Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge

P. Paris, Jukka A. Heikkinen, Joonas Järvinen, Antero Tiitta

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings of the XLI Annual Conference of the Finnish Physical Society
EditorsR. Vainio, J. Pomoell , M. Louhivuori
PublisherUniversity of Helsinki
Pages284
ISBN (Print)978-952-10-3236-3
Publication statusPublished - 2007
MoE publication typeB3 Non-refereed article in conference proceedings
EventXLI Annual Conference of the Finnish Physical Society - Tallin, Estonia
Duration: 15 Mar 200717 Mar 2007

Publication series

SeriesUniversity of Helsinki: Department of Physics. Report Series in Physics
Number267
ISSN0355-5801

Conference

ConferenceXLI Annual Conference of the Finnish Physical Society
CountryEstonia
CityTallin
Period15/03/0717/03/07

Cite this

Paris, P., Heikkinen, J. A., Järvinen, J., & Tiitta, A. (2007). Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge. In R. Vainio, J. Pomoell , & M. Louhivuori (Eds.), Proceedings of the XLI Annual Conference of the Finnish Physical Society (pp. 284). University of Helsinki. University of Helsinki: Department of Physics. Report Series in Physics, No. 267
Paris, P. ; Heikkinen, Jukka A. ; Järvinen, Joonas ; Tiitta, Antero. / Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge. Proceedings of the XLI Annual Conference of the Finnish Physical Society. editor / R. Vainio ; J. Pomoell ; M. Louhivuori. University of Helsinki, 2007. pp. 284 (University of Helsinki: Department of Physics. Report Series in Physics; No. 267).
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series = "University of Helsinki: Department of Physics. Report Series in Physics",
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Paris, P, Heikkinen, JA, Järvinen, J & Tiitta, A 2007, Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge. in R Vainio, J Pomoell & M Louhivuori (eds), Proceedings of the XLI Annual Conference of the Finnish Physical Society. University of Helsinki, University of Helsinki: Department of Physics. Report Series in Physics, no. 267, pp. 284, XLI Annual Conference of the Finnish Physical Society, Tallin, Estonia, 15/03/07.

Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge. / Paris, P.; Heikkinen, Jukka A.; Järvinen, Joonas; Tiitta, Antero.

Proceedings of the XLI Annual Conference of the Finnish Physical Society. ed. / R. Vainio; J. Pomoell ; M. Louhivuori. University of Helsinki, 2007. p. 284 (University of Helsinki: Department of Physics. Report Series in Physics; No. 267).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

TY - GEN

T1 - Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge

AU - Paris, P.

AU - Heikkinen, Jukka A.

AU - Järvinen, Joonas

AU - Tiitta, Antero

PY - 2007

Y1 - 2007

M3 - Conference article in proceedings

SN - 978-952-10-3236-3

T3 - University of Helsinki: Department of Physics. Report Series in Physics

SP - 284

BT - Proceedings of the XLI Annual Conference of the Finnish Physical Society

A2 - Vainio, R.

A2 - Pomoell , J.

A2 - Louhivuori, M.

PB - University of Helsinki

ER -

Paris P, Heikkinen JA, Järvinen J, Tiitta A. Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge. In Vainio R, Pomoell J, Louhivuori M, editors, Proceedings of the XLI Annual Conference of the Finnish Physical Society. University of Helsinki. 2007. p. 284. (University of Helsinki: Department of Physics. Report Series in Physics; No. 267).