On the history of ALD and the VPHA project

Riikka Puurunen, Yury Koshtyal, Henrik Pedersen, J. Ruud van Ommen, Oksana Yurkevich, Jonas Sundqvist

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Original languageEnglish
Publication statusPublished - 2016
MoE publication typeNot Eligible
Event14th International Baltic Conference on Atomic Layer Deposition - Sokos Palace Bridge Hotel, St. Petersburg, Russian Federation
Duration: 2 Oct 20164 Oct 2016
Conference number: 14

Conference

Conference14th International Baltic Conference on Atomic Layer Deposition
Abbreviated titleBALD
CountryRussian Federation
CitySt. Petersburg
Period2/10/164/10/16

Cite this

Puurunen, R., Koshtyal, Y., Pedersen, H., van Ommen, J. R., Yurkevich, O., & Sundqvist, J. (2016). On the history of ALD and the VPHA project. Abstract from 14th International Baltic Conference on Atomic Layer Deposition, St. Petersburg, Russian Federation.
Puurunen, Riikka ; Koshtyal, Yury ; Pedersen, Henrik ; van Ommen, J. Ruud ; Yurkevich, Oksana ; Sundqvist, Jonas. / On the history of ALD and the VPHA project. Abstract from 14th International Baltic Conference on Atomic Layer Deposition, St. Petersburg, Russian Federation.
@conference{7dc751c451c04bf9bd676690403788b7,
title = "On the history of ALD and the VPHA project",
author = "Riikka Puurunen and Yury Koshtyal and Henrik Pedersen and {van Ommen}, {J. Ruud} and Oksana Yurkevich and Jonas Sundqvist",
note = "Project code: 102086 ; 14th International Baltic Conference on Atomic Layer Deposition, BALD ; Conference date: 02-10-2016 Through 04-10-2016",
year = "2016",
language = "English",

}

Puurunen, R, Koshtyal, Y, Pedersen, H, van Ommen, JR, Yurkevich, O & Sundqvist, J 2016, 'On the history of ALD and the VPHA project' 14th International Baltic Conference on Atomic Layer Deposition, St. Petersburg, Russian Federation, 2/10/16 - 4/10/16, .

On the history of ALD and the VPHA project. / Puurunen, Riikka; Koshtyal, Yury; Pedersen, Henrik; van Ommen, J. Ruud; Yurkevich, Oksana; Sundqvist, Jonas.

2016. Abstract from 14th International Baltic Conference on Atomic Layer Deposition, St. Petersburg, Russian Federation.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

TY - CONF

T1 - On the history of ALD and the VPHA project

AU - Puurunen, Riikka

AU - Koshtyal, Yury

AU - Pedersen, Henrik

AU - van Ommen, J. Ruud

AU - Yurkevich, Oksana

AU - Sundqvist, Jonas

N1 - Project code: 102086

PY - 2016

Y1 - 2016

UR - http://vph-ald.com/VPHApublications/VPHA-invited-talk_BALD2016_abstract_FINAL_2016-06-15.pdf

M3 - Conference Abstract

ER -

Puurunen R, Koshtyal Y, Pedersen H, van Ommen JR, Yurkevich O, Sundqvist J. On the history of ALD and the VPHA project. 2016. Abstract from 14th International Baltic Conference on Atomic Layer Deposition, St. Petersburg, Russian Federation.