Optimized design and process for making a DC voltage reference based on MEMS

Anu Kärkkäinen; Shakil A. Awan; Jukka Kyynäräinen; Panu Pekko; Aarne Oja; Heikki Seppä

doi:10.1109/TIM.2004.843097

Optimized design and process for making a DC voltage reference based on MEMS

Anu Kärkkäinen, Shakil A. Awan, Jukka Kyynäräinen, Panu Pekko, Aarne Oja, Heikki Seppä

National Physical Laboratory (NPL)

Research output: Contribution to journal › Article › Scientific › peer-review

11 Citations (Scopus)

Abstract

A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.

Original language	English
Pages (from-to)	563 - 566
Number of pages	4
Journal	IEEE Transactions on Instrumentation and Measurement
Volume	54
Issue number	2
DOIs	https://doi.org/10.1109/TIM.2004.843097
Publication status	Published - 2005
MoE publication type	A1 Journal article-refereed

Keywords

capacitive sensors
feedback electronics
microelectromechanical systems
MEMS
micromachining
silicon-on-insulator
SOI

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10.1109/TIM.2004.843097

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abstract = "A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.",

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AU - Pekko, Panu

AU - Oja, Aarne

AU - Seppä, Heikki

PY - 2005

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KW - feedback electronics

KW - microelectromechanical systems

KW - MEMS

KW - micromachining

KW - silicon-on-insulator

KW - SOI

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Optimized design and process for making a DC voltage reference based on MEMS

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Keywords

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