On the optimization of piezoelectrically actuated MEMS resonators

A. Frangi, M. Cremonesi, Antti Jaakkola, Tuomas Pensala

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

4 Citations (Scopus)

Abstract

We address the numerical analysis of piezo MEMS square extensional resonators and show that interfacial losses are dominant. These are formulated in terms of the stress jump across the interface yielding a viscous type of dissipation. The model developed is then employed to perform an optimization of the pattern of the piezo-layer so as to excite selected mechanical modes.
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationInternational Ultrasonics Symposium, IUS 2012
PublisherInstitute of Electrical and Electronic Engineers IEEE
Pages1043-1046
ISBN (Electronic)978-1-4673-4562-0
ISBN (Print)978-1-4673-4561-3
DOIs
Publication statusPublished - 2012
MoE publication typeNot Eligible
EventIEEE International Ultrasonics Symposium, IUS 2012 - Dresden, Germany
Duration: 7 Oct 201210 Oct 2012

Conference

ConferenceIEEE International Ultrasonics Symposium, IUS 2012
Abbreviated titleIUS 2012
CountryGermany
CityDresden
Period7/10/1210/10/12

Fingerprint

MEMS
Numerical analysis
Resonators

Cite this

Frangi, A., Cremonesi, M., Jaakkola, A., & Pensala, T. (2012). On the optimization of piezoelectrically actuated MEMS resonators. In Proceedings: International Ultrasonics Symposium, IUS 2012 (pp. 1043-1046). Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/ULTSYM.2012.0261
Frangi, A. ; Cremonesi, M. ; Jaakkola, Antti ; Pensala, Tuomas. / On the optimization of piezoelectrically actuated MEMS resonators. Proceedings: International Ultrasonics Symposium, IUS 2012. Institute of Electrical and Electronic Engineers IEEE, 2012. pp. 1043-1046
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Frangi, A, Cremonesi, M, Jaakkola, A & Pensala, T 2012, On the optimization of piezoelectrically actuated MEMS resonators. in Proceedings: International Ultrasonics Symposium, IUS 2012. Institute of Electrical and Electronic Engineers IEEE, pp. 1043-1046, IEEE International Ultrasonics Symposium, IUS 2012, Dresden, Germany, 7/10/12. https://doi.org/10.1109/ULTSYM.2012.0261

On the optimization of piezoelectrically actuated MEMS resonators. / Frangi, A.; Cremonesi, M.; Jaakkola, Antti; Pensala, Tuomas.

Proceedings: International Ultrasonics Symposium, IUS 2012. Institute of Electrical and Electronic Engineers IEEE, 2012. p. 1043-1046.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Frangi A, Cremonesi M, Jaakkola A, Pensala T. On the optimization of piezoelectrically actuated MEMS resonators. In Proceedings: International Ultrasonics Symposium, IUS 2012. Institute of Electrical and Electronic Engineers IEEE. 2012. p. 1043-1046 https://doi.org/10.1109/ULTSYM.2012.0261