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Parallel-plate structure fabrication method and parallel-plate structure arrangement
Tommi Riekkinen (Inventor)
,
Tomi Mattila
(Inventor)
BA6304 Flexible sensors and devices
Research output
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Patent
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Patent
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Keyphrases
Fabrication Methods
100%
Structure Arrangement
100%
Parallel Plates
100%
Plate Structure
100%
Bottom Electrode
75%
Top Electrode
75%
Patent Family
50%
Electrode Layer
50%
Bottom Substrate
25%
INIS
layers
100%
plates
100%
fabrication
100%
electrodes
60%
substrates
40%
patents
40%
Engineering
Fabrication Method
100%
Plate Structure
100%
Parallel Plate
100%
Middle Layer
75%
Patent Family
50%