Optical attachment for conversion shape and divergence of KrF laser beam

Alexander P. Zhevlakov, A.S. Grishkanich, S.V. Kascheev, Evgenij V. Gavrilov, Veli Kujanpää

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit.
    Original languageEnglish
    Title of host publication4th EOS Conference on Manufacturing and Testing of Optical Components
    Subtitle of host publicationEOSMTOC 2015
    PublisherEuropean Optical Society (EOS)
    Pages66-67
    ISBN (Print)978-1-5108-1778-4
    Publication statusPublished - 2015
    MoE publication typeA4 Article in a conference publication
    Event4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015 - Munich, Germany
    Duration: 22 Jun 201524 Jun 2015
    Conference number: 4

    Conference

    Conference4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015
    Abbreviated titleEOSMTOC 201
    Country/TerritoryGermany
    CityMunich
    Period22/06/1524/06/15
    OtherPart of: EOS conferences at the World of Photonics Congress 2015 (WPC2015)

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