Overview of early publications on atomic layer deposition

Jaan Aarik, Andrew R. Akbashev, Mikhael Bechelany, Maria Berdova, David Cameron, Nikolai Chekurov, Viktor Drozd, Simon Elliott, Gloria Gottardi, Kestutis Grigoras, Marcel Junige, Tanja Kallio, Jaana Kanervo, Yury Koshtyal, Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Anatoly Malkov, Anatoly Malygin, Jyrki MolariusCagla Ozgit-Akgun, Henrik Pedersen, Riikka L. Puurunen, Alexander Pyymaki-Perros, Robin H. A. Ras, Fred Roozeboom, Timo Sajavaara, Hele Savin, Thomas E. Seidel, Pia Sundberg, Jonas Sundqvist, Massimo Tallarida, J. Ruud van Ommen, Thomas Wächtler, Claudia Wiemer, Oili Ylivaara

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationTechnical Program & Abstracts
    PublisherAmerican Vacuum Society AVS
    Publication statusPublished - 2014
    Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
    Duration: 15 Jun 201418 Jun 2014
    Conference number: 14

    Conference

    Conference14th International Conference on Atomic Layer Deposition, ALD 2014
    Abbreviated titleALD 2014
    CountryJapan
    CityKyoto
    Period15/06/1418/06/14

    Cite this

    Aarik, J., Akbashev, A. R., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Junige, M., Kallio, T., Kanervo, J., Koshtyal, Y., Kääriäinen, M-L., Kääriäinen, T., Lamagna, L., Malkov, A., Malygin, A., ... Ylivaara, O. (2014). Overview of early publications on atomic layer deposition. In Technical Program & Abstracts American Vacuum Society AVS.