@inproceedings{ec17f451af7043f183fbe04486d3317b,
title = "Optical waveguides on polysilicon-on-insulator",
author = "A. S{\"a}yn{\"a}tjoki and J. Riikonen and H. Lipsanen and Jouni Ahopelto",
year = "2002",
language = "English",
isbn = "1-86125-155-6",
pages = "275--278",
booktitle = "Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002",
note = "4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002 ; Conference date: 10-06-2002 Through 12-06-2002",
}