On thermal oxidation of silicon in steam

M. Leppihalme, Seppo Leppävuori, M Malmelin

Research output: Book/ReportReport

Original languageEnglish
Place of PublicationHelsinki
PublisherVTT Technical Research Centre of Finland
Number of pages16
Publication statusPublished - 1970
MoE publication typeD4 Published development or research report or study

Publication series

SeriesValtion teknillinen tutkimuslaitos. Tiedotus: Sarja II. Metalli
Number30
ISSN0073-1765

Cite this

Leppihalme, M., Leppävuori, S., & Malmelin, M. (1970). On thermal oxidation of silicon in steam. VTT Technical Research Centre of Finland. Valtion teknillinen tutkimuslaitos. Tiedotus: Sarja II. Metalli, No. 30