Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge

P. Paris; Jukka A. Heikkinen; Joonas Järvinen; Antero Tiitta

Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge

P. Paris, Jukka A. Heikkinen, Joonas Järvinen, Antero Tiitta

VTT Technical Research Centre of Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Original language	English
Title of host publication	Proceedings of the XLI Annual Conference of the Finnish Physical Society
Editors	R. Vainio, J. Pomoell , M. Louhivuori
Publisher	University of Helsinki
Pages	284
ISBN (Print)	978-952-10-3236-3
Publication status	Published - 2007
MoE publication type	B3 Non-refereed article in conference proceedings
Event	XLI Annual Conference of the Finnish Physical Society - Tallin, Estonia Duration: 15 Mar 2007 → 17 Mar 2007

Publication series

Series	University of Helsinki: Department of Physics. Report Series in Physics
Number	267
ISSN	0355-5801

Conference

Conference	XLI Annual Conference of the Finnish Physical Society
Country/Territory	Estonia
City	Tallin
Period	15/03/07 → 17/03/07

Cite this

Paris, P. ; Heikkinen, Jukka A. ; Järvinen, Joonas et al. / Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge. Proceedings of the XLI Annual Conference of the Finnish Physical Society. editor / R. Vainio ; J. Pomoell ; M. Louhivuori. University of Helsinki, 2007. pp. 284 (University of Helsinki: Department of Physics. Report Series in Physics; No. 267).

@inproceedings{6f728098a52f4ea8889d699d87cc61b0,

title = "Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge",

author = "P. Paris and Heikkinen, {Jukka A.} and Joonas J{\"a}rvinen and Antero Tiitta",

year = "2007",

language = "English",

isbn = "978-952-10-3236-3",

series = "University of Helsinki: Department of Physics. Report Series in Physics",

publisher = "University of Helsinki",

number = "267",

pages = "284",

editor = "R. Vainio and {Pomoell }, J. and M. Louhivuori",

booktitle = "Proceedings of the XLI Annual Conference of the Finnish Physical Society",

address = "Finland",

note = "XLI Annual Conference of the Finnish Physical Society ; Conference date: 15-03-2007 Through 17-03-2007",

}

Paris, P, Heikkinen, JA, Järvinen, J & Tiitta, A 2007, Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge. in R Vainio, J Pomoell & M Louhivuori (eds), Proceedings of the XLI Annual Conference of the Finnish Physical Society. University of Helsinki, University of Helsinki: Department of Physics. Report Series in Physics, no. 267, pp. 284, XLI Annual Conference of the Finnish Physical Society, Tallin, Estonia, 15/03/07.

Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge. / Paris, P.; Heikkinen, Jukka A.; Järvinen, Joonas et al.
Proceedings of the XLI Annual Conference of the Finnish Physical Society. ed. / R. Vainio; J. Pomoell ; M. Louhivuori. University of Helsinki, 2007. p. 284 (University of Helsinki: Department of Physics. Report Series in Physics; No. 267).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

TY - GEN

T1 - Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge

AU - Paris, P.

AU - Heikkinen, Jukka A.

AU - Järvinen, Joonas

AU - Tiitta, Antero

PY - 2007

Y1 - 2007

M3 - Conference article in proceedings

SN - 978-952-10-3236-3

T3 - University of Helsinki: Department of Physics. Report Series in Physics

SP - 284

BT - Proceedings of the XLI Annual Conference of the Finnish Physical Society

A2 - Vainio, R.

A2 - Pomoell , J.

A2 - Louhivuori, M.

PB - University of Helsinki

T2 - XLI Annual Conference of the Finnish Physical Society

Y2 - 15 March 2007 through 17 March 2007

ER -

Paris P, Heikkinen JA, Järvinen J, Tiitta A. Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge. In Vainio R, Pomoell J, Louhivuori M, editors, Proceedings of the XLI Annual Conference of the Finnish Physical Society. University of Helsinki. 2007. p. 284. (University of Helsinki: Department of Physics. Report Series in Physics; No. 267).