Parallel Microstructuring using Femtosecond Laser and Spatial Light Modulator

M. Silvennoinen, Jarno Kaakkunen, K. Päiväsaari (Corresponding Author), P. Vahimaa

Research output: Contribution to journalArticleScientificpeer-review

22 Citations (Scopus)


The spatial light modulator together with the computer generated holograms can be used to shape laser beam to correspond for specific need of the micromachining task. Especially dividing the original laser energy to beam array enables high degree of parallelism in laser micromachining. Spatial light modulator together with femtosecond laser enables fast machining of the complex structures with feature sizes down to a few microns.
Original languageEnglish
Pages (from-to)693-697
JournalPhysics Procedia
Publication statusPublished - 2013
MoE publication typeNot Eligible
EventLasers in Manufacturing, LiM 2013 - Munich, Germany
Duration: 13 May 201316 May 2013


  • micromaching
  • femtosecond laser
  • spatial light modulator


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