Abstract
The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit.
Original language | English |
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Title of host publication | 4th EOS Conference on Manufacturing and Testing of Optical Components |
Subtitle of host publication | EOSMTOC 2015 |
Publisher | European Optical Society (EOS) |
Pages | 66-67 |
ISBN (Print) | 978-1-5108-1778-4 |
Publication status | Published - 2015 |
MoE publication type | A4 Article in a conference publication |
Event | 4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015 - Munich, Germany Duration: 22 Jun 2015 → 24 Jun 2015 Conference number: 4 |
Conference
Conference | 4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015 |
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Abbreviated title | EOSMTOC 201 |
Country/Territory | Germany |
City | Munich |
Period | 22/06/15 → 24/06/15 |
Other | Part of: EOS conferences at the World of Photonics Congress 2015 (WPC2015) |