Optical attachment for transformation of output beam of excimer laser

Alexander Zhevlakov; Egor Gavrilov; Sergey Kascheev; Veli Kujanpää; Timo Savinainen

doi:10.1117/12.885210

Optical attachment for transformation of output beam of excimer laser

Alexander Zhevlakov, Egor Gavrilov, Sergey Kascheev, Veli Kujanpää, Timo Savinainen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated.
The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions.
It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.

Original language	English
Title of host publication	Proceedings of the SPIE
Subtitle of host publication	Laser Optics 2010
Publisher	International Society for Optics and Photonics SPIE
Number of pages	6
ISBN (Print)	978-0-8194-8331-7
DOIs	https://doi.org/10.1117/12.885210
Publication status	Published - 2010
MoE publication type	A4 Article in a conference publication
Event	Laser Optics 2010 - St. Petersburg, Russian Federation Duration: 28 Jun 2010 → 2 Jul 2010

Publication series

Series	Proceedings of SPIE
Volume	7822
ISSN	0277-786X

Conference

Conference	Laser Optics 2010
Country/Territory	Russian Federation
City	St. Petersburg
Period	28/06/10 → 2/07/10

Access to Document

10.1117/12.885210

Cite this

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title = "Optical attachment for transformation of output beam of excimer laser",

abstract = "The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of {"}hot{"} points.",

author = "Alexander Zhevlakov and Egor Gavrilov and Sergey Kascheev and Veli Kujanp{\"a}{\"a} and Timo Savinainen",

year = "2010",

doi = "10.1117/12.885210",

language = "English",

isbn = "978-0-8194-8331-7",

series = "Proceedings of SPIE",

publisher = "International Society for Optics and Photonics SPIE",

booktitle = "Proceedings of the SPIE",

address = "United States",

note = "Laser Optics 2010 ; Conference date: 28-06-2010 Through 02-07-2010",

}

Zhevlakov, A, Gavrilov, E, Kascheev, S, Kujanpää, V & Savinainen, T 2010, Optical attachment for transformation of output beam of excimer laser. in Proceedings of the SPIE: Laser Optics 2010., 78220C, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 7822, Laser Optics 2010, St. Petersburg, Russian Federation, 28/06/10. https://doi.org/10.1117/12.885210

Optical attachment for transformation of output beam of excimer laser. / Zhevlakov, Alexander; Gavrilov, Egor; Kascheev, Sergey et al.
Proceedings of the SPIE: Laser Optics 2010. International Society for Optics and Photonics SPIE, 2010. 78220C (Proceedings of SPIE, Vol. 7822).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Optical attachment for transformation of output beam of excimer laser

AU - Zhevlakov, Alexander

AU - Gavrilov, Egor

AU - Kascheev, Sergey

AU - Kujanpää, Veli

AU - Savinainen, Timo

PY - 2010

Y1 - 2010

N2 - The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.

AB - The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.

U2 - 10.1117/12.885210

DO - 10.1117/12.885210

M3 - Conference article in proceedings

SN - 978-0-8194-8331-7

T3 - Proceedings of SPIE

BT - Proceedings of the SPIE

PB - International Society for Optics and Photonics SPIE

T2 - Laser Optics 2010

Y2 - 28 June 2010 through 2 July 2010

ER -

Optical attachment for transformation of output beam of excimer laser

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