On the role of interface dissipation in MEMS resonators

A. Frangi; M. Cremonesi; Antti Jaakkola; Tuomas Pensala

On the role of interface dissipation in MEMS resonators

A. Frangi, M. Cremonesi, Antti Jaakkola, Tuomas Pensala

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed, showing excellent quantitative agreement.

Original language	English
Title of host publication	Proceedings
Subtitle of host publication	6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012
Publisher	Vienna University of Technology
Pages	6601-6607
ISBN (Electronic)	978-3-9503537-0-9
Publication status	Published - 2012
MoE publication type	A4 Article in a conference publication
Event	European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012 - Vienna, Austria Duration: 10 Sept 2012 → 14 Sept 2012

Conference

Conference	European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012
Abbreviated title	ECCOMAS 2012
Country/Territory	Austria
City	Vienna
Period	10/09/12 → 14/09/12

Keywords

interface
MEMS
PML
resonators

Access to Document

http://eccomas.cimne.com/cvdata/cntr1/spc7/dtos/img/mdia/ECCOMAS-2012-e-book.pdf

Cite this

@inproceedings{053584ffa2cd489f8d18c5b873eb7633,

title = "On the role of interface dissipation in MEMS resonators",

abstract = "We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed, showing excellent quantitative agreement.",

keywords = "interface, MEMS, PML, resonators",

author = "A. Frangi and M. Cremonesi and Antti Jaakkola and Tuomas Pensala",

year = "2012",

language = "English",

pages = "6601--6607",

booktitle = "Proceedings",

publisher = "Vienna University of Technology",

address = "Austria",

note = "European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012, ECCOMAS 2012 ; Conference date: 10-09-2012 Through 14-09-2012",

}

Frangi, A, Cremonesi, M, Jaakkola, A & Pensala, T 2012, On the role of interface dissipation in MEMS resonators. in Proceedings: 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012. Vienna University of Technology, pp. 6601-6607, European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012, Vienna, Austria, 10/09/12. <http://eccomas.cimne.com/cvdata/cntr1/spc7/dtos/img/mdia/ECCOMAS-2012-e-book.pdf>

On the role of interface dissipation in MEMS resonators. / Frangi, A.; Cremonesi, M.; Jaakkola, Antti et al.
Proceedings: 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012. Vienna University of Technology, 2012. p. 6601-6607.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - On the role of interface dissipation in MEMS resonators

AU - Frangi, A.

AU - Cremonesi, M.

AU - Jaakkola, Antti

AU - Pensala, Tuomas

PY - 2012

Y1 - 2012

N2 - We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed, showing excellent quantitative agreement.

AB - We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed, showing excellent quantitative agreement.

KW - interface

KW - MEMS

KW - PML

KW - resonators

M3 - Conference article in proceedings

SP - 6601

EP - 6607

BT - Proceedings

PB - Vienna University of Technology

T2 - European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012

Y2 - 10 September 2012 through 14 September 2012

ER -

On the role of interface dissipation in MEMS resonators

Abstract

Conference

Keywords

Access to Document

Fingerprint

Cite this