Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism

L. Moerl, W. Passenberg, M. Ferstl, D. Schmidt, R. Zhang, Timo Aalto, Mikko Harjanne, Markku Kapulainen, Sammi Ylinen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    Vertical hybrid integration of photodiodes (PD) and silicon-on-insulator (SOI) waveguides has been investigated.
    To this end, InP-based planar detectors were used onto which a polymer prism was formed to turn the light beam into the vertical direction. The photodiodes were flip-chip mounted onto a SOI waveguide platform using thermo-compression bonding.
    Comparable high responsivity of around 0.75 A/W was obtained when light was coupled directly into the prism as well as via a SOI waveguide. The responsivity for SOI integrated PDs was found to depend only to a minor extent on input wavelength and polarization. PD bandwidth of up to 10 GHz was measured.
    The investigated optical coupling scheme proved to work well also when integrating a PD with an array of ten SOI waveguides which are combined with a star coupler.
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publication22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages401-404
    ISBN (Electronic)978-1-4244-5922-3
    ISBN (Print)978-1-4244-5919-3
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication
    Event22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010 - Kagawa, Japan
    Duration: 31 May 20104 Jun 2010

    Conference

    Conference22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010
    Abbreviated titleIPRM 2010
    CountryJapan
    CityKagawa
    Period31/05/104/06/10

    Fingerprint

    optical coupling
    prisms
    photodiodes
    insulators
    waveguides
    silicon
    light beams
    couplers
    platforms
    chips
    bandwidth
    stars
    detectors
    polymers
    polarization
    wavelengths

    Cite this

    Moerl, L., Passenberg, W., Ferstl, M., Schmidt, D., Zhang, R., Aalto, T., ... Ylinen, S. (2010). Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism. In Proceedings: 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010 (pp. 401-404). IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/ICIPRM.2010.5516229
    Moerl, L. ; Passenberg, W. ; Ferstl, M. ; Schmidt, D. ; Zhang, R. ; Aalto, Timo ; Harjanne, Mikko ; Kapulainen, Markku ; Ylinen, Sammi. / Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism. Proceedings: 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010. IEEE Institute of Electrical and Electronic Engineers , 2010. pp. 401-404
    @inproceedings{5f5718af397a4bccb78875382629701a,
    title = "Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism",
    abstract = "Vertical hybrid integration of photodiodes (PD) and silicon-on-insulator (SOI) waveguides has been investigated. To this end, InP-based planar detectors were used onto which a polymer prism was formed to turn the light beam into the vertical direction. The photodiodes were flip-chip mounted onto a SOI waveguide platform using thermo-compression bonding. Comparable high responsivity of around 0.75 A/W was obtained when light was coupled directly into the prism as well as via a SOI waveguide. The responsivity for SOI integrated PDs was found to depend only to a minor extent on input wavelength and polarization. PD bandwidth of up to 10 GHz was measured. The investigated optical coupling scheme proved to work well also when integrating a PD with an array of ten SOI waveguides which are combined with a star coupler.",
    author = "L. Moerl and W. Passenberg and M. Ferstl and D. Schmidt and R. Zhang and Timo Aalto and Mikko Harjanne and Markku Kapulainen and Sammi Ylinen",
    year = "2010",
    doi = "10.1109/ICIPRM.2010.5516229",
    language = "English",
    isbn = "978-1-4244-5919-3",
    pages = "401--404",
    booktitle = "Proceedings",
    publisher = "IEEE Institute of Electrical and Electronic Engineers",
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    Moerl, L, Passenberg, W, Ferstl, M, Schmidt, D, Zhang, R, Aalto, T, Harjanne, M, Kapulainen, M & Ylinen, S 2010, Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism. in Proceedings: 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010. IEEE Institute of Electrical and Electronic Engineers , pp. 401-404, 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010, Kagawa, Japan, 31/05/10. https://doi.org/10.1109/ICIPRM.2010.5516229

    Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism. / Moerl, L.; Passenberg, W.; Ferstl, M.; Schmidt, D.; Zhang, R.; Aalto, Timo; Harjanne, Mikko; Kapulainen, Markku; Ylinen, Sammi.

    Proceedings: 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010. IEEE Institute of Electrical and Electronic Engineers , 2010. p. 401-404.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism

    AU - Moerl, L.

    AU - Passenberg, W.

    AU - Ferstl, M.

    AU - Schmidt, D.

    AU - Zhang, R.

    AU - Aalto, Timo

    AU - Harjanne, Mikko

    AU - Kapulainen, Markku

    AU - Ylinen, Sammi

    PY - 2010

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    N2 - Vertical hybrid integration of photodiodes (PD) and silicon-on-insulator (SOI) waveguides has been investigated. To this end, InP-based planar detectors were used onto which a polymer prism was formed to turn the light beam into the vertical direction. The photodiodes were flip-chip mounted onto a SOI waveguide platform using thermo-compression bonding. Comparable high responsivity of around 0.75 A/W was obtained when light was coupled directly into the prism as well as via a SOI waveguide. The responsivity for SOI integrated PDs was found to depend only to a minor extent on input wavelength and polarization. PD bandwidth of up to 10 GHz was measured. The investigated optical coupling scheme proved to work well also when integrating a PD with an array of ten SOI waveguides which are combined with a star coupler.

    AB - Vertical hybrid integration of photodiodes (PD) and silicon-on-insulator (SOI) waveguides has been investigated. To this end, InP-based planar detectors were used onto which a polymer prism was formed to turn the light beam into the vertical direction. The photodiodes were flip-chip mounted onto a SOI waveguide platform using thermo-compression bonding. Comparable high responsivity of around 0.75 A/W was obtained when light was coupled directly into the prism as well as via a SOI waveguide. The responsivity for SOI integrated PDs was found to depend only to a minor extent on input wavelength and polarization. PD bandwidth of up to 10 GHz was measured. The investigated optical coupling scheme proved to work well also when integrating a PD with an array of ten SOI waveguides which are combined with a star coupler.

    U2 - 10.1109/ICIPRM.2010.5516229

    DO - 10.1109/ICIPRM.2010.5516229

    M3 - Conference article in proceedings

    SN - 978-1-4244-5919-3

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    BT - Proceedings

    PB - IEEE Institute of Electrical and Electronic Engineers

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    Moerl L, Passenberg W, Ferstl M, Schmidt D, Zhang R, Aalto T et al. Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism. In Proceedings: 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010. IEEE Institute of Electrical and Electronic Engineers . 2010. p. 401-404 https://doi.org/10.1109/ICIPRM.2010.5516229