| Original language | English |
|---|---|
| Pages | P45 |
| Publication status | Published - 2013 |
| MoE publication type | Not Eligible |
| Event | 24th Micromechanics and Microsystems Europe - Espoo, Finland Duration: 1 Sept 2013 → 4 Sept 2013 |
Conference
| Conference | 24th Micromechanics and Microsystems Europe |
|---|---|
| Country/Territory | Finland |
| City | Espoo |
| Period | 1/09/13 → 4/09/13 |