Abstract
| Original language | English |
|---|---|
| Article number | 8678404 |
| Number of pages | 9 |
| Journal | IEEE Journal on Selected Topics in Quantum Electronics |
| Volume | 25 |
| Issue number | 5 |
| Early online date | 1 Apr 2019 |
| DOIs | |
| Publication status | Published - 1 Sep 2019 |
| MoE publication type | A1 Journal article-refereed |
Fingerprint
Keywords
- silicon photonics
- silicon-on-insulator
- gratings
- strips
- ribs
- waveguide gratings
- silicon
- mirrors
- integrated optics
Cite this
}
Open-access 3 μm SOI waveguide platform for dense photonic integrated circuits. / Aalto, Timo; Cherchi, Matteo; Harjanne, Mikko; Bhat, Srivathsa; Heimala, Paivi; Sun, Fei; Kapulainen, Markku; Hassinen, Tomi; Vehmas, Tapani.
In: IEEE Journal on Selected Topics in Quantum Electronics, Vol. 25, No. 5, 8678404, 01.09.2019.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - Open-access 3 μm SOI waveguide platform for dense photonic integrated circuits
AU - Aalto, Timo
AU - Cherchi, Matteo
AU - Harjanne, Mikko
AU - Bhat, Srivathsa
AU - Heimala, Paivi
AU - Sun, Fei
AU - Kapulainen, Markku
AU - Hassinen, Tomi
AU - Vehmas, Tapani
N1 - Project 118851
PY - 2019/9/1
Y1 - 2019/9/1
N2 - This paper gives an overview of the 3 μm silicon-on-insulator (SOI) platform that is openly available from VTT and suitable for the realization of photonic integrated circuits (PICs) for near and mid-infrared applications. Specific benefits of this thick-SOI PIC platform include low optical losses (~0.1 dB/cm), ultra-dense integration (μm-scale bends), small polarization dependency (down-to-zero birefringence) and ability to tolerate relatively high optical powers (>1 W). Fabrication technology is based on an i-line stepper and 150 mm wafer size. Open access to the waveguide platform is supported by design kits, wafer-level testing, multi-project wafer runs, dedicated R&D runs and small-to-medium volume manufacturing.
AB - This paper gives an overview of the 3 μm silicon-on-insulator (SOI) platform that is openly available from VTT and suitable for the realization of photonic integrated circuits (PICs) for near and mid-infrared applications. Specific benefits of this thick-SOI PIC platform include low optical losses (~0.1 dB/cm), ultra-dense integration (μm-scale bends), small polarization dependency (down-to-zero birefringence) and ability to tolerate relatively high optical powers (>1 W). Fabrication technology is based on an i-line stepper and 150 mm wafer size. Open access to the waveguide platform is supported by design kits, wafer-level testing, multi-project wafer runs, dedicated R&D runs and small-to-medium volume manufacturing.
KW - silicon photonics
KW - silicon-on-insulator
KW - gratings
KW - strips
KW - ribs
KW - waveguide gratings
KW - silicon
KW - mirrors
KW - integrated optics
UR - http://www.scopus.com/inward/record.url?scp=85068130869&partnerID=8YFLogxK
U2 - 10.1109/JSTQE.2019.2908551
DO - 10.1109/JSTQE.2019.2908551
M3 - Article
VL - 25
JO - IEEE Journal on Selected Topics in Quantum Electronics
JF - IEEE Journal on Selected Topics in Quantum Electronics
SN - 1077-260X
IS - 5
M1 - 8678404
ER -