Parametric excitation of circular micromachined polycrystalline silicon disks

Keyphrases

• Micromachining 100%
• Polysilicon 100%
• Parametric Excitation 100%
• Parametrically Excited 66%
• PZT Plates 66%
• Oxides 33%
• Atmospheric Pressure 33%
• Silicon Plates 33%
• Parametric Instability 33%
• Ultrasonic 33%
• Lead Zirconate Titanate 33%
• Excitation Mode 33%
• Large Amplitude 33%
• Nodal Points 33%
• In-plane Stress 33%
• Lateral Plate 33%
• Plate Anchor 33%
• Plate Equation 33%
• Silicon Die 33%
• Plate Mode 33%
• Plate Stress 33%
• Floquet Transition Matrix 33%
• Plane Plate 33%
• Nonlinear Mechanism 33%
• Whispering Gallery 33%
• Plate Vibration 33%
• Surface Velocity 33%

INIS

• silicon 100%
• excitation 100%
• plates 100%
• polycrystals 100%
• motion 25%
• nonlinear problems 25%
• pzt 25%
• surfaces 12%
• substrates 12%
• oxides 12%
• equations 12%
• atmospheric pressure 12%
• amplitudes 12%
• matrices 12%
• velocity 12%
• dies 12%
• ultrasonics 12%
• parametric instabilities 12%
• anchors 12%
• lead zirconate titanate 12%

Engineering

• Polysilicon 100%
• Parametric Excitation 100%
• Parametric Instability 33%
• Plane Stress 33%
• Nodal Point 33%
• Surface Velocity 33%
• Titanate 33%
• Ultrasonics 33%
• Atmospheric Pressure 33%