@inproceedings{d3b04d2a5bd14d56b64f0b591c784f9d,
title = "Optical attachment for spatial transformation of excimer laser beam",
abstract = "The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of {"}hot{"} points.",
author = "Aleksandr Zhevlakov and Alexsandr Grishkanich and Sergey Kascheev and Veli Kujanp{\"a}{\"a} and Timo Savinainen and Egor Gavrilov",
year = "2016",
doi = "10.1117/12.2214706",
language = "English",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
booktitle = "Components and Packaging for Laser Systems II",
address = "United States",
note = "SPIE Photonics West 2016 : SPIE LASE, SPIE LASE 2016 ; Conference date: 13-02-2016 Through 18-02-2016",
}