Optical coupling structure made by imprinting between single-mode polymer waveguide and embedded VCSEL

Mikko Karppinen, Noora Salminen, Tia Korhonen, Teemu Alajoki, Jarno Petäjä, Erwin Bosman, Geert Van Steenberge, John Justice, Umar Khan, Brian Corbett, Arjen Boersma

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Abstract

Polymer-based integrated optics is attractive for inter-chip optical interconnection applications, for instance, for coupling photonic devices to fibers in high density packaging. In such a hybrid integration scheme, a key challenge is to achieve efficient optical coupling between the photonic chips and waveguides. With the single-mode polymer waveguides, the alignment tolerances become especially critical as compared to the typical accuracies of the patterning processes. We study novel techniques for such coupling requirements. In this paper, we present a waveguide-embedded micro-mirror structure, which can be aligned with high precision, even active alignment method is possible. The structure enables 90 degree bend coupling between a single-mode waveguide and a vertical-emitting/detecting chip, such as, a VCSEL or photodiode, which is embedded under the waveguide layer. Both the mirror structure and low-loss polymer waveguides are fabricated in a process based mainly on the direct-pattern UV nanoimprinting technology and on the use of UVcurable polymeric materials. Fabrication results of the coupling structure with waveguides are presented, and the critical alignment tolerances and manufacturability issues are discussed.
Original languageEnglish
Title of host publicationOptical Interconnects XV
Subtitle of host publication93680H
PublisherInternational Society for Optics and Photonics SPIE
DOIs
Publication statusPublished - 2015
MoE publication typeA4 Article in a conference publication
EventSPIE OPTO, Optical Interconnects XV - San Francisco, United States
Duration: 7 Feb 201512 Feb 2015

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume9368
ISSN (Print)0277-786X

Conference

ConferenceSPIE OPTO, Optical Interconnects XV
Abbreviated titleSPIE OPTO
CountryUnited States
CitySan Francisco
Period7/02/1512/02/15

Fingerprint

optical coupling
waveguides
polymers
chips
alignment
photonics
mirrors
integrated optics
packaging
photodiodes
requirements
fabrication
fibers

Keywords

  • integrated optics
  • optical coupling
  • optical interconnect
  • polymer photonics
  • single-mode waveguide
  • UV nanoimprinting

Cite this

Karppinen, M., Salminen, N., Korhonen, T., Alajoki, T., Petäjä, J., Bosman, E., ... Boersma, A. (2015). Optical coupling structure made by imprinting between single-mode polymer waveguide and embedded VCSEL. In Optical Interconnects XV: 93680H International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 9368 https://doi.org/10.1117/12.2082935
Karppinen, Mikko ; Salminen, Noora ; Korhonen, Tia ; Alajoki, Teemu ; Petäjä, Jarno ; Bosman, Erwin ; Van Steenberge, Geert ; Justice, John ; Khan, Umar ; Corbett, Brian ; Boersma, Arjen. / Optical coupling structure made by imprinting between single-mode polymer waveguide and embedded VCSEL. Optical Interconnects XV: 93680H. International Society for Optics and Photonics SPIE, 2015. (Proceedings of SPIE, Vol. 9368).
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abstract = "Polymer-based integrated optics is attractive for inter-chip optical interconnection applications, for instance, for coupling photonic devices to fibers in high density packaging. In such a hybrid integration scheme, a key challenge is to achieve efficient optical coupling between the photonic chips and waveguides. With the single-mode polymer waveguides, the alignment tolerances become especially critical as compared to the typical accuracies of the patterning processes. We study novel techniques for such coupling requirements. In this paper, we present a waveguide-embedded micro-mirror structure, which can be aligned with high precision, even active alignment method is possible. The structure enables 90 degree bend coupling between a single-mode waveguide and a vertical-emitting/detecting chip, such as, a VCSEL or photodiode, which is embedded under the waveguide layer. Both the mirror structure and low-loss polymer waveguides are fabricated in a process based mainly on the direct-pattern UV nanoimprinting technology and on the use of UVcurable polymeric materials. Fabrication results of the coupling structure with waveguides are presented, and the critical alignment tolerances and manufacturability issues are discussed.",
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author = "Mikko Karppinen and Noora Salminen and Tia Korhonen and Teemu Alajoki and Jarno Pet{\"a}j{\"a} and Erwin Bosman and {Van Steenberge}, Geert and John Justice and Umar Khan and Brian Corbett and Arjen Boersma",
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Karppinen, M, Salminen, N, Korhonen, T, Alajoki, T, Petäjä, J, Bosman, E, Van Steenberge, G, Justice, J, Khan, U, Corbett, B & Boersma, A 2015, Optical coupling structure made by imprinting between single-mode polymer waveguide and embedded VCSEL. in Optical Interconnects XV: 93680H. International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 9368, SPIE OPTO, Optical Interconnects XV, San Francisco, United States, 7/02/15. https://doi.org/10.1117/12.2082935

