Optimisation and fabrication of grating beamsplitters

Jari Turunen, Antti Vasara, Jan Westerholm, G. Jin, Arto Salin

Research output: Contribution to journalArticleScientificpeer-review

45 Citations (Scopus)


Optimisation of certain holographic 1 to N and 1 to N*N beamsplitters (Dammann gratings) with the aid of simulated annealing and damped least-squares algorithms is considered. Structures with N=5 to 53 uniform beams have been calculated. A photolithographic technique for fabrication of these elements is also presented, and its accuracy analysed with the aid of numerical simulations and actual test results.
Original languageEnglish
Pages (from-to)S102-2105
JournalJournal of Physics D: Applied Physics
Issue number10S
Publication statusPublished - 1988
MoE publication typeA1 Journal article-refereed


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