On the early history of atomic layer deposition

most significant works and applications

Jaan Aarik, Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael Bechelany, Maria Berdova, David Cameron, Nikolai Chekurov, Mikhail Chubarov, Viktor Drozd, Simon Elliott, Gloria Gottardi, Kestutis Grigoras, Cheol Seong Hwang, Marcel Junige, Tanja Kallio, Jaana Kanervo, Ivan Khmelnitskiy, Yury Koshtyal, Outi Krause & 32 others Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Harri Lipsanen, Jussi Lyytinen, Anatoly Malkov, Anatoly Malygin, Jyrki Molarius, Malgorzata Norek, Cagla Ozgit-Akgun, Mikhail Panov, Henrik Pedersen, Fabien Piallat, Georgi Popov, Riikka L. Puurunen, Alexander Pyymaki-Perros, Robin H. A. Ras, Fred Roozeboom, Timo Sajavaara, Hele Savin, Thomas E. Seidel, Pia Sundberg, Jonas Sundqvist, Dmitry Suyatin, Massimo Tallarida, Tobias Törndahl, Mikko Utriainen, J. Ruud van Ommen, Thomas Wächtler, Claudia Wiemer, Oili M. E. Ylivaara, Oksana Yurkevich

Research output: Contribution to conferenceConference PosterScientific

Original languageEnglish
Publication statusPublished - 2016
MoE publication typeNot Eligible
Event16th International Conference on Atomic Layer Deposition, ALD 2016 - Dublin, Ireland
Duration: 24 Jul 201627 Jul 2016

Conference

Conference16th International Conference on Atomic Layer Deposition, ALD 2016
Abbreviated titleALD 2016
CountryIreland
CityDublin
Period24/07/1627/07/16

Cite this

Aarik, J., Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., ... Yurkevich, O. (2016). On the early history of atomic layer deposition: most significant works and applications. Poster session presented at 16th International Conference on Atomic Layer Deposition, ALD 2016, Dublin, Ireland.
Aarik, Jaan ; Ahvenniemi, Esko ; Akbashev, Andrew R. ; Ali, Saima ; Bechelany, Mikhael ; Berdova, Maria ; Cameron, David ; Chekurov, Nikolai ; Chubarov, Mikhail ; Drozd, Viktor ; Elliott, Simon ; Gottardi, Gloria ; Grigoras, Kestutis ; Hwang, Cheol Seong ; Junige, Marcel ; Kallio, Tanja ; Kanervo, Jaana ; Khmelnitskiy, Ivan ; Koshtyal, Yury ; Krause, Outi ; Kääriäinen, Marja-Leena ; Kääriäinen, Tommi ; Lamagna, Luca ; Lipsanen, Harri ; Lyytinen, Jussi ; Malkov, Anatoly ; Malygin, Anatoly ; Molarius, Jyrki ; Norek, Malgorzata ; Ozgit-Akgun, Cagla ; Panov, Mikhail ; Pedersen, Henrik ; Piallat, Fabien ; Popov, Georgi ; Puurunen, Riikka L. ; Pyymaki-Perros, Alexander ; Ras, Robin H. A. ; Roozeboom, Fred ; Sajavaara, Timo ; Savin, Hele ; Seidel, Thomas E. ; Sundberg, Pia ; Sundqvist, Jonas ; Suyatin, Dmitry ; Tallarida, Massimo ; Törndahl, Tobias ; Utriainen, Mikko ; van Ommen, J. Ruud ; Wächtler, Thomas ; Wiemer, Claudia ; Ylivaara, Oili M. E. ; Yurkevich, Oksana. / On the early history of atomic layer deposition : most significant works and applications. Poster session presented at 16th International Conference on Atomic Layer Deposition, ALD 2016, Dublin, Ireland.
@conference{037075238c1a4bbc8828d8f850920e09,
title = "On the early history of atomic layer deposition: most significant works and applications",
author = "Jaan Aarik and Esko Ahvenniemi and Akbashev, {Andrew R.} and Saima Ali and Mikhael Bechelany and Maria Berdova and David Cameron and Nikolai Chekurov and Mikhail Chubarov and Viktor Drozd and Simon Elliott and Gloria Gottardi and Kestutis Grigoras and Hwang, {Cheol Seong} and Marcel Junige and Tanja Kallio and Jaana Kanervo and Ivan Khmelnitskiy and Yury Koshtyal and Outi Krause and Marja-Leena K{\"a}{\"a}ri{\"a}inen and Tommi K{\"a}{\"a}ri{\"a}inen and Luca Lamagna and Harri Lipsanen and Jussi Lyytinen and Anatoly Malkov and Anatoly Malygin and Jyrki Molarius and Malgorzata Norek and Cagla Ozgit-Akgun and Mikhail Panov and Henrik Pedersen and Fabien Piallat and Georgi Popov and Puurunen, {Riikka L.} and Alexander Pyymaki-Perros and Ras, {Robin H. A.} and Fred Roozeboom and Timo Sajavaara and Hele Savin and Seidel, {Thomas E.} and Pia Sundberg and Jonas Sundqvist and Dmitry Suyatin and Massimo Tallarida and Tobias T{\"o}rndahl and Mikko Utriainen and {van Ommen}, {J. Ruud} and Thomas W{\"a}chtler and Claudia Wiemer and Ylivaara, {Oili M. E.} and Oksana Yurkevich",
note = "Project : 102086 ; 16th International Conference on Atomic Layer Deposition, ALD 2016, ALD 2016 ; Conference date: 24-07-2016 Through 27-07-2016",
year = "2016",
language = "English",

