On the nanoindentation characterization of Al2O3 thin films grown on Si-wafer by atomic layer deposition

Xuwen Liu (Corresponding author), Eero Haimi, Simo-Pekka Hannula, Riikka L. Puurunen, Oili Ylivaara

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

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    Chemical Compounds