Abstract
The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this unit.
| Original language | English |
|---|---|
| Title of host publication | 4th EOS Conference on Manufacturing and Testing of Optical Components |
| Subtitle of host publication | EOSMTOC 2015 |
| Publisher | European Optical Society (EOS) |
| Pages | 66-67 |
| ISBN (Print) | 978-1-5108-1778-4 |
| Publication status | Published - 2015 |
| MoE publication type | A4 Article in a conference publication |
| Event | 4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015 - Munich, Germany Duration: 22 Jun 2015 → 24 Jun 2015 Conference number: 4 |
Conference
| Conference | 4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015 |
|---|---|
| Abbreviated title | EOSMTOC 201 |
| Country/Territory | Germany |
| City | Munich |
| Period | 22/06/15 → 24/06/15 |
| Other | Part of: EOS conferences at the World of Photonics Congress 2015 (WPC2015) |