On thermal oxidation of silicon in steam

M. Leppihalme, Seppo Leppävuori, M Malmelin

Research output: Book/ReportReportProfessional

Original languageEnglish
Place of PublicationHelsinki
PublisherVTT Technical Research Centre of Finland
Number of pages16
Publication statusPublished - 1970
MoE publication typeD4 Published development or research report or study

Publication series

NameVtt tiedotus. Sarja II. Metalli
PublisherValtion teknillinen tutkimuslaitos
Volume30

Cite this

Leppihalme, M., Leppävuori, S., & Malmelin, M. (1970). On thermal oxidation of silicon in steam. Helsinki: VTT Technical Research Centre of Finland. Valtion teknillinen tutkimuslaitos. Tiedotus: Sarja II. Metalli, No. 30
Leppihalme, M. ; Leppävuori, Seppo ; Malmelin, M. / On thermal oxidation of silicon in steam. Helsinki : VTT Technical Research Centre of Finland, 1970. 16 p. (Valtion teknillinen tutkimuslaitos. Tiedotus: Sarja II. Metalli; No. 30).
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year = "1970",
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Leppihalme, M, Leppävuori, S & Malmelin, M 1970, On thermal oxidation of silicon in steam. Valtion teknillinen tutkimuslaitos. Tiedotus: Sarja II. Metalli, no. 30, VTT Technical Research Centre of Finland, Helsinki.

On thermal oxidation of silicon in steam. / Leppihalme, M.; Leppävuori, Seppo; Malmelin, M.

Helsinki : VTT Technical Research Centre of Finland, 1970. 16 p. (Valtion teknillinen tutkimuslaitos. Tiedotus: Sarja II. Metalli; No. 30).

Research output: Book/ReportReportProfessional

TY - BOOK

T1 - On thermal oxidation of silicon in steam

AU - Leppihalme, M.

AU - Leppävuori, Seppo

AU - Malmelin, M

PY - 1970

Y1 - 1970

M3 - Report

T3 - Vtt tiedotus. Sarja II. Metalli

BT - On thermal oxidation of silicon in steam

PB - VTT Technical Research Centre of Finland

CY - Helsinki

ER -

Leppihalme M, Leppävuori S, Malmelin M. On thermal oxidation of silicon in steam. Helsinki: VTT Technical Research Centre of Finland, 1970. 16 p. (Valtion teknillinen tutkimuslaitos. Tiedotus: Sarja II. Metalli; No. 30).