Optimized design and process for making a DC voltage reference based on MEMS

    Research output: Contribution to journalArticleScientificpeer-review

    10 Citations (Scopus)

    Abstract

    A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.
    Original languageEnglish
    Pages (from-to)563 - 566
    Number of pages4
    JournalIEEE Transactions on Instrumentation and Measurement
    Volume54
    Issue number2
    DOIs
    Publication statusPublished - 2005
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    microelectromechanical systems
    MEMS
    Capacitors
    Electronic equipment
    direct current
    Feedback
    Silicon
    Electric potential
    electric potential
    capacitors
    insulators
    silicon
    electronics

    Keywords

    • capacitive sensors
    • feedback electronics
    • microelectromechanical systems
    • MEMS
    • micromachining
    • silicon-on-insulator
    • SOI

    Cite this

    @article{8001f9ef006541ef9c05922cb620983e,
    title = "Optimized design and process for making a DC voltage reference based on MEMS",
    abstract = "A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.",
    keywords = "capacitive sensors, feedback electronics, microelectromechanical systems, MEMS, micromachining, silicon-on-insulator, SOI",
    author = "Anu K{\"a}rkk{\"a}inen and Awan, {Shakil A.} and Jukka Kyyn{\"a}r{\"a}inen and Panu Pekko and Aarne Oja and Heikki Sepp{\"a}",
    year = "2005",
    doi = "10.1109/TIM.2004.843097",
    language = "English",
    volume = "54",
    pages = "563 -- 566",
    journal = "IEEE Transactions on Instrumentation and Measurement",
    issn = "0018-9456",
    publisher = "IEEE Institute of Electrical and Electronic Engineers",
    number = "2",

    }

    Optimized design and process for making a DC voltage reference based on MEMS. / Kärkkäinen, Anu; Awan, Shakil A.; Kyynäräinen, Jukka; Pekko, Panu; Oja, Aarne; Seppä, Heikki.

    In: IEEE Transactions on Instrumentation and Measurement, Vol. 54, No. 2, 2005, p. 563 - 566.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Optimized design and process for making a DC voltage reference based on MEMS

    AU - Kärkkäinen, Anu

    AU - Awan, Shakil A.

    AU - Kyynäräinen, Jukka

    AU - Pekko, Panu

    AU - Oja, Aarne

    AU - Seppä, Heikki

    PY - 2005

    Y1 - 2005

    N2 - A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.

    AB - A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.

    KW - capacitive sensors

    KW - feedback electronics

    KW - microelectromechanical systems

    KW - MEMS

    KW - micromachining

    KW - silicon-on-insulator

    KW - SOI

    U2 - 10.1109/TIM.2004.843097

    DO - 10.1109/TIM.2004.843097

    M3 - Article

    VL - 54

    SP - 563

    EP - 566

    JO - IEEE Transactions on Instrumentation and Measurement

    JF - IEEE Transactions on Instrumentation and Measurement

    SN - 0018-9456

    IS - 2

    ER -