Optical attachment for spatial transformation of excimer laser beam
- Aleksandr Zhevlakov
- , Alexsandr Grishkanich
- , Sergey Kascheev
- , Veli Kujanpää
- , Timo Savinainen
- , Egor Gavrilov
- ITMO University
- Lappeenranta-Lahti University of Technology LUT
- Institute for Laser Physics
- VTT (former employee or external)
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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(Scopus)