On the early history of atomic layer deposition: most significant works and applications

Jaan Aarik, Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael Bechelany, Maria Berdova, David Cameron, Nikolai Chekurov, Mikhail Chubarov, Viktor Drozd, Simon Elliott, Gloria Gottardi, Kestutis Grigoras, Cheol Seong Hwang, Marcel Junige, Tanja Kallio, Jaana Kanervo, Ivan Khmelnitskiy, Yury Koshtyal, Outi KrauseMarja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Harri Lipsanen, Jussi Lyytinen, Anatoly Malkov, Anatoly Malygin, Jyrki Molarius, Malgorzata Norek, Cagla Ozgit-Akgun, Mikhail Panov, Henrik Pedersen, Fabien Piallat, Georgi Popov, Riikka L. Puurunen, Alexander Pyymaki-Perros, Robin H. A. Ras, Fred Roozeboom, Timo Sajavaara, Hele Savin, Thomas E. Seidel, Pia Sundberg, Jonas Sundqvist, Dmitry Suyatin, Massimo Tallarida, Tobias Törndahl, Mikko Utriainen, J. Ruud van Ommen, Thomas Wächtler, Claudia Wiemer, Oili M. E. Ylivaara, Oksana Yurkevich

Research output: Contribution to conferenceConference PosterScientific

Original languageEnglish
Publication statusPublished - 2016
MoE publication typeNot Eligible
Event16th International Conference on Atomic Layer Deposition, ALD 2016 - Dublin, Ireland
Duration: 24 Jul 201627 Jul 2016

Conference

Conference16th International Conference on Atomic Layer Deposition, ALD 2016
Abbreviated titleALD 2016
CountryIreland
CityDublin
Period24/07/1627/07/16

Cite this

Aarik, J., Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Chubarov, M., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Hwang, C. S., Junige, M., Kallio, T., Kanervo, J., Khmelnitskiy, I., Koshtyal, Y., ... Yurkevich, O. (2016). On the early history of atomic layer deposition: most significant works and applications. Poster session presented at 16th International Conference on Atomic Layer Deposition, ALD 2016, Dublin, Ireland.