Optical transmission performance of a surface-micromachined Fabry-Pérot interferometer for thermal infrared

Mikko Tuohiniemi, Martti Blomberg, Altti Akujärvi, Jarkko Antila, Heikki Saari

    Research output: Contribution to journalArticleScientificpeer-review

    21 Citations (Scopus)

    Abstract

    We developed a surface-micromachined tunable Fabry–Pérot interferometer for the thermal infrared spectral range of wavelengths 7–12 µm. In this paper, we present the device performance in terms of the optical transmission and the tunability. The device represents the first layout that proved successful in terms of the manufacturing process yield (about 80%). The optical transmission over the wavelengths from 3 to 20 µm is presented with the emphasis on analysing the first-order transmission peak. The transmission band width and the peak height are compared using the existing theory for this type of an interferometer. The deviation from an ideal performance is resolved and partly explained through the known structural unidealities.
    Original languageEnglish
    Article number115004
    JournalJournal of Micromechanics and Microengineering
    Volume22
    Issue number11
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed

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    Light transmission
    Interferometers
    Infrared radiation
    Wavelength
    Bandwidth
    Hot Temperature

    Cite this

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    title = "Optical transmission performance of a surface-micromachined Fabry-P{\'e}rot interferometer for thermal infrared",
    abstract = "We developed a surface-micromachined tunable Fabry–P{\'e}rot interferometer for the thermal infrared spectral range of wavelengths 7–12 µm. In this paper, we present the device performance in terms of the optical transmission and the tunability. The device represents the first layout that proved successful in terms of the manufacturing process yield (about 80{\%}). The optical transmission over the wavelengths from 3 to 20 µm is presented with the emphasis on analysing the first-order transmission peak. The transmission band width and the peak height are compared using the existing theory for this type of an interferometer. The deviation from an ideal performance is resolved and partly explained through the known structural unidealities.",
    author = "Mikko Tuohiniemi and Martti Blomberg and Altti Akuj{\"a}rvi and Jarkko Antila and Heikki Saari",
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    doi = "10.1088/0960-1317/22/11/115004",
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    Optical transmission performance of a surface-micromachined Fabry-Pérot interferometer for thermal infrared. / Tuohiniemi, Mikko; Blomberg, Martti; Akujärvi, Altti; Antila, Jarkko; Saari, Heikki.

    In: Journal of Micromechanics and Microengineering, Vol. 22, No. 11, 115004, 2012.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Optical transmission performance of a surface-micromachined Fabry-Pérot interferometer for thermal infrared

    AU - Tuohiniemi, Mikko

    AU - Blomberg, Martti

    AU - Akujärvi, Altti

    AU - Antila, Jarkko

    AU - Saari, Heikki

    PY - 2012

    Y1 - 2012

    N2 - We developed a surface-micromachined tunable Fabry–Pérot interferometer for the thermal infrared spectral range of wavelengths 7–12 µm. In this paper, we present the device performance in terms of the optical transmission and the tunability. The device represents the first layout that proved successful in terms of the manufacturing process yield (about 80%). The optical transmission over the wavelengths from 3 to 20 µm is presented with the emphasis on analysing the first-order transmission peak. The transmission band width and the peak height are compared using the existing theory for this type of an interferometer. The deviation from an ideal performance is resolved and partly explained through the known structural unidealities.

    AB - We developed a surface-micromachined tunable Fabry–Pérot interferometer for the thermal infrared spectral range of wavelengths 7–12 µm. In this paper, we present the device performance in terms of the optical transmission and the tunability. The device represents the first layout that proved successful in terms of the manufacturing process yield (about 80%). The optical transmission over the wavelengths from 3 to 20 µm is presented with the emphasis on analysing the first-order transmission peak. The transmission band width and the peak height are compared using the existing theory for this type of an interferometer. The deviation from an ideal performance is resolved and partly explained through the known structural unidealities.

    U2 - 10.1088/0960-1317/22/11/115004

    DO - 10.1088/0960-1317/22/11/115004

    M3 - Article

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    JO - Journal of Micromechanics and Microengineering

    JF - Journal of Micromechanics and Microengineering

    SN - 0960-1317

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