}

Aarik, J, Ahvenniemi, E, Akbashev, AR, Ali, S, Bechelany, M, Berdova, M, Cameron, D, Chekurov, N, Chubarov, M, Drozd, V, Elliott, S, Gottardi, G, Grigoras, K, Hwang, CS, Junige, M, Kallio, T, Kanervo, J, Khmelnitskiy, I, Koshtyal, Y, Krause, O, Kääriäinen, M-L, Kääriäinen, T, Lamagna, L, Lipsanen, H, Lyytinen, J, Malkov, A, Malygin, A, Molarius, J, Norek, M, Ozgit-Akgun, C, Panov, M, Pedersen, H, Piallat, F, Popov, G, Puurunen, RL, Pyymaki-Perros, A, Ras, RHA, Roozeboom, F, Sajavaara, T, Savin, H, Seidel, TE, Sundberg, P, Sundqvist, J, Suyatin, D, Tallarida, M, Törndahl, T, Utriainen, M, van Ommen, JR, Wächtler, T, Wiemer, C, Ylivaara, OME & Yurkevich, O 2016, 'On the early history of atomic layer deposition: most significant works and applications' 16th International Conference on Atomic Layer Deposition, ALD 2016, Dublin, Ireland, 24/07/16 - 27/07/16, .

On the early history of atomic layer deposition : most significant works and applications. / Aarik, Jaan; Ahvenniemi, Esko; Akbashev, Andrew R.; Ali, Saima; Bechelany, Mikhael; Berdova, Maria; Cameron, David; Chekurov, Nikolai; Chubarov, Mikhail; Drozd, Viktor; Elliott, Simon; Gottardi, Gloria; Grigoras, Kestutis; Hwang, Cheol Seong; Junige, Marcel; Kallio, Tanja; Kanervo, Jaana; Khmelnitskiy, Ivan; Koshtyal, Yury; Krause, Outi; Kääriäinen, Marja-Leena; Kääriäinen, Tommi; Lamagna, Luca; Lipsanen, Harri; Lyytinen, Jussi; Malkov, Anatoly; Malygin, Anatoly; Molarius, Jyrki; Norek, Malgorzata; Ozgit-Akgun, Cagla; Panov, Mikhail; Pedersen, Henrik; Piallat, Fabien; Popov, Georgi; Puurunen, Riikka L.; Pyymaki-Perros, Alexander; Ras, Robin H. A.; Roozeboom, Fred; Sajavaara, Timo; Savin, Hele; Seidel, Thomas E.; Sundberg, Pia; Sundqvist, Jonas; Suyatin, Dmitry; Tallarida, Massimo; Törndahl, Tobias; Utriainen, Mikko; van Ommen, J. Ruud; Wächtler, Thomas; Wiemer, Claudia; Ylivaara, Oili M. E.; Yurkevich, Oksana.

2016. Poster session presented at 16th International Conference on Atomic Layer Deposition, ALD 2016, Dublin, Ireland.

Research output: Contribution to conferenceConference PosterScientific

TY - CONF

T1 - On the early history of atomic layer deposition

T2 - most significant works and applications

AU - Aarik, Jaan

AU - Ahvenniemi, Esko

AU - Akbashev, Andrew R.

AU - Ali, Saima

AU - Bechelany, Mikhael

AU - Berdova, Maria

AU - Cameron, David

AU - Chekurov, Nikolai

AU - Chubarov, Mikhail

AU - Drozd, Viktor

AU - Elliott, Simon

AU - Gottardi, Gloria

AU - Grigoras, Kestutis

AU - Hwang, Cheol Seong

AU - Junige, Marcel

AU - Kallio, Tanja

AU - Kanervo, Jaana

AU - Khmelnitskiy, Ivan

AU - Koshtyal, Yury

AU - Krause, Outi

AU - Kääriäinen, Marja-Leena

AU - Kääriäinen, Tommi

AU - Lamagna, Luca

AU - Lipsanen, Harri

AU - Lyytinen, Jussi

AU - Malkov, Anatoly

AU - Malygin, Anatoly

AU - Molarius, Jyrki

AU - Norek, Malgorzata

AU - Ozgit-Akgun, Cagla

AU - Panov, Mikhail

AU - Pedersen, Henrik

AU - Piallat, Fabien

AU - Popov, Georgi

AU - Puurunen, Riikka L.

AU - Pyymaki-Perros, Alexander

AU - Ras, Robin H. A.

AU - Roozeboom, Fred

AU - Sajavaara, Timo

AU - Savin, Hele

AU - Seidel, Thomas E.

AU - Sundberg, Pia

AU - Sundqvist, Jonas

AU - Suyatin, Dmitry

AU - Tallarida, Massimo

AU - Törndahl, Tobias

AU - Utriainen, Mikko

AU - van Ommen, J. Ruud

AU - Wächtler, Thomas

AU - Wiemer, Claudia

AU - Ylivaara, Oili M. E.

AU - Yurkevich, Oksana

N1 - Project : 102086

PY - 2016

Y1 - 2016

M3 - Conference Poster

ER -

Aarik J, Ahvenniemi E, Akbashev AR, Ali S, Bechelany M, Berdova M et al. On the early history of atomic layer deposition: most significant works and applications. 2016. Poster session presented at 16th International Conference on Atomic Layer Deposition, ALD 2016, Dublin, Ireland.