Overview of early publications on atomic layer deposition

Jaan Aarik, Andrew R. Akbashev, Mikhael Bechelany, Maria Berdova, David Cameron, Nikolai Chekurov, Viktor Drozd, Simon Elliott, Gloria Gottardi, Kestutis Grigoras, Marcel Junige, Tanja Kallio, Jaana Kanervo, Yury Koshtyal, Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Anatoly Malkov, Anatoly Malygin, Jyrki MolariusCagla Ozgit-Akgun, Henrik Pedersen, Riikka L. Puurunen, Alexander Pyymaki-Perros, Robin H. A. Ras, Fred Roozeboom, Timo Sajavaara, Hele Savin, Thomas E. Seidel, Pia Sundberg, Jonas Sundqvist, Massimo Tallarida, J. Ruud van Ommen, Thomas Wächtler, Claudia Wiemer, Oili Ylivaara

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationTechnical Program & Abstracts
    PublisherAmerican Vacuum Society AVS
    Publication statusPublished - 2014
    Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
    Duration: 15 Jun 201418 Jun 2014
    Conference number: 14

    Conference

    Conference14th International Conference on Atomic Layer Deposition, ALD 2014
    Abbreviated titleALD 2014
    CountryJapan
    CityKyoto
    Period15/06/1418/06/14

    Cite this

    Aarik, J., Akbashev, A. R., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., ... Ylivaara, O. (2014). Overview of early publications on atomic layer deposition. In Technical Program & Abstracts American Vacuum Society AVS.
    Aarik, Jaan ; Akbashev, Andrew R. ; Bechelany, Mikhael ; Berdova, Maria ; Cameron, David ; Chekurov, Nikolai ; Drozd, Viktor ; Elliott, Simon ; Gottardi, Gloria ; Grigoras, Kestutis ; Junige, Marcel ; Kallio, Tanja ; Kanervo, Jaana ; Koshtyal, Yury ; Kääriäinen, Marja-Leena ; Kääriäinen, Tommi ; Lamagna, Luca ; Malkov, Anatoly ; Malygin, Anatoly ; Molarius, Jyrki ; Ozgit-Akgun, Cagla ; Pedersen, Henrik ; Puurunen, Riikka L. ; Pyymaki-Perros, Alexander ; Ras, Robin H. A. ; Roozeboom, Fred ; Sajavaara, Timo ; Savin, Hele ; Seidel, Thomas E. ; Sundberg, Pia ; Sundqvist, Jonas ; Tallarida, Massimo ; van Ommen, J. Ruud ; Wächtler, Thomas ; Wiemer, Claudia ; Ylivaara, Oili. / Overview of early publications on atomic layer deposition. Technical Program & Abstracts. American Vacuum Society AVS, 2014.
    @inbook{2191ded5e2664244b8066955efeaaa5f,
    title = "Overview of early publications on atomic layer deposition",
    author = "Jaan Aarik and Akbashev, {Andrew R.} and Mikhael Bechelany and Maria Berdova and David Cameron and Nikolai Chekurov and Viktor Drozd and Simon Elliott and Gloria Gottardi and Kestutis Grigoras and Marcel Junige and Tanja Kallio and Jaana Kanervo and Yury Koshtyal and Marja-Leena K{\"a}{\"a}ri{\"a}inen and Tommi K{\"a}{\"a}ri{\"a}inen and Luca Lamagna and Anatoly Malkov and Anatoly Malygin and Jyrki Molarius and Cagla Ozgit-Akgun and Henrik Pedersen and Puurunen, {Riikka L.} and Alexander Pyymaki-Perros and Ras, {Robin H. A.} and Fred Roozeboom and Timo Sajavaara and Hele Savin and Seidel, {Thomas E.} and Pia Sundberg and Jonas Sundqvist and Massimo Tallarida and {van Ommen}, {J. Ruud} and Thomas W{\"a}chtler and Claudia Wiemer and Oili Ylivaara",
    note = "Published abstract of a poster presentation VPHA",
    year = "2014",
    language = "English",
    booktitle = "Technical Program & Abstracts",
    publisher = "American Vacuum Society AVS",
    address = "United States",

