Optimized design and process for making a DC voltage reference based on MEMS

Anu Kärkkäinen, Shakil A. Awan, Jukka Kyynäräinen, Panu Pekko, Aarne Oja, Heikki Seppä

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)


    A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.
    Original languageEnglish
    Pages (from-to)563 - 566
    Number of pages4
    JournalIEEE Transactions on Instrumentation and Measurement
    Issue number2
    Publication statusPublished - 2005
    MoE publication typeA1 Journal article-refereed


    • capacitive sensors
    • feedback electronics
    • microelectromechanical systems
    • MEMS
    • micromachining
    • silicon-on-insulator
    • SOI


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