On the history of ALD and the VPHA project

Riikka Puurunen; Yury Koshtyal; Henrik Pedersen; J. Ruud van Ommen; Oksana Yurkevich; Jonas Sundqvist

On the history of ALD and the VPHA project

Riikka Puurunen, Yury Koshtyal, Henrik Pedersen, J. Ruud van Ommen, Oksana Yurkevich, Jonas Sundqvist

VTT Technical Research Centre of Finland

Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2016
MoE publication type	Not Eligible
Event	14th International Baltic Conference on Atomic Layer Deposition - Sokos Palace Bridge Hotel, St. Petersburg, Russian Federation Duration: 2 Oct 2016 → 4 Oct 2016 Conference number: 14

Conference

Conference	14th International Baltic Conference on Atomic Layer Deposition
Abbreviated title	BALD
Country/Territory	Russian Federation
City	St. Petersburg
Period	2/10/16 → 4/10/16

Keywords

OtaNano

Cite this

@conference{7dc751c451c04bf9bd676690403788b7,

title = "On the history of ALD and the VPHA project",

keywords = "OtaNano",

author = "Riikka Puurunen and Yury Koshtyal and Henrik Pedersen and \{van Ommen\}, \{J. Ruud\} and Oksana Yurkevich and Jonas Sundqvist",

note = "Project code: 102086 ; 14th International Baltic Conference on Atomic Layer Deposition, BALD ; Conference date: 02-10-2016 Through 04-10-2016",

year = "2016",

language = "English",

}

TY - CONF

T1 - On the history of ALD and the VPHA project

AU - Puurunen, Riikka

AU - Koshtyal, Yury

AU - Pedersen, Henrik

AU - van Ommen, J. Ruud

AU - Yurkevich, Oksana

AU - Sundqvist, Jonas

N1 - Conference code: 14

PY - 2016

Y1 - 2016

KW - OtaNano

UR - http://vph-ald.com/VPHApublications/VPHA-invited-talk_BALD2016_abstract_FINAL_2016-06-15.pdf

M3 - Conference Abstract

T2 - 14th International Baltic Conference on Atomic Layer Deposition

Y2 - 2 October 2016 through 4 October 2016

ER -

On the history of ALD and the VPHA project

Conference

Keywords

Other files and links

Equipment

OtaNano

Cite this