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Optical metrology of 3D thin film conformality by LHAR chip assisted method
Mikko Utriainen, Kimmo Saastamoinen, Heikki Rekola, Oili M.E. Ylivaara, Riikka L. Puurunen, Pasi Hyttinen
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
5
Citations
(Scopus)