Abstract
Vertical hybrid integration of photodiodes (PD) and silicon-on-insulator (SOI) waveguides has been investigated.
To this end, InP-based planar detectors were used onto which a polymer prism was formed to turn the light beam into the vertical direction. The photodiodes were flip-chip mounted onto a SOI waveguide platform using thermo-compression bonding.
Comparable high responsivity of around 0.75 A/W was obtained when light was coupled directly into the prism as well as via a SOI waveguide. The responsivity for SOI integrated PDs was found to depend only to a minor extent on input wavelength and polarization. PD bandwidth of up to 10 GHz was measured.
The investigated optical coupling scheme proved to work well also when integrating a PD with an array of ten SOI waveguides which are combined with a star coupler.
To this end, InP-based planar detectors were used onto which a polymer prism was formed to turn the light beam into the vertical direction. The photodiodes were flip-chip mounted onto a SOI waveguide platform using thermo-compression bonding.
Comparable high responsivity of around 0.75 A/W was obtained when light was coupled directly into the prism as well as via a SOI waveguide. The responsivity for SOI integrated PDs was found to depend only to a minor extent on input wavelength and polarization. PD bandwidth of up to 10 GHz was measured.
The investigated optical coupling scheme proved to work well also when integrating a PD with an array of ten SOI waveguides which are combined with a star coupler.
Original language | English |
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Title of host publication | Proceedings |
Subtitle of host publication | 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010 |
Publisher | IEEE Institute of Electrical and Electronic Engineers |
Pages | 401-404 |
ISBN (Electronic) | 978-1-4244-5922-3 |
ISBN (Print) | 978-1-4244-5919-3 |
DOIs | |
Publication status | Published - 2010 |
MoE publication type | A4 Article in a conference publication |
Event | 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010 - Kagawa, Japan Duration: 31 May 2010 → 4 Jun 2010 |
Conference
Conference | 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010 |
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Abbreviated title | IPRM 2010 |
Country/Territory | Japan |
City | Kagawa |
Period | 31/05/10 → 4/06/10 |