Optimising primer residue removal with the aid of SIMS, purge and trap gas chromatography mass spectrometry and contact angle measurements

Sari Lehto; Jari Likonen; Tarja Riihisaari; A. Eränen; Arto Kiviranta; J. Virtanen; Erik Sandell

Optimising primer residue removal with the aid of SIMS, purge and trap gas chromatography mass spectrometry and contact angle measurements

Sari Lehto, Jari Likonen, Tarja Riihisaari, A. Eränen, Arto Kiviranta, J. Virtanen, Erik Sandell

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Secondary ion mass spectrometry SIMS XII
Subtitle of host publication	Proceedings of the 12th International Conference on Secondary Ion Mass Spectrometry
Editors	A. Benninghoven, P. Bertrand, H.-N. Migeon
Place of Publication	Amsterdam
Publisher	Elsevier
Pages	719-722
ISBN (Print)	978-0-444-50323-7
Publication status	Published - 2000
MoE publication type	A4 Article in a conference publication
Event	12th International Conference on Secondary Ion Mass Spectrometry, SIMS XII - Brussels, Belgium Duration: 5 Sept 1999 → 11 Sept 1999

Conference

Conference	12th International Conference on Secondary Ion Mass Spectrometry, SIMS XII
Country/Territory	Belgium
City	Brussels
Period	5/09/99 → 11/09/99

Cite this

Lehto, S., Likonen, J., Riihisaari, T., Eränen, A., Kiviranta, A., Virtanen, J., & Sandell, E. (2000). Optimising primer residue removal with the aid of SIMS, purge and trap gas chromatography mass spectrometry and contact angle measurements. In A. Benninghoven, P. Bertrand, & H.-N. Migeon (Eds.), Secondary ion mass spectrometry SIMS XII: Proceedings of the 12th International Conference on Secondary Ion Mass Spectrometry (pp. 719-722). Elsevier.

Lehto, Sari ; Likonen, Jari ; Riihisaari, Tarja et al. / Optimising primer residue removal with the aid of SIMS, purge and trap gas chromatography mass spectrometry and contact angle measurements. Secondary ion mass spectrometry SIMS XII: Proceedings of the 12th International Conference on Secondary Ion Mass Spectrometry. editor / A. Benninghoven ; P. Bertrand ; H.-N. Migeon. Amsterdam : Elsevier, 2000. pp. 719-722

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title = "Optimising primer residue removal with the aid of SIMS, purge and trap gas chromatography mass spectrometry and contact angle measurements",

author = "Sari Lehto and Jari Likonen and Tarja Riihisaari and A. Er{\"a}nen and Arto Kiviranta and J. Virtanen and Erik Sandell",

year = "2000",

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isbn = "978-0-444-50323-7",

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editor = "A. Benninghoven and P. Bertrand and H.-N. Migeon",

booktitle = "Secondary ion mass spectrometry SIMS XII",

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note = "12th International Conference on Secondary Ion Mass Spectrometry, SIMS XII ; Conference date: 05-09-1999 Through 11-09-1999",

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Lehto, S, Likonen, J, Riihisaari, T, Eränen, A, Kiviranta, A, Virtanen, J & Sandell, E 2000, Optimising primer residue removal with the aid of SIMS, purge and trap gas chromatography mass spectrometry and contact angle measurements. in A Benninghoven, P Bertrand & H-N Migeon (eds), Secondary ion mass spectrometry SIMS XII: Proceedings of the 12th International Conference on Secondary Ion Mass Spectrometry. Elsevier, Amsterdam, pp. 719-722, 12th International Conference on Secondary Ion Mass Spectrometry, SIMS XII, Brussels, Belgium, 5/09/99.

Optimising primer residue removal with the aid of SIMS, purge and trap gas chromatography mass spectrometry and contact angle measurements. / Lehto, Sari; Likonen, Jari; Riihisaari, Tarja et al.
Secondary ion mass spectrometry SIMS XII: Proceedings of the 12th International Conference on Secondary Ion Mass Spectrometry. ed. / A. Benninghoven; P. Bertrand; H.-N. Migeon. Amsterdam: Elsevier, 2000. p. 719-722.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Optimising primer residue removal with the aid of SIMS, purge and trap gas chromatography mass spectrometry and contact angle measurements

AU - Lehto, Sari

AU - Likonen, Jari

AU - Riihisaari, Tarja

AU - Eränen, A.

AU - Kiviranta, Arto

AU - Virtanen, J.

AU - Sandell, Erik

PY - 2000

Y1 - 2000

M3 - Conference article in proceedings

SN - 978-0-444-50323-7

SP - 719

EP - 722

BT - Secondary ion mass spectrometry SIMS XII

A2 - Benninghoven, A.

A2 - Bertrand, P.

A2 - Migeon, H.-N.

PB - Elsevier

CY - Amsterdam

T2 - 12th International Conference on Secondary Ion Mass Spectrometry, SIMS XII

Y2 - 5 September 1999 through 11 September 1999

ER -

Lehto S, Likonen J, Riihisaari T, Eränen A, Kiviranta A, Virtanen J et al. Optimising primer residue removal with the aid of SIMS, purge and trap gas chromatography mass spectrometry and contact angle measurements. In Benninghoven A, Bertrand P, Migeon HN, editors, Secondary ion mass spectrometry SIMS XII: Proceedings of the 12th International Conference on Secondary Ion Mass Spectrometry. Amsterdam: Elsevier. 2000. p. 719-722