Parallel-plate structure fabrication method and parallel-plate structure arrangement

Tommi Riekkinen (Inventor), Tomi Mattila (Inventor)

Research output: PatentPatent


A fabrication method for parallel-plate structures and a parallel-plate structure arrangement, wherein the structures have a middle layer, grown on a substrate and disposed between top and bottom electrode layers, wherein the middle layer and the top and bottom electrode layers are deposited on a bottom substrate, and wherein the middle layer is grown first and the top and bottom electrodes are essentially deposited afterwards.

Patent family as of 1.9.2021 
FI121722 B 20110315 FI20060000832 20060918     
FI20060832 A 20080319 FI20060000832 20060918     
FI20060832 A0 20060918 FI20060000832 20060918           
US2010067167 AA 20100318 US20070440743 20070914     
US8950057 BB 20150210 US20070440743 20070914           
WO08034940 A1 20080327 WO2007FI00232 20070914      

Link to current patent family on right 

Original languageEnglish
Patent numberUS2010067167
IPCH01L 41/ 39 A I
Priority date14/09/07
Publication statusPublished - 18 Mar 2010
MoE publication typeH1 Granted patent


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