On the role of interface dissipation in MEMS resonators

A. Frangi, M. Cremonesi, Antti Jaakkola, Tuomas Pensala

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed, showing excellent quantitative agreement.
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publication6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012
PublisherVienna University of Technology
Pages6601-6607
ISBN (Electronic)978-3-9503537-0-9
Publication statusPublished - 2012
MoE publication typeA4 Article in a conference publication
EventEuropean Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012 - Vienna, Austria
Duration: 10 Sep 201214 Sep 2012

Conference

ConferenceEuropean Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012
Abbreviated titleECCOMAS 2012
CountryAustria
CityVienna
Period10/09/1214/09/12

Fingerprint

microelectromechanical systems
dissipation
resonators
vibration mode
predictions

Keywords

  • interface
  • MEMS
  • PML
  • resonators

Cite this

Frangi, A., Cremonesi, M., Jaakkola, A., & Pensala, T. (2012). On the role of interface dissipation in MEMS resonators. In Proceedings: 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012 (pp. 6601-6607). Vienna University of Technology.
Frangi, A. ; Cremonesi, M. ; Jaakkola, Antti ; Pensala, Tuomas. / On the role of interface dissipation in MEMS resonators. Proceedings: 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012. Vienna University of Technology, 2012. pp. 6601-6607
@inproceedings{053584ffa2cd489f8d18c5b873eb7633,
title = "On the role of interface dissipation in MEMS resonators",
abstract = "We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed, showing excellent quantitative agreement.",
keywords = "interface, MEMS, PML, resonators",
author = "A. Frangi and M. Cremonesi and Antti Jaakkola and Tuomas Pensala",
year = "2012",
language = "English",
pages = "6601--6607",
booktitle = "Proceedings",
publisher = "Vienna University of Technology",
address = "Austria",

}

Frangi, A, Cremonesi, M, Jaakkola, A & Pensala, T 2012, On the role of interface dissipation in MEMS resonators. in Proceedings: 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012. Vienna University of Technology, pp. 6601-6607, European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012, Vienna, Austria, 10/09/12.

On the role of interface dissipation in MEMS resonators. / Frangi, A.; Cremonesi, M.; Jaakkola, Antti; Pensala, Tuomas.

Proceedings: 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012. Vienna University of Technology, 2012. p. 6601-6607.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - On the role of interface dissipation in MEMS resonators

AU - Frangi, A.

AU - Cremonesi, M.

AU - Jaakkola, Antti

AU - Pensala, Tuomas

PY - 2012

Y1 - 2012

N2 - We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed, showing excellent quantitative agreement.

AB - We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed, showing excellent quantitative agreement.

KW - interface

KW - MEMS

KW - PML

KW - resonators

M3 - Conference article in proceedings

SP - 6601

EP - 6607

BT - Proceedings

PB - Vienna University of Technology

ER -

Frangi A, Cremonesi M, Jaakkola A, Pensala T. On the role of interface dissipation in MEMS resonators. In Proceedings: 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012. Vienna University of Technology. 2012. p. 6601-6607