On the history of ALD and the VPHA project

Riikka Puurunen, Yury Koshtyal, Henrik Pedersen, J. Ruud van Ommen, Oksana Yurkevich, Jonas Sundqvist

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Original languageEnglish
Publication statusPublished - 2016
MoE publication typeNot Eligible
Event14th International Baltic Conference on Atomic Layer Deposition - Sokos Palace Bridge Hotel, St. Petersburg, Russian Federation
Duration: 2 Oct 20164 Oct 2016
Conference number: 14

Conference

Conference14th International Baltic Conference on Atomic Layer Deposition
Abbreviated titleBALD
CountryRussian Federation
CitySt. Petersburg
Period2/10/164/10/16

Keywords

  • OtaNano

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