Optical coupling structure made by imprinting between single-mode polymer waveguide and embedded VCSEL. / Karppinen, Mikko; Salminen, Noora; Korhonen, Tia; Alajoki, Teemu; Petäjä, Jarno; Bosman, Erwin; Van Steenberge, Geert; Justice, John; Khan, Umar; Corbett, Brian; Boersma, Arjen.

Optical Interconnects XV: 93680H. International Society for Optics and Photonics SPIE, 2015. (Proceedings of SPIE, Vol. 9368).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AU - Karppinen, Mikko

AU - Salminen, Noora

AU - Korhonen, Tia

AU - Alajoki, Teemu

AU - Petäjä, Jarno

AU - Bosman, Erwin

AU - Van Steenberge, Geert

AU - Justice, John

AU - Khan, Umar

AU - Corbett, Brian

AU - Boersma, Arjen

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N2 - Polymer-based integrated optics is attractive for inter-chip optical interconnection applications, for instance, for coupling photonic devices to fibers in high density packaging. In such a hybrid integration scheme, a key challenge is to achieve efficient optical coupling between the photonic chips and waveguides. With the single-mode polymer waveguides, the alignment tolerances become especially critical as compared to the typical accuracies of the patterning processes. We study novel techniques for such coupling requirements. In this paper, we present a waveguide-embedded micro-mirror structure, which can be aligned with high precision, even active alignment method is possible. The structure enables 90 degree bend coupling between a single-mode waveguide and a vertical-emitting/detecting chip, such as, a VCSEL or photodiode, which is embedded under the waveguide layer. Both the mirror structure and low-loss polymer waveguides are fabricated in a process based mainly on the direct-pattern UV nanoimprinting technology and on the use of UVcurable polymeric materials. Fabrication results of the coupling structure with waveguides are presented, and the critical alignment tolerances and manufacturability issues are discussed.

AB - Polymer-based integrated optics is attractive for inter-chip optical interconnection applications, for instance, for coupling photonic devices to fibers in high density packaging. In such a hybrid integration scheme, a key challenge is to achieve efficient optical coupling between the photonic chips and waveguides. With the single-mode polymer waveguides, the alignment tolerances become especially critical as compared to the typical accuracies of the patterning processes. We study novel techniques for such coupling requirements. In this paper, we present a waveguide-embedded micro-mirror structure, which can be aligned with high precision, even active alignment method is possible. The structure enables 90 degree bend coupling between a single-mode waveguide and a vertical-emitting/detecting chip, such as, a VCSEL or photodiode, which is embedded under the waveguide layer. Both the mirror structure and low-loss polymer waveguides are fabricated in a process based mainly on the direct-pattern UV nanoimprinting technology and on the use of UVcurable polymeric materials. Fabrication results of the coupling structure with waveguides are presented, and the critical alignment tolerances and manufacturability issues are discussed.

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KW - optical coupling

KW - optical interconnect

KW - polymer photonics

KW - single-mode waveguide

KW - UV nanoimprinting

U2 - 10.1117/12.2082935

DO - 10.1117/12.2082935

M3 - Conference article in proceedings

T3 - Proceedings of SPIE

BT - Optical Interconnects XV

PB - International Society for Optics and Photonics SPIE

ER -

Karppinen M, Salminen N, Korhonen T, Alajoki T, Petäjä J, Bosman E et al. Optical coupling structure made by imprinting between single-mode polymer waveguide and embedded VCSEL. In Optical Interconnects XV: 93680H. International Society for Optics and Photonics SPIE. 2015. (Proceedings of SPIE, Vol. 9368). https://doi.org/10.1117/12.2082935