Optical attachment for transformation of output beam of excimer laser

Alexander Zhevlakov, Egor Gavrilov, Sergey Kascheev, Veli Kujanpää, Timo Savinainen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated.
The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions.
It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.
Original languageEnglish
Title of host publicationProceedings of the SPIE
Subtitle of host publicationLaser Optics 2010
PublisherInternational Society for Optics and Photonics SPIE
Number of pages6
ISBN (Print)978-0-8194-8331-7
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
EventLaser Optics 2010 - St. Petersburg, Russian Federation
Duration: 28 Jun 20102 Jul 2010

Publication series

SeriesProceedings of SPIE
Volume7822
ISSN0277-786X

Conference

ConferenceLaser Optics 2010
CountryRussian Federation
CitySt. Petersburg
Period28/06/102/07/10

Fingerprint

excimer lasers
attachment
divergence
output
optical paths
modules
illumination
retarding
laser beams
irradiation

Cite this

Zhevlakov, A., Gavrilov, E., Kascheev, S., Kujanpää, V., & Savinainen, T. (2010). Optical attachment for transformation of output beam of excimer laser. In Proceedings of the SPIE: Laser Optics 2010 [78220C] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 7822 https://doi.org/10.1117/12.885210
Zhevlakov, Alexander ; Gavrilov, Egor ; Kascheev, Sergey ; Kujanpää, Veli ; Savinainen, Timo. / Optical attachment for transformation of output beam of excimer laser. Proceedings of the SPIE: Laser Optics 2010. International Society for Optics and Photonics SPIE, 2010. (Proceedings of SPIE, Vol. 7822).
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Zhevlakov, A, Gavrilov, E, Kascheev, S, Kujanpää, V & Savinainen, T 2010, Optical attachment for transformation of output beam of excimer laser. in Proceedings of the SPIE: Laser Optics 2010., 78220C, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 7822, Laser Optics 2010, St. Petersburg, Russian Federation, 28/06/10. https://doi.org/10.1117/12.885210

Optical attachment for transformation of output beam of excimer laser. / Zhevlakov, Alexander; Gavrilov, Egor; Kascheev, Sergey; Kujanpää, Veli; Savinainen, Timo.

Proceedings of the SPIE: Laser Optics 2010. International Society for Optics and Photonics SPIE, 2010. 78220C (Proceedings of SPIE, Vol. 7822).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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T1 - Optical attachment for transformation of output beam of excimer laser

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AU - Gavrilov, Egor

AU - Kascheev, Sergey

AU - Kujanpää, Veli

AU - Savinainen, Timo

PY - 2010

Y1 - 2010

N2 - The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.

AB - The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.

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Zhevlakov A, Gavrilov E, Kascheev S, Kujanpää V, Savinainen T. Optical attachment for transformation of output beam of excimer laser. In Proceedings of the SPIE: Laser Optics 2010. International Society for Optics and Photonics SPIE. 2010. 78220C. (Proceedings of SPIE, Vol. 7822). https://doi.org/10.1117/12.885210