Optical attachment for conversion shape and divergence of KrF laser beam

Alexander P. Zhevlakov, A.S. Grishkanich, S.V. Kascheev, Evgenij V. Gavrilov, Veli Kujanpää

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit.
Original languageEnglish
Title of host publication4th EOS Conference on Manufacturing and Testing of Optical Components
Subtitle of host publicationEOSMTOC 2015
Pages66-67
Publication statusPublished - 2015
MoE publication typeA4 Article in a conference publication
Event4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015 - Munich, Germany
Duration: 22 Jun 201524 Jun 2015
Conference number: 4

Conference

Conference4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015
Abbreviated titleEOSMTOC 201
CountryGermany
CityMunich
Period22/06/1524/06/15
OtherPart of: EOS conferences at the World of Photonics Congress 2015 (WPC2015)

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attachment
divergence
laser beams
laser outputs
excimer lasers

Cite this

Zhevlakov, A. P., Grishkanich, A. S., Kascheev, S. V., Gavrilov, E. V., & Kujanpää, V. (2015). Optical attachment for conversion shape and divergence of KrF laser beam. In 4th EOS Conference on Manufacturing and Testing of Optical Components: EOSMTOC 2015 (pp. 66-67)
Zhevlakov, Alexander P. ; Grishkanich, A.S. ; Kascheev, S.V. ; Gavrilov, Evgenij V. ; Kujanpää, Veli. / Optical attachment for conversion shape and divergence of KrF laser beam. 4th EOS Conference on Manufacturing and Testing of Optical Components: EOSMTOC 2015. 2015. pp. 66-67
@inproceedings{6f6092791df446b9b139a80c3acd2bdf,
title = "Optical attachment for conversion shape and divergence of KrF laser beam",
abstract = "The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit.",
author = "Zhevlakov, {Alexander P.} and A.S. Grishkanich and S.V. Kascheev and Gavrilov, {Evgenij V.} and Veli Kujanp{\"a}{\"a}",
year = "2015",
language = "English",
isbn = "978-1-5108-1778-4",
pages = "66--67",
booktitle = "4th EOS Conference on Manufacturing and Testing of Optical Components",

}

Zhevlakov, AP, Grishkanich, AS, Kascheev, SV, Gavrilov, EV & Kujanpää, V 2015, Optical attachment for conversion shape and divergence of KrF laser beam. in 4th EOS Conference on Manufacturing and Testing of Optical Components: EOSMTOC 2015. pp. 66-67, 4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015, Munich, Germany, 22/06/15.

Optical attachment for conversion shape and divergence of KrF laser beam. / Zhevlakov, Alexander P.; Grishkanich, A.S.; Kascheev, S.V.; Gavrilov, Evgenij V.; Kujanpää, Veli.

4th EOS Conference on Manufacturing and Testing of Optical Components: EOSMTOC 2015. 2015. p. 66-67.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Optical attachment for conversion shape and divergence of KrF laser beam

AU - Zhevlakov, Alexander P.

AU - Grishkanich, A.S.

AU - Kascheev, S.V.

AU - Gavrilov, Evgenij V.

AU - Kujanpää, Veli

PY - 2015

Y1 - 2015

N2 - The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit.

AB - The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit.

M3 - Conference article in proceedings

SN - 978-1-5108-1778-4

SP - 66

EP - 67

BT - 4th EOS Conference on Manufacturing and Testing of Optical Components

ER -

Zhevlakov AP, Grishkanich AS, Kascheev SV, Gavrilov EV, Kujanpää V. Optical attachment for conversion shape and divergence of KrF laser beam. In 4th EOS Conference on Manufacturing and Testing of Optical Components: EOSMTOC 2015. 2015. p. 66-67