Optical attachment for conversion shape and divergence of KrF laser beam

Alexander P. Zhevlakov; A.S. Grishkanich; S.V. Kascheev; Evgenij V. Gavrilov; Veli Kujanpää

Optical attachment for conversion shape and divergence of KrF laser beam

Alexander P. Zhevlakov, A.S. Grishkanich, S.V. Kascheev, Evgenij V. Gavrilov, Veli Kujanpää

ITMO University

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit.

Original language	English
Title of host publication	4th EOS Conference on Manufacturing and Testing of Optical Components
Subtitle of host publication	EOSMTOC 2015
Publisher	European Optical Society (EOS)
Pages	66-67
ISBN (Print)	978-1-5108-1778-4
Publication status	Published - 2015
MoE publication type	A4 Article in a conference publication
Event	4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015 - Munich, Germany Duration: 22 Jun 2015 → 24 Jun 2015 Conference number: 4

Conference

Conference	4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015
Abbreviated title	EOSMTOC 201
Country/Territory	Germany
City	Munich
Period	22/06/15 → 24/06/15
Other	Part of: EOS conferences at the World of Photonics Congress 2015 (WPC2015)

Cite this

@inproceedings{6f6092791df446b9b139a80c3acd2bdf,

title = "Optical attachment for conversion shape and divergence of KrF laser beam",

abstract = "The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit. ",

author = "Zhevlakov, {Alexander P.} and A.S. Grishkanich and S.V. Kascheev and Gavrilov, {Evgenij V.} and Veli Kujanp{\"a}{\"a}",

year = "2015",

language = "English",

isbn = "978-1-5108-1778-4",

pages = "66--67",

booktitle = "4th EOS Conference on Manufacturing and Testing of Optical Components",

publisher = "European Optical Society (EOS)",

address = "Germany",

note = "4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015, EOSMTOC 201 ; Conference date: 22-06-2015 Through 24-06-2015",

}

Zhevlakov, AP, Grishkanich, AS, Kascheev, SV, Gavrilov, EV & Kujanpää, V 2015, Optical attachment for conversion shape and divergence of KrF laser beam. in 4th EOS Conference on Manufacturing and Testing of Optical Components: EOSMTOC 2015. European Optical Society (EOS), pp. 66-67, 4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015, Munich, Germany, 22/06/15.

Optical attachment for conversion shape and divergence of KrF laser beam. / Zhevlakov, Alexander P.; Grishkanich, A.S.; Kascheev, S.V. et al.
4th EOS Conference on Manufacturing and Testing of Optical Components: EOSMTOC 2015. European Optical Society (EOS), 2015. p. 66-67.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Optical attachment for conversion shape and divergence of KrF laser beam

AU - Zhevlakov, Alexander P.

AU - Grishkanich, A.S.

AU - Kascheev, S.V.

AU - Gavrilov, Evgenij V.

AU - Kujanpää, Veli

N1 - Conference code: 4

PY - 2015

Y1 - 2015

N2 - The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit.

AB - The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit.

M3 - Conference article in proceedings

SN - 978-1-5108-1778-4

SP - 66

EP - 67

BT - 4th EOS Conference on Manufacturing and Testing of Optical Components

PB - European Optical Society (EOS)

T2 - 4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015

Y2 - 22 June 2015 through 24 June 2015

ER -

Optical attachment for conversion shape and divergence of KrF laser beam

Abstract

Conference

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