Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge

P. Paris, Jukka A. Heikkinen, Joonas Järvinen, Antero Tiitta

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings of the XLI Annual Conference of the Finnish Physical Society
EditorsR. Vainio, J. Pomoell , M. Louhivuori
PublisherUniversity of Helsinki
Pages284
ISBN (Print)978-952-10-3236-3
Publication statusPublished - 2007
MoE publication typeB3 Non-refereed article in conference proceedings
EventXLI Annual Conference of the Finnish Physical Society - Tallin, Estonia
Duration: 15 Mar 200717 Mar 2007

Publication series

SeriesUniversity of Helsinki: Department of Physics. Report Series in Physics
Number267
ISSN0355-5801

Conference

ConferenceXLI Annual Conference of the Finnish Physical Society
CountryEstonia
CityTallin
Period15/03/0717/03/07

Cite this

Paris, P., Heikkinen, J. A., Järvinen, J., & Tiitta, A. (2007). Optical Emission spectroscopic measurements of gas temperature in inductive RF discharge. In R. Vainio, J. Pomoell , & M. Louhivuori (Eds.), Proceedings of the XLI Annual Conference of the Finnish Physical Society (pp. 284). University of Helsinki. University of Helsinki: Department of Physics. Report Series in Physics, No. 267