Open-access 3 μm SOI waveguide platform for dense photonic integrated circuits

    Research output: Contribution to journalArticleScientificpeer-review

    Abstract

    This paper gives an overview of the 3 μm silicon-on-insulator (SOI) platform that is openly available from VTT and suitable for the realization of photonic integrated circuits (PICs) for near and mid-infrared applications. Specific benefits of this thick-SOI PIC platform include low optical losses (~0.1 dB/cm), ultra-dense integration (μm-scale bends), small polarization dependency (down-to-zero birefringence) and ability to tolerate relatively high optical powers (>1 W). Fabrication technology is based on an i-line stepper and 150 mm wafer size. Open access to the waveguide platform is supported by design kits, wafer-level testing, multi-project wafer runs, dedicated R&D runs and small-to-medium volume manufacturing.
    Original languageEnglish
    Article number8678404
    Number of pages9
    JournalIEEE Journal on Selected Topics in Quantum Electronics
    Volume25
    Issue number5
    Early online date1 Apr 2019
    DOIs
    Publication statusPublished - 1 Sep 2019
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Photonics
    integrated circuits
    Integrated circuits
    Waveguides
    platforms
    insulators
    wafers
    photonics
    waveguides
    Silicon
    Optical losses
    silicon
    Birefringence
    kits
    Polarization
    Infrared radiation
    Fabrication
    birefringence
    Testing
    manufacturing

    Keywords

    • silicon photonics
    • silicon-on-insulator
    • gratings
    • strips
    • ribs
    • waveguide gratings
    • silicon
    • mirrors
    • integrated optics

    Cite this

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    title = "Open-access 3 μm SOI waveguide platform for dense photonic integrated circuits",
    abstract = "This paper gives an overview of the 3 μm silicon-on-insulator (SOI) platform that is openly available from VTT and suitable for the realization of photonic integrated circuits (PICs) for near and mid-infrared applications. Specific benefits of this thick-SOI PIC platform include low optical losses (~0.1 dB/cm), ultra-dense integration (μm-scale bends), small polarization dependency (down-to-zero birefringence) and ability to tolerate relatively high optical powers (>1 W). Fabrication technology is based on an i-line stepper and 150 mm wafer size. Open access to the waveguide platform is supported by design kits, wafer-level testing, multi-project wafer runs, dedicated R&D runs and small-to-medium volume manufacturing.",
    keywords = "silicon photonics, silicon-on-insulator, gratings, strips, ribs, waveguide gratings, silicon, mirrors, integrated optics",
    author = "Timo Aalto and Matteo Cherchi and Mikko Harjanne and Srivathsa Bhat and Paivi Heimala and Fei Sun and Markku Kapulainen and Tomi Hassinen and Tapani Vehmas",
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    AU - Aalto, Timo

    AU - Cherchi, Matteo

    AU - Harjanne, Mikko

    AU - Bhat, Srivathsa

    AU - Heimala, Paivi

    AU - Sun, Fei

    AU - Kapulainen, Markku

    AU - Hassinen, Tomi

    AU - Vehmas, Tapani

    N1 - Project 118851

    PY - 2019/9/1

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    AB - This paper gives an overview of the 3 μm silicon-on-insulator (SOI) platform that is openly available from VTT and suitable for the realization of photonic integrated circuits (PICs) for near and mid-infrared applications. Specific benefits of this thick-SOI PIC platform include low optical losses (~0.1 dB/cm), ultra-dense integration (μm-scale bends), small polarization dependency (down-to-zero birefringence) and ability to tolerate relatively high optical powers (>1 W). Fabrication technology is based on an i-line stepper and 150 mm wafer size. Open access to the waveguide platform is supported by design kits, wafer-level testing, multi-project wafer runs, dedicated R&D runs and small-to-medium volume manufacturing.

    KW - silicon photonics

    KW - silicon-on-insulator

    KW - gratings

    KW - strips

    KW - ribs

    KW - waveguide gratings

    KW - silicon

    KW - mirrors

    KW - integrated optics

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