@inproceedings{3525c6842d7645d1a53f154cd46c6632,
title = "Optical waveguides for 1064 nm and chip pigtailing with PM fibers",
abstract = "The purpose of this project was to develop optical waveguide technology to offer polarization maintaining (PM) components for a Nd:YAG laser wavelength at 1.064 μm. The silicon oxynitride waveguide layers were grown with a PECVD method on a silicon wafer. The waveguide height and width are 3.5 μm and 6.0 μm, respectively. A well balanced 3 dB operation was achieved with a 2'2 MMI coupler. The excess loss of the coupler was 2 dB. The polarization maintaining properties were studied by measuring the polarization extinction coefficient (PXR) of the straight waveguides and pigtailed chips. Typical PXR for a 15 mm waveguide was <18 dB. Waveguide crossings at different crossing angles were characterized in terms of excess loss and PXR. Both passive and active fiber alignment was studied to achieve low-loss pigtailing with a polarization maintaining fiber.",
keywords = "OtaNano",
author = "Pekka Katila and Timo Aalto and P{\"a}ivi Heimala and Matti Leppihalme",
note = "Publisher Copyright: {\textcopyright} 2000 ESA and CNES.; International Conference on Space Optics, ICSO 2000 ; Conference date: 05-12-2000 Through 07-12-2000",
year = "2017",
month = jan,
day = "1",
doi = "10.1117/12.2307909",
language = "English",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
pages = "635--640",
booktitle = "International Conference on Space Optics, ICSO 2000",
address = "United States",
}