Optical attachment for transformation of output beam of excimer laser

Alexander Zhevlakov, Egor Gavrilov, Sergey Kascheev, Veli Kujanpää, Timo Savinainen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated.
    The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions.
    It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.
    Original languageEnglish
    Title of host publicationProceedings of the SPIE
    Subtitle of host publicationLaser Optics 2010
    PublisherInternational Society for Optics and Photonics SPIE
    Number of pages6
    ISBN (Print)978-0-8194-8331-7
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication
    EventLaser Optics 2010 - St. Petersburg, Russian Federation
    Duration: 28 Jun 20102 Jul 2010

    Publication series

    SeriesProceedings of SPIE
    Volume7822
    ISSN0277-786X

    Conference

    ConferenceLaser Optics 2010
    CountryRussian Federation
    CitySt. Petersburg
    Period28/06/102/07/10

    Fingerprint

    excimer lasers
    attachment
    divergence
    output
    optical paths
    modules
    illumination
    retarding
    laser beams
    irradiation

    Cite this

    Zhevlakov, A., Gavrilov, E., Kascheev, S., Kujanpää, V., & Savinainen, T. (2010). Optical attachment for transformation of output beam of excimer laser. In Proceedings of the SPIE: Laser Optics 2010 [78220C] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 7822 https://doi.org/10.1117/12.885210
    Zhevlakov, Alexander ; Gavrilov, Egor ; Kascheev, Sergey ; Kujanpää, Veli ; Savinainen, Timo. / Optical attachment for transformation of output beam of excimer laser. Proceedings of the SPIE: Laser Optics 2010. International Society for Optics and Photonics SPIE, 2010. (Proceedings of SPIE, Vol. 7822).
    @inproceedings{0f0c2396fc144349a384d1d3de8ec732,
    title = "Optical attachment for transformation of output beam of excimer laser",
    abstract = "The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 {\%}) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of {"}hot{"} points.",
    author = "Alexander Zhevlakov and Egor Gavrilov and Sergey Kascheev and Veli Kujanp{\"a}{\"a} and Timo Savinainen",
    year = "2010",
    doi = "10.1117/12.885210",
    language = "English",
    isbn = "978-0-8194-8331-7",
    series = "Proceedings of SPIE",
    publisher = "International Society for Optics and Photonics SPIE",
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    Zhevlakov, A, Gavrilov, E, Kascheev, S, Kujanpää, V & Savinainen, T 2010, Optical attachment for transformation of output beam of excimer laser. in Proceedings of the SPIE: Laser Optics 2010., 78220C, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 7822, Laser Optics 2010, St. Petersburg, Russian Federation, 28/06/10. https://doi.org/10.1117/12.885210

    Optical attachment for transformation of output beam of excimer laser. / Zhevlakov, Alexander; Gavrilov, Egor; Kascheev, Sergey; Kujanpää, Veli; Savinainen, Timo.

    Proceedings of the SPIE: Laser Optics 2010. International Society for Optics and Photonics SPIE, 2010. 78220C (Proceedings of SPIE, Vol. 7822).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    T1 - Optical attachment for transformation of output beam of excimer laser

    AU - Zhevlakov, Alexander

    AU - Gavrilov, Egor

    AU - Kascheev, Sergey

    AU - Kujanpää, Veli

    AU - Savinainen, Timo

    PY - 2010

    Y1 - 2010

    N2 - The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.

    AB - The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.

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    DO - 10.1117/12.885210

    M3 - Conference article in proceedings

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    PB - International Society for Optics and Photonics SPIE

    ER -

    Zhevlakov A, Gavrilov E, Kascheev S, Kujanpää V, Savinainen T. Optical attachment for transformation of output beam of excimer laser. In Proceedings of the SPIE: Laser Optics 2010. International Society for Optics and Photonics SPIE. 2010. 78220C. (Proceedings of SPIE, Vol. 7822). https://doi.org/10.1117/12.885210