| Original language | English |
|---|---|
| Title of host publication | Proceedings of the Third Micro Structure Workshop |
| Subtitle of host publication | Uppsala, Sweden, 24-25 March 1998 |
| Pages | P41-P43 |
| Publication status | Published - 1998 |
| MoE publication type | Not Eligible |
Packaging of micromachined components
Outi Rusanen, Kimmo Keränen
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific