Optimized design and process for making a DC voltage reference based on MEMS

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    Abstract

    A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.
    Original languageEnglish
    Pages (from-to)563 - 566
    Number of pages4
    JournalIEEE Transactions on Instrumentation and Measurement
    Volume54
    Issue number2
    DOIs
    Publication statusPublished - 2005
    MoE publication typeA1 Journal article-refereed

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    Keywords

    • capacitive sensors
    • feedback electronics
    • microelectromechanical systems
    • MEMS
    • micromachining
    • silicon-on-insulator
    • SOI

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