Abstract
The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.
| Original language | English |
|---|---|
| Title of host publication | Components and Packaging for Laser Systems II |
| Publisher | International Society for Optics and Photonics SPIE |
| DOIs | |
| Publication status | Published - 2016 |
| MoE publication type | A4 Article in a conference publication |
| Event | SPIE Photonics West 2016: SPIE LASE - San Francisco, United States Duration: 13 Feb 2016 → 18 Feb 2016 |
Publication series
| Series | Proceedings of SPIE |
|---|---|
| Volume | 9730 |
| ISSN | 0277-786X |
Conference
| Conference | SPIE Photonics West 2016 |
|---|---|
| Abbreviated title | SPIE LASE 2016 |
| Country | United States |
| City | San Francisco |
| Period | 13/02/16 → 18/02/16 |
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Cite this
Zhevlakov, A., Grishkanich, A., Kascheev, S., Kujanpää, V., Savinainen, T., & Gavrilov, E. (2016). Optical attachment for spatial transformation of excimer laser beam. In Components and Packaging for Laser Systems II International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 9730 https://doi.org/10.1117/12.2214706