TY - JOUR
T1 - Particle detectors made of high-resistivity Czochralski silicon
AU - Härkönen, Jaakko
AU - Tuovinen, Esa
AU - Luukka, Panja
AU - Tuominen, Eija
AU - Li, Z
AU - Ivanov, A.
AU - Verbitskaya, E.
AU - Eremin, V.
AU - Pirojenko, A.
AU - Riihimäki, I.
AU - Virtanen, A
PY - 2005/4/1
Y1 - 2005/4/1
N2 - We have processed pin-diodes and strip detectors on n- and p-type high-resistivity silicon wafers grown by magnetic Czochralski method. The Czochralski silicon (Cz-Si) wafers manufactured by Okmetic Oyj have nominal resistivity of 900 Ω cm and 1.9 kΩ cm for n- and p-type, respectively. The oxygen concentration in these substrates is slightly less than typically in wafers used for integrated circuit fabrication. This is optimal for semiconductor fabrication as well as for radiation hardness. The radiation hardness of devices has been investigated with several irradiation campaigns including low- and high-energy protons, neutrons, γ-rays, lithium ions and electrons. Cz-Si was found to be more radiation hard than standard Float Zone silicon (Fz-Si) or oxygenated Fz-Si. When irradiated with protons, the full depletion voltage in Cz-Si has not exceeded its initial value of 300 V even after the fluence of 5×1014 cm−2 1-MeV eq. n cm−2 that equals more than 30 years operation of strip detectors in LHC experiments.
AB - We have processed pin-diodes and strip detectors on n- and p-type high-resistivity silicon wafers grown by magnetic Czochralski method. The Czochralski silicon (Cz-Si) wafers manufactured by Okmetic Oyj have nominal resistivity of 900 Ω cm and 1.9 kΩ cm for n- and p-type, respectively. The oxygen concentration in these substrates is slightly less than typically in wafers used for integrated circuit fabrication. This is optimal for semiconductor fabrication as well as for radiation hardness. The radiation hardness of devices has been investigated with several irradiation campaigns including low- and high-energy protons, neutrons, γ-rays, lithium ions and electrons. Cz-Si was found to be more radiation hard than standard Float Zone silicon (Fz-Si) or oxygenated Fz-Si. When irradiated with protons, the full depletion voltage in Cz-Si has not exceeded its initial value of 300 V even after the fluence of 5×1014 cm−2 1-MeV eq. n cm−2 that equals more than 30 years operation of strip detectors in LHC experiments.
U2 - 10.1016/j.nima.2005.01.057
DO - 10.1016/j.nima.2005.01.057
M3 - Article
SN - 0168-9002
VL - 541
SP - 202
EP - 207
JO - Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
JF - Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
IS - 1-2
ER -