Packaging of micromachined components

Outi Rusanen, Kimmo Keränen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings of the Third Micro Structure Workshop
Subtitle of host publicationUppsala, Sweden, 24-25 March 1998
PagesP41-P43
Publication statusPublished - 1998
MoE publication typeNot Eligible

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