Optical coupling structure made by imprinting between single-mode polymer waveguide and embedded VCSEL

Mikko Karppinen, Noora Salminen, Tia Korhonen, Teemu Alajoki, Jarno Petäjä, Erwin Bosman, Geert Van Steenberge, John Justice, Umar Khan, Brian Corbett, Arjen Boersma

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)


Polymer-based integrated optics is attractive for inter-chip optical interconnection applications, for instance, for coupling photonic devices to fibers in high density packaging. In such a hybrid integration scheme, a key challenge is to achieve efficient optical coupling between the photonic chips and waveguides. With the single-mode polymer waveguides, the alignment tolerances become especially critical as compared to the typical accuracies of the patterning processes. We study novel techniques for such coupling requirements. In this paper, we present a waveguide-embedded micro-mirror structure, which can be aligned with high precision, even active alignment method is possible. The structure enables 90 degree bend coupling between a single-mode waveguide and a vertical-emitting/detecting chip, such as, a VCSEL or photodiode, which is embedded under the waveguide layer. Both the mirror structure and low-loss polymer waveguides are fabricated in a process based mainly on the direct-pattern UV nanoimprinting technology and on the use of UVcurable polymeric materials. Fabrication results of the coupling structure with waveguides are presented, and the critical alignment tolerances and manufacturability issues are discussed.
Original languageEnglish
Title of host publicationOptical Interconnects XV
Subtitle of host publication93680H
PublisherInternational Society for Optics and Photonics SPIE
Publication statusPublished - 2015
MoE publication typeA4 Article in a conference publication
EventSPIE OPTO, Optical Interconnects XV - San Francisco, United States
Duration: 7 Feb 201512 Feb 2015

Publication series

SeriesProceedings of SPIE


ConferenceSPIE OPTO, Optical Interconnects XV
Abbreviated titleSPIE OPTO
CountryUnited States
CitySan Francisco


  • integrated optics
  • optical coupling
  • optical interconnect
  • polymer photonics
  • single-mode waveguide
  • UV nanoimprinting

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