Optical attachment for conversion shape and divergence of KrF laser beam

Alexander P. Zhevlakov, A.S. Grishkanich, S.V. Kascheev, Evgenij V. Gavrilov, Veli Kujanpää

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit.
    Original languageEnglish
    Title of host publication4th EOS Conference on Manufacturing and Testing of Optical Components
    Subtitle of host publicationEOSMTOC 2015
    Pages66-67
    Publication statusPublished - 2015
    MoE publication typeA4 Article in a conference publication
    Event4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015 - Munich, Germany
    Duration: 22 Jun 201524 Jun 2015
    Conference number: 4

    Conference

    Conference4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015
    Abbreviated titleEOSMTOC 201
    CountryGermany
    CityMunich
    Period22/06/1524/06/15
    OtherPart of: EOS conferences at the World of Photonics Congress 2015 (WPC2015)

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  • Cite this

    Zhevlakov, A. P., Grishkanich, A. S., Kascheev, S. V., Gavrilov, E. V., & Kujanpää, V. (2015). Optical attachment for conversion shape and divergence of KrF laser beam. In 4th EOS Conference on Manufacturing and Testing of Optical Components: EOSMTOC 2015 (pp. 66-67)