Optical attachment for conversion shape and divergence of KrF laser beam

Alexander P. Zhevlakov, A.S. Grishkanich, S.V. Kascheev, Evgenij V. Gavrilov, Veli Kujanpää

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit.
    Original languageEnglish
    Title of host publication4th EOS Conference on Manufacturing and Testing of Optical Components
    Subtitle of host publicationEOSMTOC 2015
    Pages66-67
    Publication statusPublished - 2015
    MoE publication typeA4 Article in a conference publication
    Event4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015 - Munich, Germany
    Duration: 22 Jun 201524 Jun 2015
    Conference number: 4

    Conference

    Conference4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015
    Abbreviated titleEOSMTOC 201
    CountryGermany
    CityMunich
    Period22/06/1524/06/15
    OtherPart of: EOS conferences at the World of Photonics Congress 2015 (WPC2015)

    Fingerprint

    attachment
    divergence
    laser beams
    laser outputs
    excimer lasers

    Cite this

    Zhevlakov, A. P., Grishkanich, A. S., Kascheev, S. V., Gavrilov, E. V., & Kujanpää, V. (2015). Optical attachment for conversion shape and divergence of KrF laser beam. In 4th EOS Conference on Manufacturing and Testing of Optical Components: EOSMTOC 2015 (pp. 66-67)
    Zhevlakov, Alexander P. ; Grishkanich, A.S. ; Kascheev, S.V. ; Gavrilov, Evgenij V. ; Kujanpää, Veli. / Optical attachment for conversion shape and divergence of KrF laser beam. 4th EOS Conference on Manufacturing and Testing of Optical Components: EOSMTOC 2015. 2015. pp. 66-67
    @inproceedings{6f6092791df446b9b139a80c3acd2bdf,
    title = "Optical attachment for conversion shape and divergence of KrF laser beam",
    abstract = "The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit.",
    author = "Zhevlakov, {Alexander P.} and A.S. Grishkanich and S.V. Kascheev and Gavrilov, {Evgenij V.} and Veli Kujanp{\"a}{\"a}",
    year = "2015",
    language = "English",
    isbn = "978-1-5108-1778-4",
    pages = "66--67",
    booktitle = "4th EOS Conference on Manufacturing and Testing of Optical Components",

    }

    Zhevlakov, AP, Grishkanich, AS, Kascheev, SV, Gavrilov, EV & Kujanpää, V 2015, Optical attachment for conversion shape and divergence of KrF laser beam. in 4th EOS Conference on Manufacturing and Testing of Optical Components: EOSMTOC 2015. pp. 66-67, 4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015, Munich, Germany, 22/06/15.

    Optical attachment for conversion shape and divergence of KrF laser beam. / Zhevlakov, Alexander P.; Grishkanich, A.S.; Kascheev, S.V.; Gavrilov, Evgenij V.; Kujanpää, Veli.

    4th EOS Conference on Manufacturing and Testing of Optical Components: EOSMTOC 2015. 2015. p. 66-67.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - Optical attachment for conversion shape and divergence of KrF laser beam

    AU - Zhevlakov, Alexander P.

    AU - Grishkanich, A.S.

    AU - Kascheev, S.V.

    AU - Gavrilov, Evgenij V.

    AU - Kujanpää, Veli

    PY - 2015

    Y1 - 2015

    N2 - The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit.

    AB - The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit.

    M3 - Conference article in proceedings

    SN - 978-1-5108-1778-4

    SP - 66

    EP - 67

    BT - 4th EOS Conference on Manufacturing and Testing of Optical Components

    ER -

    Zhevlakov AP, Grishkanich AS, Kascheev SV, Gavrilov EV, Kujanpää V. Optical attachment for conversion shape and divergence of KrF laser beam. In 4th EOS Conference on Manufacturing and Testing of Optical Components: EOSMTOC 2015. 2015. p. 66-67