On the early history of ALD: molecular layering

Jaan Aarik; Andrew Akbashev; Mikhael Bechelany; Maria Berdova; David Cameron; Nikolai Chekurov; Viktor Drozd; Simon Elliott; Gloria Gottardi; Kestutis Grigoras; Marcel Junige; Tanja Kallio; Jaana Kanervo; Yury Koshtyal; Marja-Leena Kääriäinen; Tommi Kääriäinen; Luca Lamagna; Anatoly Malkov; Anatoly Malygin; Jyrki Molarius; Cagla Ozgit-Akgun; Henrik Pedersen; Riikka L. Puurunen; Alexander Pyymaki-Perros; Robin H. A. Ras; Fred Roozeboom; Timo Sajavaara; Hele Savin; Thomas E. Seidel; Pia Sundberg; Jonas Sundqvist; Massimo Tallarida; J. Ruud van Ommen; Thomas Wächtler; Claudia Wiemer; Oili Ylivaara

On the early history of ALD: molecular layering

Jaan Aarik
, Andrew Akbashev
, Mikhael Bechelany
, Maria Berdova
, David Cameron
, Nikolai Chekurov
, Viktor Drozd
, Simon Elliott
, Gloria Gottardi
, Kestutis Grigoras
, Marcel Junige
, Tanja Kallio
, Jaana Kanervo
, Yury Koshtyal
, Marja-Leena Kääriäinen
, Tommi Kääriäinen
, Luca Lamagna
, Anatoly Malkov
, Anatoly Malygin
, Jyrki Molarius

Cagla Ozgit-Akgun, Henrik Pedersen, Riikka L. Puurunen, Alexander Pyymaki-Perros, Robin H. A. Ras, Fred Roozeboom, Timo Sajavaara, Hele Savin, Thomas E. Seidel, Pia Sundberg, Jonas Sundqvist, Massimo Tallarida, J. Ruud van Ommen, Thomas Wächtler, Claudia Wiemer, Oili Ylivaara

VTT (former employee or external)
University of Jyväskylä
Aalto University

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Technical Program & Abstracts
Publisher	American Vacuum Society (AVS)
Publication status	Published - 2014
Event	14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan Duration: 15 Jun 2014 → 18 Jun 2014 Conference number: 14

Conference

Conference	14th International Conference on Atomic Layer Deposition, ALD 2014
Abbreviated title	ALD 2014
Country/Territory	Japan
City	Kyoto
Period	15/06/14 → 18/06/14

Cite this

Aarik, J., Akbashev, A., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Junige, M., Kallio, T., Kanervo, J., Koshtyal, Y., Kääriäinen, M.-L., Kääriäinen, T., Lamagna, L., Malkov, A., Malygin, A., ... Ylivaara, O. (2014). On the early history of ALD: molecular layering. In Technical Program & Abstracts American Vacuum Society (AVS).

@inbook{8d2e527537e946098e70d274a09d35ab,

title = "On the early history of ALD: molecular layering",

author = "Jaan Aarik and Andrew Akbashev and Mikhael Bechelany and Maria Berdova and David Cameron and Nikolai Chekurov and Viktor Drozd and Simon Elliott and Gloria Gottardi and Kestutis Grigoras and Marcel Junige and Tanja Kallio and Jaana Kanervo and Yury Koshtyal and Marja-Leena K{\"a}{\"a}ri{\"a}inen and Tommi K{\"a}{\"a}ri{\"a}inen and Luca Lamagna and Anatoly Malkov and Anatoly Malygin and Jyrki Molarius and Cagla Ozgit-Akgun and Henrik Pedersen and Puurunen, \{Riikka L.\} and Alexander Pyymaki-Perros and Ras, \{Robin H. A.\} and Fred Roozeboom and Timo Sajavaara and Hele Savin and Seidel, \{Thomas E.\} and Pia Sundberg and Jonas Sundqvist and Massimo Tallarida and \{van Ommen\}, \{J. Ruud\} and Thomas W{\"a}chtler and Claudia Wiemer and Oili Ylivaara",

note = "Published abstract of a poster presentation VPHA; 14th International Conference on Atomic Layer Deposition, ALD 2014, ALD 2014 ; Conference date: 15-06-2014 Through 18-06-2014",

year = "2014",

language = "English",

booktitle = "Technical Program \& Abstracts",

publisher = "American Vacuum Society (AVS)",

address = "United States",

}

Aarik, J, Akbashev, A, Bechelany, M, Berdova, M, Cameron, D, Chekurov, N, Drozd, V, Elliott, S, Gottardi, G, Grigoras, K, Junige, M, Kallio, T, Kanervo, J, Koshtyal, Y, Kääriäinen, M-L, Kääriäinen, T, Lamagna, L, Malkov, A, Malygin, A, Molarius, J, Ozgit-Akgun, C, Pedersen, H, Puurunen, RL, Pyymaki-Perros, A, Ras, RHA, Roozeboom, F, Sajavaara, T, Savin, H, Seidel, TE, Sundberg, P, Sundqvist, J, Tallarida, M, van Ommen, JR, Wächtler, T, Wiemer, C & Ylivaara, O 2014, On the early history of ALD: molecular layering. in Technical Program & Abstracts. American Vacuum Society (AVS), 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan, 15/06/14.

TY - CHAP

T1 - On the early history of ALD

T2 - 14th International Conference on Atomic Layer Deposition, ALD 2014

AU - Aarik, Jaan

AU - Akbashev, Andrew

AU - Bechelany, Mikhael

AU - Berdova, Maria

AU - Cameron, David

AU - Chekurov, Nikolai

AU - Drozd, Viktor

AU - Elliott, Simon

AU - Gottardi, Gloria

AU - Grigoras, Kestutis

AU - Junige, Marcel

AU - Kallio, Tanja

AU - Kanervo, Jaana

AU - Koshtyal, Yury

AU - Kääriäinen, Marja-Leena

AU - Kääriäinen, Tommi

AU - Lamagna, Luca

AU - Malkov, Anatoly

AU - Malygin, Anatoly

AU - Molarius, Jyrki

AU - Ozgit-Akgun, Cagla

AU - Pedersen, Henrik

AU - Puurunen, Riikka L.

AU - Pyymaki-Perros, Alexander

AU - Ras, Robin H. A.

AU - Roozeboom, Fred

AU - Sajavaara, Timo

AU - Savin, Hele

AU - Seidel, Thomas E.

AU - Sundberg, Pia

AU - Sundqvist, Jonas

AU - Tallarida, Massimo

AU - van Ommen, J. Ruud

AU - Wächtler, Thomas

AU - Wiemer, Claudia

AU - Ylivaara, Oili

N1 - Conference code: 14

PY - 2014

Y1 - 2014

M3 - Conference abstract in proceedings

BT - Technical Program & Abstracts

PB - American Vacuum Society (AVS)

Y2 - 15 June 2014 through 18 June 2014

ER -