On the optimization of piezoelectrically actuated MEMS resonators

A. Frangi; M. Cremonesi; Antti Jaakkola; Tuomas Pensala

doi:10.1109/ULTSYM.2012.0261

On the optimization of piezoelectrically actuated MEMS resonators

A. Frangi
, M. Cremonesi
, Antti Jaakkola
, Tuomas Pensala

Polytechnic University of Milan

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

4 Citations (Scopus)

Abstract

We address the numerical analysis of piezo MEMS square extensional resonators and show that interfacial losses are dominant. These are formulated in terms of the stress jump across the interface yielding a viscous type of dissipation. The model developed is then employed to perform an optimization of the pattern of the piezo-layer so as to excite selected mechanical modes.

Original language	English
Title of host publication	Proceedings
Subtitle of host publication	International Ultrasonics Symposium, IUS 2012
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	1043-1046
ISBN (Electronic)	978-1-4673-4562-0
ISBN (Print)	978-1-4673-4561-3
DOIs	https://doi.org/10.1109/ULTSYM.2012.0261
Publication status	Published - 2012
MoE publication type	Not Eligible
Event	IEEE International Ultrasonics Symposium, IUS 2012 - Dresden, Germany Duration: 7 Oct 2012 → 10 Oct 2012

Conference

Conference	IEEE International Ultrasonics Symposium, IUS 2012
Abbreviated title	IUS 2012
Country/Territory	Germany
City	Dresden
Period	7/10/12 → 10/10/12

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10.1109/ULTSYM.2012.0261

Cite this

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title = "On the optimization of piezoelectrically actuated MEMS resonators",

abstract = "We address the numerical analysis of piezo MEMS square extensional resonators and show that interfacial losses are dominant. These are formulated in terms of the stress jump across the interface yielding a viscous type of dissipation. The model developed is then employed to perform an optimization of the pattern of the piezo-layer so as to excite selected mechanical modes.",

author = "A. Frangi and M. Cremonesi and Antti Jaakkola and Tuomas Pensala",

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Frangi, A, Cremonesi, M, Jaakkola, A & Pensala, T 2012, On the optimization of piezoelectrically actuated MEMS resonators. in Proceedings: International Ultrasonics Symposium, IUS 2012. IEEE Institute of Electrical and Electronic Engineers, pp. 1043-1046, IEEE International Ultrasonics Symposium, IUS 2012, Dresden, Saxony, Germany, 7/10/12. https://doi.org/10.1109/ULTSYM.2012.0261

On the optimization of piezoelectrically actuated MEMS resonators. / Frangi, A.; Cremonesi, M.; Jaakkola, Antti et al.
Proceedings: International Ultrasonics Symposium, IUS 2012. IEEE Institute of Electrical and Electronic Engineers, 2012. p. 1043-1046.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - On the optimization of piezoelectrically actuated MEMS resonators

AU - Frangi, A.

AU - Cremonesi, M.

AU - Jaakkola, Antti

AU - Pensala, Tuomas

PY - 2012

Y1 - 2012

N2 - We address the numerical analysis of piezo MEMS square extensional resonators and show that interfacial losses are dominant. These are formulated in terms of the stress jump across the interface yielding a viscous type of dissipation. The model developed is then employed to perform an optimization of the pattern of the piezo-layer so as to excite selected mechanical modes.

AB - We address the numerical analysis of piezo MEMS square extensional resonators and show that interfacial losses are dominant. These are formulated in terms of the stress jump across the interface yielding a viscous type of dissipation. The model developed is then employed to perform an optimization of the pattern of the piezo-layer so as to excite selected mechanical modes.

U2 - 10.1109/ULTSYM.2012.0261

DO - 10.1109/ULTSYM.2012.0261

M3 - Conference article in proceedings

SN - 978-1-4673-4561-3

SP - 1043

EP - 1046

BT - Proceedings

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - IEEE International Ultrasonics Symposium, IUS 2012

Y2 - 7 October 2012 through 10 October 2012

ER -

On the optimization of piezoelectrically actuated MEMS resonators

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