Parallel Microstructuring using Femtosecond Laser and Spatial Light Modulator

M. Silvennoinen; Jarno Kaakkunen; K. Päiväsaari; P. Vahimaa

doi:10.1016/j.phpro.2013.03.135

Parallel Microstructuring using Femtosecond Laser and Spatial Light Modulator

M. Silvennoinen, Jarno Kaakkunen, K. Päiväsaari (Corresponding Author), P. Vahimaa

VTT Technical Research Centre of Finland

University of Eastern Finland

Research output: Contribution to journal › Article › Scientific › peer-review

22 Citations (Scopus)

Abstract

The spatial light modulator together with the computer generated holograms can be used to shape laser beam to correspond for specific need of the micromachining task. Especially dividing the original laser energy to beam array enables high degree of parallelism in laser micromachining. Spatial light modulator together with femtosecond laser enables fast machining of the complex structures with feature sizes down to a few microns.

Original language	English
Pages (from-to)	693-697
Journal	Physics Procedia
Volume	41
DOIs	https://doi.org/10.1016/j.phpro.2013.03.135
Publication status	Published - 2013
MoE publication type	Not Eligible
Event	Lasers in Manufacturing, LiM 2013 - Munich, Germany Duration: 13 May 2013 → 16 May 2013

Keywords

micromaching
femtosecond laser
spatial light modulator

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10.1016/j.phpro.2013.03.135Licence: CC BY-NC-ND

Cite this

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title = "Parallel Microstructuring using Femtosecond Laser and Spatial Light Modulator",

abstract = "The spatial light modulator together with the computer generated holograms can be used to shape laser beam to correspond for specific need of the micromachining task. Especially dividing the original laser energy to beam array enables high degree of parallelism in laser micromachining. Spatial light modulator together with femtosecond laser enables fast machining of the complex structures with feature sizes down to a few microns.",

keywords = "micromaching, femtosecond laser, spatial light modulator",

author = "M. Silvennoinen and Jarno Kaakkunen and K. P{\"a}iv{\"a}saari and P. Vahimaa",

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AU - Kaakkunen, Jarno

AU - Päiväsaari, K.

AU - Vahimaa, P.

N1 - Project code: 74520

PY - 2013

Y1 - 2013

N2 - The spatial light modulator together with the computer generated holograms can be used to shape laser beam to correspond for specific need of the micromachining task. Especially dividing the original laser energy to beam array enables high degree of parallelism in laser micromachining. Spatial light modulator together with femtosecond laser enables fast machining of the complex structures with feature sizes down to a few microns.

AB - The spatial light modulator together with the computer generated holograms can be used to shape laser beam to correspond for specific need of the micromachining task. Especially dividing the original laser energy to beam array enables high degree of parallelism in laser micromachining. Spatial light modulator together with femtosecond laser enables fast machining of the complex structures with feature sizes down to a few microns.

KW - micromaching

KW - femtosecond laser

KW - spatial light modulator

U2 - 10.1016/j.phpro.2013.03.135

DO - 10.1016/j.phpro.2013.03.135

M3 - Article

SN - 1875-3884

VL - 41

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JO - Physics Procedia

JF - Physics Procedia

T2 - Lasers in Manufacturing, LiM 2013

Y2 - 13 May 2013 through 16 May 2013

ER -

Parallel Microstructuring using Femtosecond Laser and Spatial Light Modulator

Abstract

Keywords

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