Optical attachment for spatial transformation of excimer laser beam

Aleksandr Zhevlakov, Alexsandr Grishkanich, Sergey Kascheev, Veli Kujanpää, Timo Savinainen, Egor Gavrilov

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

5 Citations (Scopus)

Abstract

The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.
Original languageEnglish
Title of host publicationComponents and Packaging for Laser Systems II
PublisherInternational Society for Optics and Photonics SPIE
DOIs
Publication statusPublished - 2016
MoE publication typeA4 Article in a conference publication
EventSPIE Photonics West 2016: SPIE LASE - San Francisco, United States
Duration: 13 Feb 201618 Feb 2016

Publication series

SeriesProceedings of SPIE
Volume9730
ISSN0277-786X

Conference

ConferenceSPIE Photonics West 2016
Abbreviated titleSPIE LASE 2016
CountryUnited States
CitySan Francisco
Period13/02/1618/02/16

Fingerprint

excimer lasers
attachment
divergence
laser beams
optical paths
modules
illumination
retarding
irradiation

Cite this

Zhevlakov, A., Grishkanich, A., Kascheev, S., Kujanpää, V., Savinainen, T., & Gavrilov, E. (2016). Optical attachment for spatial transformation of excimer laser beam. In Components and Packaging for Laser Systems II International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 9730 https://doi.org/10.1117/12.2214706
Zhevlakov, Aleksandr ; Grishkanich, Alexsandr ; Kascheev, Sergey ; Kujanpää, Veli ; Savinainen, Timo ; Gavrilov, Egor. / Optical attachment for spatial transformation of excimer laser beam. Components and Packaging for Laser Systems II. International Society for Optics and Photonics SPIE, 2016. (Proceedings of SPIE, Vol. 9730).
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Zhevlakov, A, Grishkanich, A, Kascheev, S, Kujanpää, V, Savinainen, T & Gavrilov, E 2016, Optical attachment for spatial transformation of excimer laser beam. in Components and Packaging for Laser Systems II. International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 9730, SPIE Photonics West 2016, San Francisco, United States, 13/02/16. https://doi.org/10.1117/12.2214706

Optical attachment for spatial transformation of excimer laser beam. / Zhevlakov, Aleksandr; Grishkanich, Alexsandr; Kascheev, Sergey; Kujanpää, Veli; Savinainen, Timo; Gavrilov, Egor.

Components and Packaging for Laser Systems II. International Society for Optics and Photonics SPIE, 2016. (Proceedings of SPIE, Vol. 9730).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AU - Zhevlakov, Aleksandr

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AU - Kascheev, Sergey

AU - Kujanpää, Veli

AU - Savinainen, Timo

AU - Gavrilov, Egor

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AB - The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.

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Zhevlakov A, Grishkanich A, Kascheev S, Kujanpää V, Savinainen T, Gavrilov E. Optical attachment for spatial transformation of excimer laser beam. In Components and Packaging for Laser Systems II. International Society for Optics and Photonics SPIE. 2016. (Proceedings of SPIE, Vol. 9730). https://doi.org/10.1117/12.2214706