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Optical properties of atomic layer deposited materials and their application in silicon waveguides

  • T. Alasaarela
  • , Jussi Hiltunen
  • , A. Khanna
  • , A. Säynätjoki
  • , A. Tervonen
  • , S. Honkanen
    • Helsinki University of Technology

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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