Optical properties of BaTiO3 thin films: Influence of oxygen pressure utilized during pulsed laser deposition

Jussi Hiltunen; D. Seneviratne; R. Sun; M. Stolfi; H.L. Tuller; J. Lappalainen; V. Lantto

doi:10.1007/s10832-008-9463-9

Optical properties of BaTiO₃ thin films: Influence of oxygen pressure utilized during pulsed laser deposition

Jussi Hiltunen (Corresponding Author), D. Seneviratne, R. Sun, M. Stolfi, H.L. Tuller, J. Lappalainen, V. Lantto

Research output: Contribution to journal › Article › Scientific › peer-review

9 Citations (Scopus)

Abstract

The crystallographic properties of BaTiO₃ thin films, grown by pulsed laser deposition on MgO substrates, were found to be strongly influenced by the oxygen pressure used during growth. Low pressure grown films were c-oriented while increasing oxygen pressure produced films with preferred a-orientation. The crystal reorientation resulted in the shift of optical birefringence from +0.04 to −0.025 with low levels of birefringence in films possessing low tetragonal distortion. Mach-Zehnder electro-optic waveguide modulators were fabricated to characterize the electro-optic properties of the deposited films and to evaluate the suitability of these films for planar optical applications. An effective electro-optic coefficient of 23 pm/V was obtained for a c-axis oriented film near the crystal c→a reorientation point.

Original language	English
Pages (from-to)	416-420
Number of pages	5
Journal	Journal of Electroceramics
Volume	22
Issue number	4
DOIs	https://doi.org/10.1007/s10832-008-9463-9
Publication status	Published - 2009
MoE publication type	A1 Journal article-refereed

Keywords

BaTiO3
birefringence
electro-optic
thin films

Access to Document

10.1007/s10832-008-9463-9

Cite this

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title = "Optical properties of BaTiO3 thin films: Influence of oxygen pressure utilized during pulsed laser deposition",

abstract = "The crystallographic properties of BaTiO3 thin films, grown by pulsed laser deposition on MgO substrates, were found to be strongly influenced by the oxygen pressure used during growth. Low pressure grown films were c-oriented while increasing oxygen pressure produced films with preferred a-orientation. The crystal reorientation resulted in the shift of optical birefringence from +0.04 to −0.025 with low levels of birefringence in films possessing low tetragonal distortion. Mach-Zehnder electro-optic waveguide modulators were fabricated to characterize the electro-optic properties of the deposited films and to evaluate the suitability of these films for planar optical applications. An effective electro-optic coefficient of 23 pm/V was obtained for a c-axis oriented film near the crystal c→a reorientation point.",

keywords = "BaTiO3, birefringence, electro-optic, thin films",

author = "Jussi Hiltunen and D. Seneviratne and R. Sun and M. Stolfi and H.L. Tuller and J. Lappalainen and V. Lantto",

year = "2009",

doi = "10.1007/s10832-008-9463-9",

language = "English",

volume = "22",

pages = "416--420",

journal = "Journal of Electroceramics",

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TY - JOUR

T1 - Optical properties of BaTiO3 thin films

T2 - Influence of oxygen pressure utilized during pulsed laser deposition

AU - Hiltunen, Jussi

AU - Seneviratne, D.

AU - Sun, R.

AU - Stolfi, M.

AU - Tuller, H.L.

AU - Lappalainen, J.

AU - Lantto, V.

PY - 2009

Y1 - 2009

N2 - The crystallographic properties of BaTiO3 thin films, grown by pulsed laser deposition on MgO substrates, were found to be strongly influenced by the oxygen pressure used during growth. Low pressure grown films were c-oriented while increasing oxygen pressure produced films with preferred a-orientation. The crystal reorientation resulted in the shift of optical birefringence from +0.04 to −0.025 with low levels of birefringence in films possessing low tetragonal distortion. Mach-Zehnder electro-optic waveguide modulators were fabricated to characterize the electro-optic properties of the deposited films and to evaluate the suitability of these films for planar optical applications. An effective electro-optic coefficient of 23 pm/V was obtained for a c-axis oriented film near the crystal c→a reorientation point.

AB - The crystallographic properties of BaTiO3 thin films, grown by pulsed laser deposition on MgO substrates, were found to be strongly influenced by the oxygen pressure used during growth. Low pressure grown films were c-oriented while increasing oxygen pressure produced films with preferred a-orientation. The crystal reorientation resulted in the shift of optical birefringence from +0.04 to −0.025 with low levels of birefringence in films possessing low tetragonal distortion. Mach-Zehnder electro-optic waveguide modulators were fabricated to characterize the electro-optic properties of the deposited films and to evaluate the suitability of these films for planar optical applications. An effective electro-optic coefficient of 23 pm/V was obtained for a c-axis oriented film near the crystal c→a reorientation point.

KW - BaTiO3

KW - birefringence

KW - electro-optic

KW - thin films

U2 - 10.1007/s10832-008-9463-9

DO - 10.1007/s10832-008-9463-9

M3 - Article

SN - 1385-3449

VL - 22

SP - 416

EP - 420

JO - Journal of Electroceramics

JF - Journal of Electroceramics

IS - 4