Optical waveguides for 1064 nm and chip pigtailing with PM fibers

Pekka Katila, Timo Aalto, Päivi Heimala, Matti Leppihalme

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


    The purpose of this project was to develop optical waveguide technology to offer polarization maintaining (PM) components for a Nd:YAG laser wavelength at 1.064 μm. The silicon oxynitride waveguide layers were grown with a PECVD method on a silicon wafer. The waveguide height and width are 3.5 μm and 6.0 μm, respectively. A well balanced 3 dB operation was achieved with a 2'2 MMI coupler. The excess loss of the coupler was 2 dB. The polarization maintaining properties were studied by measuring the polarization extinction coefficient (PXR) of the straight waveguides and pigtailed chips. Typical PXR for a 15 mm waveguide was <18 dB. Waveguide crossings at different crossing angles were characterized in terms of excess loss and PXR. Both passive and active fiber alignment was studied to achieve low-loss pigtailing with a polarization maintaining fiber.

    Original languageEnglish
    Title of host publicationInternational Conference on Space Optics, ICSO 2000
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Electronic)978-1-5106-1627-1
    Publication statusPublished - 1 Jan 2017
    MoE publication typeA4 Article in a conference publication
    EventInternational Conference on Space Optics, ICSO 2000 - Toulouse Labege, France
    Duration: 5 Dec 20007 Dec 2000

    Publication series

    SeriesProceedings of SPIE


    ConferenceInternational Conference on Space Optics, ICSO 2000
    CityToulouse Labege


    • OtaNano


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