Optical temperature measurements of silicon microbridge emitters

Maksim Shpak; Lauri Sainiemi; Maija Ojanen; Petri Kärhä; Martti Heinonen; Sami Franssila; Erkki Ikonen

doi:10.1364/AO.49.001489

Optical temperature measurements of silicon microbridge emitters

Maksim Shpak^* (Corresponding Author), Lauri Sainiemi, Maija Ojanen, Petri Kärhä, Martti Heinonen, Sami Franssila, Erkki Ikonen

^*Corresponding author for this work

Aalto University

Research output: Contribution to journal › Article › Scientific › peer-review

2 Citations (Scopus)

Abstract

Microbridges are miniature suspended structures fabricated in silicon. Passing a current through the microbridge can heat it up to the point of incandescence. A glowing microbridge can be used as a wideband light source. This study presents a method for optical measurement of the temperature of a microbridge. Spectroscopic measurements of microbridges are optically challenging, because the multilayer structures cause interference effects. To determine the temperature from the emitted spectrum, the emissivity was modeled with thin-film Fresnel equations. Temperatures of 500-1100°C were obtained from the measured spectra at different levels of applied power. The range is limited by the sensitivity of the detectors at lower power levels and by the stability of the bridge at higher levels. Results of the optical measurements were compared with contact temperature measurements made with a microthermocouple in the same temperature range. The results of the two methods agree within 100K.

Original language	English
Pages (from-to)	1489-1493
Number of pages	5
Journal	Applied Optics
Volume	49
Issue number	9
DOIs	https://doi.org/10.1364/AO.49.001489
Publication status	Published - 20 Mar 2010
MoE publication type	A1 Journal article-refereed

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AU - Shpak, Maksim

AU - Sainiemi, Lauri

AU - Ojanen, Maija

AU - Kärhä, Petri

AU - Heinonen, Martti

AU - Franssila, Sami

AU - Ikonen, Erkki

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N2 - Microbridges are miniature suspended structures fabricated in silicon. Passing a current through the microbridge can heat it up to the point of incandescence. A glowing microbridge can be used as a wideband light source. This study presents a method for optical measurement of the temperature of a microbridge. Spectroscopic measurements of microbridges are optically challenging, because the multilayer structures cause interference effects. To determine the temperature from the emitted spectrum, the emissivity was modeled with thin-film Fresnel equations. Temperatures of 500-1100°C were obtained from the measured spectra at different levels of applied power. The range is limited by the sensitivity of the detectors at lower power levels and by the stability of the bridge at higher levels. Results of the optical measurements were compared with contact temperature measurements made with a microthermocouple in the same temperature range. The results of the two methods agree within 100K.

AB - Microbridges are miniature suspended structures fabricated in silicon. Passing a current through the microbridge can heat it up to the point of incandescence. A glowing microbridge can be used as a wideband light source. This study presents a method for optical measurement of the temperature of a microbridge. Spectroscopic measurements of microbridges are optically challenging, because the multilayer structures cause interference effects. To determine the temperature from the emitted spectrum, the emissivity was modeled with thin-film Fresnel equations. Temperatures of 500-1100°C were obtained from the measured spectra at different levels of applied power. The range is limited by the sensitivity of the detectors at lower power levels and by the stability of the bridge at higher levels. Results of the optical measurements were compared with contact temperature measurements made with a microthermocouple in the same temperature range. The results of the two methods agree within 100K.

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Optical temperature measurements of silicon microbridge emitters

Abstract

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