten rakenteiden valmistus: Lisensiaatintyö

Translated title of the contribution: Fabrication of surface micromechanical structures with thin film vacuum encapsulation: Licenciate thesis

Research output: Thesis › Licenciate

Translated title of the contribution	Fabrication of surface micromechanical structures with thin film vacuum encapsulation: Licenciate thesis
Original language	Finnish
Qualification	Licentiate Degree
Publication status	Published - 2004
MoE publication type	G3 Licentiate thesis

Keywords

@phdthesis{ae12721e065f47409ce219f7d8545e1d,

title = "Ohutkalvotyhj{\"o}pakkauksella suojattujen pintamikromekaanisten rakenteiden valmistus: Lisensiaatinty{\"o}",

keywords = "micromechanics, MEMS, wafer level packaging, fabrication process, fabrication, polycrystalline silicon, vacuum encapsulation",

author = "Antti Lipsanen",

note = "TTE PGN: 67 s. + liitt. 24 s.",

year = "2004",

language = "Finnish",

type = "Licenciate",

}

TY - THES

T1 - Ohutkalvotyhjöpakkauksella suojattujen pintamikromekaanisten rakenteiden valmistus

T2 - Lisensiaatintyö

AU - Lipsanen, Antti

N1 - TTE PGN: 67 s. + liitt. 24 s.

PY - 2004

Y1 - 2004

KW - micromechanics

KW - MEMS

KW - wafer level packaging

KW - fabrication process

KW - fabrication

KW - polycrystalline silicon

KW - vacuum encapsulation

M3 - Licenciate

ER -