On the early history of atomic layer deposition: most significant works and applications

Jaan Aarik, Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael Bechelany, Maria Berdova, David Cameron, Nikolai Chekurov, Mikhail Chubarov, Viktor Drozd, Simon Elliott, Gloria Gottardi, Kestutis Grigoras, Cheol Seong Hwang, Marcel Junige, Tanja Kallio, Jaana Kanervo, Ivan Khmelnitskiy, Yury Koshtyal, Outi KrauseMarja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Harri Lipsanen, Jussi Lyytinen, Anatoly Malkov, Anatoly Malygin, Jyrki Molarius, Malgorzata Norek, Cagla Ozgit-Akgun, Mikhail Panov, Henrik Pedersen, Fabien Piallat, Georgi Popov, Riikka L. Puurunen, Alexander Pyymaki-Perros, Robin H. A. Ras, Fred Roozeboom, Timo Sajavaara, Hele Savin, Thomas E. Seidel, Pia Sundberg, Jonas Sundqvist, Dmitry Suyatin, Massimo Tallarida, Tobias Törndahl, Mikko Utriainen, J. Ruud van Ommen, Thomas Wächtler, Claudia Wiemer, Oili M. E. Ylivaara, Oksana Yurkevich

    Research output: Contribution to conferenceConference PosterScientific

    Original languageEnglish
    Publication statusPublished - 2016
    MoE publication typeNot Eligible
    Event16th International Conference on Atomic Layer Deposition, ALD 2016 - Dublin, Ireland
    Duration: 24 Jul 201627 Jul 2016

    Conference

    Conference16th International Conference on Atomic Layer Deposition, ALD 2016
    Abbreviated titleALD 2016
    Country/TerritoryIreland
    CityDublin
    Period24/07/1627/07/16

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