Open-access 3 μm SOI waveguide platform for dense photonic integrated circuits

Timo Aalto, Matteo Cherchi, Mikko Harjanne, Srivathsa Bhat, Paivi Heimala, Fei Sun, Markku Kapulainen, Tomi Hassinen, Tapani Vehmas

    Research output: Contribution to journal › Article › Scientific › peer-review

    Abstract

    This paper gives an overview of the 3 μm silicon-on-insulator (SOI) platform that is openly available from VTT and suitable for the realization of photonic integrated circuits (PICs) for near and mid-infrared applications. Specific benefits of this thick-SOI PIC platform include low optical losses (~0.1 dB/cm), ultra-dense integration (μm-scale bends), small polarization dependency (down-to-zero birefringence) and ability to tolerate relatively high optical powers (>1 W). Fabrication technology is based on an i-line stepper and 150 mm wafer size. Open access to the waveguide platform is supported by design kits, wafer-level testing, multi-project wafer runs, dedicated R&D runs and small-to-medium volume manufacturing.
    Original languageEnglish
    Article number8678404
    Number of pages9
    JournalIEEE Journal on Selected Topics in Quantum Electronics
    Volume25
    Issue number5
    Early online date1 Apr 2019
    DOIs
    Publication statusPublished - 1 Sep 2019
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Photonics
    integrated circuits
    Integrated circuits
    Waveguides
    platforms
    insulators
    wafers
    photonics
    waveguides
    Silicon
    Optical losses
    silicon
    Birefringence
    kits
    Polarization
    Infrared radiation
    Fabrication
    birefringence
    Testing
    manufacturing

    Keywords

    • silicon photonics
    • silicon-on-insulator
    • gratings
    • strips
    • ribs
    • waveguide gratings
    • silicon
    • mirrors
    • integrated optics

    Cite this

    Aalto, Timo ; Cherchi, Matteo ; Harjanne, Mikko ; Bhat, Srivathsa ; Heimala, Paivi ; Sun, Fei ; Kapulainen, Markku ; Hassinen, Tomi ; Vehmas, Tapani. / Open-access 3 μm SOI waveguide platform for dense photonic integrated circuits. In: IEEE Journal on Selected Topics in Quantum Electronics. 2019 ; Vol. 25, No. 5.
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    title = "Open-access 3 μm SOI waveguide platform for dense photonic integrated circuits",
    abstract = "This paper gives an overview of the 3 μm silicon-on-insulator (SOI) platform that is openly available from VTT and suitable for the realization of photonic integrated circuits (PICs) for near and mid-infrared applications. Specific benefits of this thick-SOI PIC platform include low optical losses (~0.1 dB/cm), ultra-dense integration (μm-scale bends), small polarization dependency (down-to-zero birefringence) and ability to tolerate relatively high optical powers (>1 W). Fabrication technology is based on an i-line stepper and 150 mm wafer size. Open access to the waveguide platform is supported by design kits, wafer-level testing, multi-project wafer runs, dedicated R&D runs and small-to-medium volume manufacturing.",
    keywords = "silicon photonics, silicon-on-insulator, gratings, strips, ribs, waveguide gratings, silicon, mirrors, integrated optics",
    author = "Timo Aalto and Matteo Cherchi and Mikko Harjanne and Srivathsa Bhat and Paivi Heimala and Fei Sun and Markku Kapulainen and Tomi Hassinen and Tapani Vehmas",
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    Aalto, T, Cherchi, M, Harjanne, M, Bhat, S, Heimala, P, Sun, F, Kapulainen, M, Hassinen, T & Vehmas, T 2019, 'Open-access 3 μm SOI waveguide platform for dense photonic integrated circuits', IEEE Journal on Selected Topics in Quantum Electronics, vol. 25, no. 5, 8678404. https://doi.org/10.1109/JSTQE.2019.2908551

    Open-access 3 μm SOI waveguide platform for dense photonic integrated circuits. / Aalto, Timo; Cherchi, Matteo; Harjanne, Mikko; Bhat, Srivathsa; Heimala, Paivi; Sun, Fei; Kapulainen, Markku; Hassinen, Tomi; Vehmas, Tapani.

    In: IEEE Journal on Selected Topics in Quantum Electronics, Vol. 25, No. 5, 8678404, 01.09.2019.

    Research output: Contribution to journal › Article › Scientific › peer-review

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    AU - Bhat, Srivathsa

    AU - Heimala, Paivi

    AU - Sun, Fei

    AU - Kapulainen, Markku

    AU - Hassinen, Tomi

    AU - Vehmas, Tapani

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    KW - silicon-on-insulator

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    KW - strips

    KW - ribs

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    KW - mirrors

    KW - integrated optics

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    Aalto T, Cherchi M, Harjanne M, Bhat S, Heimala P, Sun F et al. Open-access 3 μm SOI waveguide platform for dense photonic integrated circuits. IEEE Journal on Selected Topics in Quantum Electronics. 2019 Sep 1;25(5). 8678404. https://doi.org/10.1109/JSTQE.2019.2908551

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