Optimized design and process for making a DC voltage reference based on MEMS

Anu Kärkkäinen; Shakil A. Awan; Jukka Kyynäräinen; Panu Pekko; Aarne Oja; Heikki Seppä

doi:10.1109/TIM.2004.843097

Optimized design and process for making a DC voltage reference based on MEMS

Anu Kärkkäinen
, Shakil A. Awan
, Jukka Kyynäräinen
, Panu Pekko
, Aarne Oja
, Heikki Seppä

National Physics Laboratory (NPL)

Research output: Contribution to journal › Article › Scientific › peer-review

11 Citations (Scopus)

Abstract

A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.

Original language	English
Pages (from-to)	563 - 566
Number of pages	4
Journal	IEEE Transactions on Instrumentation and Measurement
Volume	54
Issue number	2
DOIs	https://doi.org/10.1109/TIM.2004.843097
Publication status	Published - 2005
MoE publication type	A1 Journal article-refereed

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

capacitive sensors
feedback electronics
microelectromechanical systems
MEMS
micromachining
silicon-on-insulator
SOI

Access to Document

10.1109/TIM.2004.843097

Cite this

@article{8001f9ef006541ef9c05922cb620983e,

title = "Optimized design and process for making a DC voltage reference based on MEMS",

abstract = "A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.",

keywords = "capacitive sensors, feedback electronics, microelectromechanical systems, MEMS, micromachining, silicon-on-insulator, SOI",

author = "Anu K{\"a}rkk{\"a}inen and Awan, \{Shakil A.\} and Jukka Kyyn{\"a}r{\"a}inen and Panu Pekko and Aarne Oja and Heikki Sepp{\"a}",

year = "2005",

doi = "10.1109/TIM.2004.843097",

language = "English",

volume = "54",

pages = "563 -- 566",

journal = "IEEE Transactions on Instrumentation and Measurement",

issn = "0018-9456",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

number = "2",

}

TY - JOUR

T1 - Optimized design and process for making a DC voltage reference based on MEMS

AU - Kärkkäinen, Anu

AU - Awan, Shakil A.

AU - Kyynäräinen, Jukka

AU - Pekko, Panu

AU - Oja, Aarne

AU - Seppä, Heikki

PY - 2005

Y1 - 2005

N2 - A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.

AB - A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.

KW - capacitive sensors

KW - feedback electronics

KW - microelectromechanical systems

KW - MEMS

KW - micromachining

KW - silicon-on-insulator

KW - SOI

U2 - 10.1109/TIM.2004.843097

DO - 10.1109/TIM.2004.843097

M3 - Article

SN - 0018-9456

VL - 54

SP - 563

EP - 566

JO - IEEE Transactions on Instrumentation and Measurement

JF - IEEE Transactions on Instrumentation and Measurement

IS - 2

ER -

Optimized design and process for making a DC voltage reference based on MEMS

Abstract

UN SDGs

Keywords

Access to Document

Fingerprint

Cite this