Optical transmission performance of a surface-micromachined Fabry-Pérot interferometer for thermal infrared

Mikko Tuohiniemi, Martti Blomberg, Altti Akujärvi, Jarkko Antila, Heikki Saari

Research output: Contribution to journalArticleScientificpeer-review

21 Citations (Scopus)

Abstract

We developed a surface-micromachined tunable Fabry–Pérot interferometer for the thermal infrared spectral range of wavelengths 7–12 µm. In this paper, we present the device performance in terms of the optical transmission and the tunability. The device represents the first layout that proved successful in terms of the manufacturing process yield (about 80%). The optical transmission over the wavelengths from 3 to 20 µm is presented with the emphasis on analysing the first-order transmission peak. The transmission band width and the peak height are compared using the existing theory for this type of an interferometer. The deviation from an ideal performance is resolved and partly explained through the known structural unidealities.
Original languageEnglish
Article number115004
JournalJournal of Micromechanics and Microengineering
Volume22
Issue number11
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

Fingerprint

Light transmission
Interferometers
Infrared radiation
Wavelength
Bandwidth
Hot Temperature

Cite this

@article{76b33df79b494daa989bbfe37fd8a962,
title = "Optical transmission performance of a surface-micromachined Fabry-P{\'e}rot interferometer for thermal infrared",
abstract = "We developed a surface-micromachined tunable Fabry–P{\'e}rot interferometer for the thermal infrared spectral range of wavelengths 7–12 µm. In this paper, we present the device performance in terms of the optical transmission and the tunability. The device represents the first layout that proved successful in terms of the manufacturing process yield (about 80{\%}). The optical transmission over the wavelengths from 3 to 20 µm is presented with the emphasis on analysing the first-order transmission peak. The transmission band width and the peak height are compared using the existing theory for this type of an interferometer. The deviation from an ideal performance is resolved and partly explained through the known structural unidealities.",
author = "Mikko Tuohiniemi and Martti Blomberg and Altti Akuj{\"a}rvi and Jarkko Antila and Heikki Saari",
year = "2012",
doi = "10.1088/0960-1317/22/11/115004",
language = "English",
volume = "22",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "Institute of Physics IOP",
number = "11",

}

Optical transmission performance of a surface-micromachined Fabry-Pérot interferometer for thermal infrared. / Tuohiniemi, Mikko; Blomberg, Martti; Akujärvi, Altti; Antila, Jarkko; Saari, Heikki.

In: Journal of Micromechanics and Microengineering, Vol. 22, No. 11, 115004, 2012.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Optical transmission performance of a surface-micromachined Fabry-Pérot interferometer for thermal infrared

AU - Tuohiniemi, Mikko

AU - Blomberg, Martti

AU - Akujärvi, Altti

AU - Antila, Jarkko

AU - Saari, Heikki

PY - 2012

Y1 - 2012

N2 - We developed a surface-micromachined tunable Fabry–Pérot interferometer for the thermal infrared spectral range of wavelengths 7–12 µm. In this paper, we present the device performance in terms of the optical transmission and the tunability. The device represents the first layout that proved successful in terms of the manufacturing process yield (about 80%). The optical transmission over the wavelengths from 3 to 20 µm is presented with the emphasis on analysing the first-order transmission peak. The transmission band width and the peak height are compared using the existing theory for this type of an interferometer. The deviation from an ideal performance is resolved and partly explained through the known structural unidealities.

AB - We developed a surface-micromachined tunable Fabry–Pérot interferometer for the thermal infrared spectral range of wavelengths 7–12 µm. In this paper, we present the device performance in terms of the optical transmission and the tunability. The device represents the first layout that proved successful in terms of the manufacturing process yield (about 80%). The optical transmission over the wavelengths from 3 to 20 µm is presented with the emphasis on analysing the first-order transmission peak. The transmission band width and the peak height are compared using the existing theory for this type of an interferometer. The deviation from an ideal performance is resolved and partly explained through the known structural unidealities.

U2 - 10.1088/0960-1317/22/11/115004

DO - 10.1088/0960-1317/22/11/115004

M3 - Article

VL - 22

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 11

M1 - 115004

ER -