Original language | English |
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Title of host publication | Technical Program & Abstracts |
Publisher | American Vacuum Society AVS |
Publication status | Published - 2014 |
Event | 14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan Duration: 15 Jun 2014 → 18 Jun 2014 Conference number: 14 |
Conference
Conference | 14th International Conference on Atomic Layer Deposition, ALD 2014 |
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Abbreviated title | ALD 2014 |
Country | Japan |
City | Kyoto |
Period | 15/06/14 → 18/06/14 |
Cite this
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On the early history of ALD : molecular layering. / Aarik, Jaan; Akbashev, Andrew; Bechelany, Mikhael; Berdova, Maria; Cameron, David; Chekurov, Nikolai; Drozd, Viktor; Elliott, Simon; Gottardi, Gloria; Grigoras, Kestutis; Junige, Marcel; Kallio, Tanja; Kanervo, Jaana; Koshtyal, Yury; Kääriäinen, Marja-Leena; Kääriäinen, Tommi; Lamagna, Luca; Malkov, Anatoly; Malygin, Anatoly; Molarius, Jyrki; Ozgit-Akgun, Cagla; Pedersen, Henrik; Puurunen, Riikka L.; Pyymaki-Perros, Alexander; Ras, Robin H. A.; Roozeboom, Fred; Sajavaara, Timo; Savin, Hele; Seidel, Thomas E.; Sundberg, Pia; Sundqvist, Jonas; Tallarida, Massimo; van Ommen, J. Ruud; Wächtler, Thomas; Wiemer, Claudia; Ylivaara, Oili.
Technical Program & Abstracts. American Vacuum Society AVS, 2014.Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific
TY - CHAP
T1 - On the early history of ALD
T2 - molecular layering
AU - Aarik, Jaan
AU - Akbashev, Andrew
AU - Bechelany, Mikhael
AU - Berdova, Maria
AU - Cameron, David
AU - Chekurov, Nikolai
AU - Drozd, Viktor
AU - Elliott, Simon
AU - Gottardi, Gloria
AU - Grigoras, Kestutis
AU - Junige, Marcel
AU - Kallio, Tanja
AU - Kanervo, Jaana
AU - Koshtyal, Yury
AU - Kääriäinen, Marja-Leena
AU - Kääriäinen, Tommi
AU - Lamagna, Luca
AU - Malkov, Anatoly
AU - Malygin, Anatoly
AU - Molarius, Jyrki
AU - Ozgit-Akgun, Cagla
AU - Pedersen, Henrik
AU - Puurunen, Riikka L.
AU - Pyymaki-Perros, Alexander
AU - Ras, Robin H. A.
AU - Roozeboom, Fred
AU - Sajavaara, Timo
AU - Savin, Hele
AU - Seidel, Thomas E.
AU - Sundberg, Pia
AU - Sundqvist, Jonas
AU - Tallarida, Massimo
AU - van Ommen, J. Ruud
AU - Wächtler, Thomas
AU - Wiemer, Claudia
AU - Ylivaara, Oili
N1 - Published abstract of a poster presentation VPHA
PY - 2014
Y1 - 2014
M3 - Conference abstract in proceedings
BT - Technical Program & Abstracts
PB - American Vacuum Society AVS
ER -