On thermal oxidation of silicon in steam

Research output: Book/Report › Report

Original language	English
Place of Publication	Helsinki
Publisher	VTT Technical Research Centre of Finland
Number of pages	16
Publication status	Published - 1970
MoE publication type	D4 Published development or research report or study

Series	Valtion teknillinen tutkimuslaitos. Tiedotus: Sarja II. Metalli
Number	30
ISSN	0073-1765

Cite this

@book{dd7098241bdd4409b5075b96e32ade06,

title = "On thermal oxidation of silicon in steam",

author = "M. Leppihalme and Seppo Lepp{\"a}vuori and M Malmelin",

year = "1970",

language = "English",

series = "Valtion teknillinen tutkimuslaitos. Tiedotus: Sarja II. Metalli",

publisher = "VTT Technical Research Centre of Finland",

number = "30",

address = "Finland",

}