Optimized design and process for making a DC voltage reference based on MEMS

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)

Abstract

A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.
Original languageEnglish
Pages (from-to)563 - 566
Number of pages4
JournalIEEE Transactions on Instrumentation and Measurement
Volume54
Issue number2
DOIs
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

Fingerprint

microelectromechanical systems
MEMS
Capacitors
Electronic equipment
direct current
Feedback
Silicon
Electric potential
electric potential
capacitors
insulators
silicon
electronics

Keywords

  • capacitive sensors
  • feedback electronics
  • microelectromechanical systems
  • MEMS
  • micromachining
  • silicon-on-insulator
  • SOI

Cite this

@article{8001f9ef006541ef9c05922cb620983e,
title = "Optimized design and process for making a DC voltage reference based on MEMS",
abstract = "A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.",
keywords = "capacitive sensors, feedback electronics, microelectromechanical systems, MEMS, micromachining, silicon-on-insulator, SOI",
author = "Anu K{\"a}rkk{\"a}inen and Awan, {Shakil A.} and Jukka Kyyn{\"a}r{\"a}inen and Panu Pekko and Aarne Oja and Heikki Sepp{\"a}",
year = "2005",
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language = "English",
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pages = "563 -- 566",
journal = "IEEE Transactions on Instrumentation and Measurement",
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publisher = "Institute of Electrical and Electronic Engineers IEEE",
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}

Optimized design and process for making a DC voltage reference based on MEMS. / Kärkkäinen, Anu; Awan, Shakil A.; Kyynäräinen, Jukka; Pekko, Panu; Oja, Aarne; Seppä, Heikki.

In: IEEE Transactions on Instrumentation and Measurement, Vol. 54, No. 2, 2005, p. 563 - 566.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Optimized design and process for making a DC voltage reference based on MEMS

AU - Kärkkäinen, Anu

AU - Awan, Shakil A.

AU - Kyynäräinen, Jukka

AU - Pekko, Panu

AU - Oja, Aarne

AU - Seppä, Heikki

PY - 2005

Y1 - 2005

N2 - A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.

AB - A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.

KW - capacitive sensors

KW - feedback electronics

KW - microelectromechanical systems

KW - MEMS

KW - micromachining

KW - silicon-on-insulator

KW - SOI

U2 - 10.1109/TIM.2004.843097

DO - 10.1109/TIM.2004.843097

M3 - Article

VL - 54

SP - 563

EP - 566

JO - IEEE Transactions on Instrumentation and Measurement

JF - IEEE Transactions on Instrumentation and Measurement

SN - 0018-9456

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