Oxidation of aluminum in ozonated water

Heini Ritala, Kimmo Solehmainen, Leif Grönberg

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)


The oxidation of silicon and copper alloyed aluminum thin films in ozonated water was studied. Experiments were performed in a wet bench at different temperatures. The oxidation was studied mainly by optical methods and sheet resistance measurements. The films oxidized only slightly at 5 and 15°C. At 25 and 35°C an oxide film formed faster. The thickness of the oxide as well as the sheet resistance of metal films increased in the course of time. Since ozonated water processing cause only slight oxidation of aluminum thin films it is suggested that this resist removal process can be utilized in integrated circuit processing.
Original languageEnglish
Pages (from-to)233 - 235
Number of pages3
JournalPhysica Scripta
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed
Event20th Nordic Semiconductor Meeting, NSM20 - Tampere, Finland
Duration: 25 Aug 200327 Aug 2003


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