Parametric excitation of circular micromachined polycrystalline silicon disks

Ville Kaajakari, Amit Lal

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)

Abstract

Center anchored polycrystalline silicon plates are parametrically excited using ultrasonic substrate motion generated by a lead zirconate titanate oxide (PZT) plate bonded to the silicon die. Parametric excitation is used to achieve large amplitude, greater than 100 nm, transverse plate vibrations in atmospheric pressure with sub-3 VPP drive on the PZT plate with corresponding surface velocities over 1.5 m/s. The preferred parametrically excited modes are observed to be “whispering gallery” plate modes with no radial nodal points. The possible nonlinear mechanisms are analyzed and the parametric excitation is explained with in-plane plate stresses due to the lateral plate anchor motion. The effect of in-plane stresses is modeled with von Kármán plate equations. Parametric instability is demonstrated with the use of nonlinear Floquet transition matrix.
Original languageEnglish
Pages (from-to)3923 - 3925
Number of pages3
JournalApplied Physics Letters
Volume85
Issue number17
DOIs
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed

Fingerprint

silicon
excitation
plane stress
atmospheric pressure
ultrasonics
vibration
oxides

Keywords

  • silicon
  • micromechanical resonators
  • elemental semiconductors
  • internal stresses
  • ultrasonic transducers
  • vibrations
  • stability
  • micromachining
  • damping

Cite this

Kaajakari, Ville ; Lal, Amit. / Parametric excitation of circular micromachined polycrystalline silicon disks. In: Applied Physics Letters. 2004 ; Vol. 85, No. 17. pp. 3923 - 3925.
@article{73dd14cb42a247b7bdca578eb491b822,
title = "Parametric excitation of circular micromachined polycrystalline silicon disks",
abstract = "Center anchored polycrystalline silicon plates are parametrically excited using ultrasonic substrate motion generated by a lead zirconate titanate oxide (PZT) plate bonded to the silicon die. Parametric excitation is used to achieve large amplitude, greater than 100 nm, transverse plate vibrations in atmospheric pressure with sub-3 VPP drive on the PZT plate with corresponding surface velocities over 1.5 m/s. The preferred parametrically excited modes are observed to be “whispering gallery” plate modes with no radial nodal points. The possible nonlinear mechanisms are analyzed and the parametric excitation is explained with in-plane plate stresses due to the lateral plate anchor motion. The effect of in-plane stresses is modeled with von K{\'a}rm{\'a}n plate equations. Parametric instability is demonstrated with the use of nonlinear Floquet transition matrix.",
keywords = "silicon, micromechanical resonators, elemental semiconductors, internal stresses, ultrasonic transducers, vibrations, stability, micromachining, damping",
author = "Ville Kaajakari and Amit Lal",
year = "2004",
doi = "10.1063/1.1807951",
language = "English",
volume = "85",
pages = "3923 -- 3925",
journal = "Applied Physics Letters",
issn = "0003-6951",
number = "17",

}

Parametric excitation of circular micromachined polycrystalline silicon disks. / Kaajakari, Ville; Lal, Amit.

In: Applied Physics Letters, Vol. 85, No. 17, 2004, p. 3923 - 3925.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Parametric excitation of circular micromachined polycrystalline silicon disks

AU - Kaajakari, Ville

AU - Lal, Amit

PY - 2004

Y1 - 2004

N2 - Center anchored polycrystalline silicon plates are parametrically excited using ultrasonic substrate motion generated by a lead zirconate titanate oxide (PZT) plate bonded to the silicon die. Parametric excitation is used to achieve large amplitude, greater than 100 nm, transverse plate vibrations in atmospheric pressure with sub-3 VPP drive on the PZT plate with corresponding surface velocities over 1.5 m/s. The preferred parametrically excited modes are observed to be “whispering gallery” plate modes with no radial nodal points. The possible nonlinear mechanisms are analyzed and the parametric excitation is explained with in-plane plate stresses due to the lateral plate anchor motion. The effect of in-plane stresses is modeled with von Kármán plate equations. Parametric instability is demonstrated with the use of nonlinear Floquet transition matrix.

AB - Center anchored polycrystalline silicon plates are parametrically excited using ultrasonic substrate motion generated by a lead zirconate titanate oxide (PZT) plate bonded to the silicon die. Parametric excitation is used to achieve large amplitude, greater than 100 nm, transverse plate vibrations in atmospheric pressure with sub-3 VPP drive on the PZT plate with corresponding surface velocities over 1.5 m/s. The preferred parametrically excited modes are observed to be “whispering gallery” plate modes with no radial nodal points. The possible nonlinear mechanisms are analyzed and the parametric excitation is explained with in-plane plate stresses due to the lateral plate anchor motion. The effect of in-plane stresses is modeled with von Kármán plate equations. Parametric instability is demonstrated with the use of nonlinear Floquet transition matrix.

KW - silicon

KW - micromechanical resonators

KW - elemental semiconductors

KW - internal stresses

KW - ultrasonic transducers

KW - vibrations

KW - stability

KW - micromachining

KW - damping

U2 - 10.1063/1.1807951

DO - 10.1063/1.1807951

M3 - Article

VL - 85

SP - 3923

EP - 3925

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 17

ER -