Optical attachment for transformation of output beam of excimer laser

Alexander Zhevlakov, Egor Gavrilov, Sergey Kascheev, Veli Kujanpää, Timo Savinainen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated.
    The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions.
    It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.
    Original languageEnglish
    Title of host publicationProceedings of the SPIE
    Subtitle of host publicationLaser Optics 2010
    PublisherInternational Society for Optics and Photonics SPIE
    Number of pages6
    ISBN (Print)978-0-8194-8331-7
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication
    EventLaser Optics 2010 - St. Petersburg, Russian Federation
    Duration: 28 Jun 20102 Jul 2010

    Publication series

    SeriesProceedings of SPIE
    Volume7822
    ISSN0277-786X

    Conference

    ConferenceLaser Optics 2010
    CountryRussian Federation
    CitySt. Petersburg
    Period28/06/102/07/10

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