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Optoelectromechanical device
Jouni Ahopelto
(Inventor)
,
Tapani Makkonen
(Inventor)
BA6201 RF microsystems
Research output
:
Patent
›
Patent
Overview
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INIS
devices
100%
substrates
33%
patents
33%
cavities
33%
sound waves
33%
transducers
33%
Keyphrases
End Section
100%
Opto-mechanical Structure
60%
Patent Family
20%
Optomechanical Cavity
20%
Bulk Acoustic Wave
20%
Physics
Transducer
100%
Acoustic Wave
100%