Optoelectromechanical device

Jouni Ahopelto; Tapani Makkonen

Optoelectromechanical device

Jouni Ahopelto (Inventor)
, Tapani Makkonen (Inventor)

BA6201 RF microsystems

Research output: Patent › Patent

Abstract

This disclosure describes an optoelectromechanical device which comprises a substrate with an opening, and an optomechanical structure which extends across said opening. The optomechanical structure comprises a first end section, a middle section and a second end section, and the first end section is fixed to a first edge of the opening, and the second end section is fixed to a second edge of the opening. The middle section comprises an optomechanical cavity. The device also comprises a bulk acoustic wave transducer on the first end section of the optomechanical structure.

Patent family as of 14.7.2026
EP4732066 A1, FI131375 B, FI20235727 A, WO24261394 A1

Original language	English
Patent number	FI 131375 B1
IPC	B81B7/02
Priority date	22/06/23
Filing date	22/06/23
Publication status	Published - 16 Mar 2025
MoE publication type	H1 Granted patent

Cite this

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title = "Optoelectromechanical device",

abstract = "This disclosure describes an optoelectromechanical device which comprises a substrate with an opening, and an optomechanical structure which extends across said opening. The optomechanical structure comprises a first end section, a middle section and a second end section, and the first end section is fixed to a first edge of the opening, and the second end section is fixed to a second edge of the opening. The middle section comprises an optomechanical cavity. The device also comprises a bulk acoustic wave transducer on the first end section of the optomechanical structure. Patent family as of 14.7.2026 EP4732066 A1, FI131375 B, FI20235727 A, WO24261394 A1",

author = "Jouni Ahopelto and Tapani Makkonen",

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AU - Ahopelto, Jouni

AU - Makkonen, Tapani

PY - 2025/3/16

Y1 - 2025/3/16

N2 - This disclosure describes an optoelectromechanical device which comprises a substrate with an opening, and an optomechanical structure which extends across said opening. The optomechanical structure comprises a first end section, a middle section and a second end section, and the first end section is fixed to a first edge of the opening, and the second end section is fixed to a second edge of the opening. The middle section comprises an optomechanical cavity. The device also comprises a bulk acoustic wave transducer on the first end section of the optomechanical structure. Patent family as of 14.7.2026 EP4732066 A1, FI131375 B, FI20235727 A, WO24261394 A1

AB - This disclosure describes an optoelectromechanical device which comprises a substrate with an opening, and an optomechanical structure which extends across said opening. The optomechanical structure comprises a first end section, a middle section and a second end section, and the first end section is fixed to a first edge of the opening, and the second end section is fixed to a second edge of the opening. The middle section comprises an optomechanical cavity. The device also comprises a bulk acoustic wave transducer on the first end section of the optomechanical structure. Patent family as of 14.7.2026 EP4732066 A1, FI131375 B, FI20235727 A, WO24261394 A1

UR - https://fi.espacenet.com/publicationDetails/biblio?II=0&ND=3&adjacent=true&locale=fi_FI&FT=D&date=20241226&CC=WO&NR=2024261394A1&KC=A1

M3 - Patent

M1 - FI 131375 B1

Y2 - 2023/06/22

ER -

Optoelectromechanical device

Abstract

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