Parametric excitation of circular micromachined polycrystalline silicon disks

Ville Kaajakari, Amit Lal

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)

Abstract

Center anchored polycrystalline silicon plates are parametrically excited using ultrasonic substrate motion generated by a lead zirconate titanate oxide (PZT) plate bonded to the silicon die. Parametric excitation is used to achieve large amplitude, greater than 100 nm, transverse plate vibrations in atmospheric pressure with sub-3 VPP drive on the PZT plate with corresponding surface velocities over 1.5 m/s. The preferred parametrically excited modes are observed to be “whispering gallery” plate modes with no radial nodal points. The possible nonlinear mechanisms are analyzed and the parametric excitation is explained with in-plane plate stresses due to the lateral plate anchor motion. The effect of in-plane stresses is modeled with von Kármán plate equations. Parametric instability is demonstrated with the use of nonlinear Floquet transition matrix.
Original languageEnglish
Pages (from-to)3923-3925
JournalApplied Physics Letters
Volume85
Issue number17
DOIs
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed

Keywords

  • silicon
  • micromechanical resonators
  • elemental semiconductors
  • internal stresses
  • ultrasonic transducers
  • vibrations
  • stability
  • micromachining
  • damping

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