    }

    Aarik, J, Akbashev, AR, Bechelany, M, Berdova, M, Cameron, D, Chekurov, N, Drozd, V, Elliott, S, Gottardi, G, Grigoras, K, Junige, M, Kallio, T, Kanervo, J, Koshtyal, Y, Kääriäinen, M-L, Kääriäinen, T, Lamagna, L, Malkov, A, Malygin, A, Molarius, J, Ozgit-Akgun, C, Pedersen, H, Puurunen, RL, Pyymaki-Perros, A, Ras, RHA, Roozeboom, F, Sajavaara, T, Savin, H, Seidel, TE, Sundberg, P, Sundqvist, J, Tallarida, M, van Ommen, JR, Wächtler, T, Wiemer, C & Ylivaara, O 2014, Overview of early publications on atomic layer deposition. in Technical Program & Abstracts. American Vacuum Society AVS, 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan, 15/06/14.

    Overview of early publications on atomic layer deposition. / Aarik, Jaan; Akbashev, Andrew R.; Bechelany, Mikhael; Berdova, Maria; Cameron, David; Chekurov, Nikolai; Drozd, Viktor; Elliott, Simon; Gottardi, Gloria; Grigoras, Kestutis; Junige, Marcel; Kallio, Tanja; Kanervo, Jaana; Koshtyal, Yury; Kääriäinen, Marja-Leena; Kääriäinen, Tommi; Lamagna, Luca; Malkov, Anatoly; Malygin, Anatoly; Molarius, Jyrki; Ozgit-Akgun, Cagla; Pedersen, Henrik; Puurunen, Riikka L.; Pyymaki-Perros, Alexander; Ras, Robin H. A.; Roozeboom, Fred; Sajavaara, Timo; Savin, Hele; Seidel, Thomas E.; Sundberg, Pia; Sundqvist, Jonas; Tallarida, Massimo; van Ommen, J. Ruud; Wächtler, Thomas; Wiemer, Claudia; Ylivaara, Oili.

    Technical Program & Abstracts. American Vacuum Society AVS, 2014.

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    TY - CHAP

    T1 - Overview of early publications on atomic layer deposition

    AU - Aarik, Jaan

    AU - Akbashev, Andrew R.

    AU - Bechelany, Mikhael

    AU - Berdova, Maria

    AU - Cameron, David

    AU - Chekurov, Nikolai

    AU - Drozd, Viktor

    AU - Elliott, Simon

    AU - Gottardi, Gloria

    AU - Grigoras, Kestutis

    AU - Junige, Marcel

    AU - Kallio, Tanja

    AU - Kanervo, Jaana

    AU - Koshtyal, Yury

    AU - Kääriäinen, Marja-Leena

    AU - Kääriäinen, Tommi

    AU - Lamagna, Luca

    AU - Malkov, Anatoly

    AU - Malygin, Anatoly

    AU - Molarius, Jyrki

    AU - Ozgit-Akgun, Cagla

    AU - Pedersen, Henrik

    AU - Puurunen, Riikka L.

    AU - Pyymaki-Perros, Alexander

    AU - Ras, Robin H. A.

    AU - Roozeboom, Fred

    AU - Sajavaara, Timo

    AU - Savin, Hele

    AU - Seidel, Thomas E.

    AU - Sundberg, Pia

    AU - Sundqvist, Jonas

    AU - Tallarida, Massimo

    AU - van Ommen, J. Ruud

    AU - Wächtler, Thomas

    AU - Wiemer, Claudia

    AU - Ylivaara, Oili

    N1 - Published abstract of a poster presentation VPHA

    PY - 2014

    Y1 - 2014

    M3 - Conference abstract in proceedings

    BT - Technical Program & Abstracts

    PB - American Vacuum Society AVS

    ER -

    Aarik J, Akbashev AR, Bechelany M, Berdova M, Cameron D, Chekurov N et al. Overview of early publications on atomic layer deposition. In Technical Program & Abstracts. American Vacuum Society AVS. 2014