Parallel femtosecond laser ablation with individually controlled intensity

Martti Silvennoinen, Jarno Kaakkunen, Kimmo Päiväsaari, Pasi Vahimaa

Research output: Contribution to journalArticleScientificpeer-review

23 Citations (Scopus)

Abstract

The use of computer generated holograms together with spatial light modulator (SLM) enable highly parallel laser micromachining. Usually SLM is used for splitting the original laser beam to desired number of beams with equal intensity. However, this technique also enables that the intensity of every beam can be controlled individually. Example of the hologram designing procedure for separation of the original beam to 400 beams with individually controlled intensity is presented. The proposed technique is demonstrated by femtosecond laser ablation of grayscale pictures so that grey scale of the pixel is addressed with corresponding beam intensity in the ablated picture.
Original languageEnglish
Pages (from-to)2603-2608
JournalOptics Express
Volume22
Issue number3
DOIs
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

Keywords

  • Microstructure fabrication
  • Ultrafast lasers
  • Laser materials processing
  • Spatial light modulators

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