Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism

L. Moerl, W. Passenberg, M. Ferstl, D. Schmidt, R. Zhang, Timo Aalto, Mikko Harjanne, Markku Kapulainen, Sammi Ylinen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

Vertical hybrid integration of photodiodes (PD) and silicon-on-insulator (SOI) waveguides has been investigated.
To this end, InP-based planar detectors were used onto which a polymer prism was formed to turn the light beam into the vertical direction. The photodiodes were flip-chip mounted onto a SOI waveguide platform using thermo-compression bonding.
Comparable high responsivity of around 0.75 A/W was obtained when light was coupled directly into the prism as well as via a SOI waveguide. The responsivity for SOI integrated PDs was found to depend only to a minor extent on input wavelength and polarization. PD bandwidth of up to 10 GHz was measured.
The investigated optical coupling scheme proved to work well also when integrating a PD with an array of ten SOI waveguides which are combined with a star coupler.
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publication22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010
PublisherInstitute of Electrical and Electronic Engineers IEEE
Pages401-404
ISBN (Electronic)978-1-4244-5922-3
ISBN (Print)978-1-4244-5919-3
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
Event22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010 - Kagawa, Japan
Duration: 31 May 20104 Jun 2010

Conference

Conference22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010
Abbreviated titleIPRM 2010
CountryJapan
CityKagawa
Period31/05/104/06/10

Fingerprint

optical coupling
prisms
photodiodes
insulators
waveguides
silicon
light beams
couplers
platforms
chips
bandwidth
stars
detectors
polymers
polarization
wavelengths

Cite this

Moerl, L., Passenberg, W., Ferstl, M., Schmidt, D., Zhang, R., Aalto, T., ... Ylinen, S. (2010). Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism. In Proceedings: 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010 (pp. 401-404). Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/ICIPRM.2010.5516229
Moerl, L. ; Passenberg, W. ; Ferstl, M. ; Schmidt, D. ; Zhang, R. ; Aalto, Timo ; Harjanne, Mikko ; Kapulainen, Markku ; Ylinen, Sammi. / Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism. Proceedings: 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010. Institute of Electrical and Electronic Engineers IEEE, 2010. pp. 401-404
@inproceedings{5f5718af397a4bccb78875382629701a,
title = "Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism",
abstract = "Vertical hybrid integration of photodiodes (PD) and silicon-on-insulator (SOI) waveguides has been investigated. To this end, InP-based planar detectors were used onto which a polymer prism was formed to turn the light beam into the vertical direction. The photodiodes were flip-chip mounted onto a SOI waveguide platform using thermo-compression bonding. Comparable high responsivity of around 0.75 A/W was obtained when light was coupled directly into the prism as well as via a SOI waveguide. The responsivity for SOI integrated PDs was found to depend only to a minor extent on input wavelength and polarization. PD bandwidth of up to 10 GHz was measured. The investigated optical coupling scheme proved to work well also when integrating a PD with an array of ten SOI waveguides which are combined with a star coupler.",
author = "L. Moerl and W. Passenberg and M. Ferstl and D. Schmidt and R. Zhang and Timo Aalto and Mikko Harjanne and Markku Kapulainen and Sammi Ylinen",
year = "2010",
doi = "10.1109/ICIPRM.2010.5516229",
language = "English",
isbn = "978-1-4244-5919-3",
pages = "401--404",
booktitle = "Proceedings",
publisher = "Institute of Electrical and Electronic Engineers IEEE",
address = "United States",

}

Moerl, L, Passenberg, W, Ferstl, M, Schmidt, D, Zhang, R, Aalto, T, Harjanne, M, Kapulainen, M & Ylinen, S 2010, Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism. in Proceedings: 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010. Institute of Electrical and Electronic Engineers IEEE, pp. 401-404, 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010, Kagawa, Japan, 31/05/10. https://doi.org/10.1109/ICIPRM.2010.5516229

Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism. / Moerl, L.; Passenberg, W.; Ferstl, M.; Schmidt, D.; Zhang, R.; Aalto, Timo; Harjanne, Mikko; Kapulainen, Markku; Ylinen, Sammi.

Proceedings: 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010. Institute of Electrical and Electronic Engineers IEEE, 2010. p. 401-404.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism

AU - Moerl, L.

AU - Passenberg, W.

AU - Ferstl, M.

AU - Schmidt, D.

AU - Zhang, R.

AU - Aalto, Timo

AU - Harjanne, Mikko

AU - Kapulainen, Markku

AU - Ylinen, Sammi

PY - 2010

Y1 - 2010

N2 - Vertical hybrid integration of photodiodes (PD) and silicon-on-insulator (SOI) waveguides has been investigated. To this end, InP-based planar detectors were used onto which a polymer prism was formed to turn the light beam into the vertical direction. The photodiodes were flip-chip mounted onto a SOI waveguide platform using thermo-compression bonding. Comparable high responsivity of around 0.75 A/W was obtained when light was coupled directly into the prism as well as via a SOI waveguide. The responsivity for SOI integrated PDs was found to depend only to a minor extent on input wavelength and polarization. PD bandwidth of up to 10 GHz was measured. The investigated optical coupling scheme proved to work well also when integrating a PD with an array of ten SOI waveguides which are combined with a star coupler.

AB - Vertical hybrid integration of photodiodes (PD) and silicon-on-insulator (SOI) waveguides has been investigated. To this end, InP-based planar detectors were used onto which a polymer prism was formed to turn the light beam into the vertical direction. The photodiodes were flip-chip mounted onto a SOI waveguide platform using thermo-compression bonding. Comparable high responsivity of around 0.75 A/W was obtained when light was coupled directly into the prism as well as via a SOI waveguide. The responsivity for SOI integrated PDs was found to depend only to a minor extent on input wavelength and polarization. PD bandwidth of up to 10 GHz was measured. The investigated optical coupling scheme proved to work well also when integrating a PD with an array of ten SOI waveguides which are combined with a star coupler.

U2 - 10.1109/ICIPRM.2010.5516229

DO - 10.1109/ICIPRM.2010.5516229

M3 - Conference article in proceedings

SN - 978-1-4244-5919-3

SP - 401

EP - 404

BT - Proceedings

PB - Institute of Electrical and Electronic Engineers IEEE

ER -

Moerl L, Passenberg W, Ferstl M, Schmidt D, Zhang R, Aalto T et al. Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism. In Proceedings: 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010. Institute of Electrical and Electronic Engineers IEEE. 2010. p. 401-404 https://doi.org/10.1109/ICIPRM.2010.5516229