Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism

L. Moerl, W. Passenberg, M. Ferstl, D. Schmidt, R. Zhang, Timo Aalto, Mikko Harjanne, Markku Kapulainen, Sammi Ylinen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    Vertical hybrid integration of photodiodes (PD) and silicon-on-insulator (SOI) waveguides has been investigated.
    To this end, InP-based planar detectors were used onto which a polymer prism was formed to turn the light beam into the vertical direction. The photodiodes were flip-chip mounted onto a SOI waveguide platform using thermo-compression bonding.
    Comparable high responsivity of around 0.75 A/W was obtained when light was coupled directly into the prism as well as via a SOI waveguide. The responsivity for SOI integrated PDs was found to depend only to a minor extent on input wavelength and polarization. PD bandwidth of up to 10 GHz was measured.
    The investigated optical coupling scheme proved to work well also when integrating a PD with an array of ten SOI waveguides which are combined with a star coupler.
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publication22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages401-404
    ISBN (Electronic)978-1-4244-5922-3
    ISBN (Print)978-1-4244-5919-3
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication
    Event22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010 - Kagawa, Japan
    Duration: 31 May 20104 Jun 2010

    Conference

    Conference22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010
    Abbreviated titleIPRM 2010
    CountryJapan
    CityKagawa
    Period31/05/104/06/10

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    Cite this

    Moerl, L., Passenberg, W., Ferstl, M., Schmidt, D., Zhang, R., Aalto, T., Harjanne, M., Kapulainen, M., & Ylinen, S. (2010). Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism. In Proceedings: 22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010 (pp. 401-404). IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/ICIPRM.2010.5516229