On the optimization of piezoelectrically actuated MEMS resonators

A. Frangi, M. Cremonesi, Antti Jaakkola, Tuomas Pensala

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    4 Citations (Scopus)


    We address the numerical analysis of piezo MEMS square extensional resonators and show that interfacial losses are dominant. These are formulated in terms of the stress jump across the interface yielding a viscous type of dissipation. The model developed is then employed to perform an optimization of the pattern of the piezo-layer so as to excite selected mechanical modes.
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publicationInternational Ultrasonics Symposium, IUS 2012
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Electronic)978-1-4673-4562-0
    ISBN (Print)978-1-4673-4561-3
    Publication statusPublished - 2012
    MoE publication typeNot Eligible
    EventIEEE International Ultrasonics Symposium, IUS 2012 - Dresden, Germany
    Duration: 7 Oct 201210 Oct 2012


    ConferenceIEEE International Ultrasonics Symposium, IUS 2012
    Abbreviated titleIUS 2012


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