On the role of interface dissipation in MEMS resonators

A. Frangi, M. Cremonesi, Antti Jaakkola, Tuomas Pensala

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed, showing excellent quantitative agreement.
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publication6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012
    PublisherVienna University of Technology
    Pages6601-6607
    ISBN (Electronic)978-3-9503537-0-9
    Publication statusPublished - 2012
    MoE publication typeA4 Article in a conference publication
    EventEuropean Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012 - Vienna, Austria
    Duration: 10 Sep 201214 Sep 2012

    Conference

    ConferenceEuropean Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012
    Abbreviated titleECCOMAS 2012
    CountryAustria
    CityVienna
    Period10/09/1214/09/12

    Fingerprint

    microelectromechanical systems
    dissipation
    resonators
    vibration mode
    predictions

    Keywords

    • interface
    • MEMS
    • PML
    • resonators

    Cite this

    Frangi, A., Cremonesi, M., Jaakkola, A., & Pensala, T. (2012). On the role of interface dissipation in MEMS resonators. In Proceedings: 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012 (pp. 6601-6607). Vienna University of Technology.
    Frangi, A. ; Cremonesi, M. ; Jaakkola, Antti ; Pensala, Tuomas. / On the role of interface dissipation in MEMS resonators. Proceedings: 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012. Vienna University of Technology, 2012. pp. 6601-6607
    @inproceedings{053584ffa2cd489f8d18c5b873eb7633,
    title = "On the role of interface dissipation in MEMS resonators",
    abstract = "We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed, showing excellent quantitative agreement.",
    keywords = "interface, MEMS, PML, resonators",
    author = "A. Frangi and M. Cremonesi and Antti Jaakkola and Tuomas Pensala",
    year = "2012",
    language = "English",
    pages = "6601--6607",
    booktitle = "Proceedings",
    publisher = "Vienna University of Technology",
    address = "Austria",

    }

    Frangi, A, Cremonesi, M, Jaakkola, A & Pensala, T 2012, On the role of interface dissipation in MEMS resonators. in Proceedings: 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012. Vienna University of Technology, pp. 6601-6607, European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012, Vienna, Austria, 10/09/12.

    On the role of interface dissipation in MEMS resonators. / Frangi, A.; Cremonesi, M.; Jaakkola, Antti; Pensala, Tuomas.

    Proceedings: 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012. Vienna University of Technology, 2012. p. 6601-6607.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - On the role of interface dissipation in MEMS resonators

    AU - Frangi, A.

    AU - Cremonesi, M.

    AU - Jaakkola, Antti

    AU - Pensala, Tuomas

    PY - 2012

    Y1 - 2012

    N2 - We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed, showing excellent quantitative agreement.

    AB - We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed, showing excellent quantitative agreement.

    KW - interface

    KW - MEMS

    KW - PML

    KW - resonators

    M3 - Conference article in proceedings

    SP - 6601

    EP - 6607

    BT - Proceedings

    PB - Vienna University of Technology

    ER -

    Frangi A, Cremonesi M, Jaakkola A, Pensala T. On the role of interface dissipation in MEMS resonators. In Proceedings: 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012. Vienna University of Technology. 2012. p. 6601-6607