Passive Temperature Compensation of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

Cyril Karuthedath; T.S. Abhilash; Teuvo Sillanpää; Tuomas Pensala

doi:10.1109/IUS54386.2022.9958710

Passive Temperature Compensation of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

Cyril Karuthedath (Corresponding author), T.S. Abhilash, Teuvo Sillanpää, Tuomas Pensala

BA6201 MEMS

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

2 Citations (Scopus)

Abstract

The resonance frequency of conventional PMUT varies with temperature. This paper discusses a passive method to reduce the temperature coefficient of resonance frequency (TCF) of PMUT. Temperature compensation is achieved by selecting surface areas, layer thickness and materials in such a way that the contribution of thermal expansion coefficient (α) is nullified by the contribution of temperature coefficient of young's modulus TC. Temperature compensated PMUTs are fabricated, and electrical, mechanical characterization is performed, and thermal stability is examined. Measurement results show that PMUTs with a TCF below 65 ppm/K can be developed using this technique.

Original language	English
Title of host publication	IUS 2022 - IEEE International Ultrasonics Symposium
Publisher	IEEE Institute of Electrical and Electronic Engineers
Number of pages	4
ISBN (Electronic)	978-1-6654-6657-8
DOIs	https://doi.org/10.1109/IUS54386.2022.9958710
Publication status	Published - 1 Dec 2022
MoE publication type	A4 Article in a conference publication
Event	IEEE International Ultrasonics Symposium (IUS) - Venice, Italy Duration: 10 Oct 2022 → 13 Oct 2022

Conference

Conference	IEEE International Ultrasonics Symposium (IUS)
Abbreviated title	IEEE IUS
Country/Territory	Italy
City	Venice
Period	10/10/22 → 13/10/22

Keywords

Frequency variation
PMUT
Temperature compensation

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10.1109/IUS54386.2022.9958710

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title = "Passive Temperature Compensation of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)",

abstract = "The resonance frequency of conventional PMUT varies with temperature. This paper discusses a passive method to reduce the temperature coefficient of resonance frequency (TCF) of PMUT. Temperature compensation is achieved by selecting surface areas, layer thickness and materials in such a way that the contribution of thermal expansion coefficient (α) is nullified by the contribution of temperature coefficient of young's modulus TC. Temperature compensated PMUTs are fabricated, and electrical, mechanical characterization is performed, and thermal stability is examined. Measurement results show that PMUTs with a TCF below 65 ppm/K can be developed using this technique.",

keywords = "Frequency variation, PMUT, Temperature compensation",

author = "Cyril Karuthedath and T.S. Abhilash and Teuvo Sillanp{\"a}{\"a} and Tuomas Pensala",

note = "Funding Information: ACKNOWLEDGMENT This work is part of the of the Beyond SOI project funded by the Business Finland. The authors acknowledge Okmetic Oy for providing wafers for the PMUT fabrication. The authors would also like to thank Stefan Mertin, James Dekker, Harri Pohjonen and Kirsi J{\"a}rvi.; IEEE International Ultrasonics Symposium (IUS), IEEE IUS ; Conference date: 10-10-2022 Through 13-10-2022",

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doi = "10.1109/IUS54386.2022.9958710",

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Karuthedath, C , Abhilash, TS , Sillanpää, T & Pensala, T 2022, Passive Temperature Compensation of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs). in IUS 2022 - IEEE International Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers, IEEE International Ultrasonics Symposium (IUS), Venice, Italy, 10/10/22. https://doi.org/10.1109/IUS54386.2022.9958710

Passive Temperature Compensation of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs). / Karuthedath, Cyril (Corresponding author); Abhilash, T.S.; Sillanpää, Teuvo et al.
IUS 2022 - IEEE International Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers, 2022.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Passive Temperature Compensation of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

AU - Karuthedath, Cyril

AU - Abhilash, T.S.

AU - Sillanpää, Teuvo

AU - Pensala, Tuomas

N1 - Funding Information: ACKNOWLEDGMENT This work is part of the of the Beyond SOI project funded by the Business Finland. The authors acknowledge Okmetic Oy for providing wafers for the PMUT fabrication. The authors would also like to thank Stefan Mertin, James Dekker, Harri Pohjonen and Kirsi Järvi.

PY - 2022/12/1

Y1 - 2022/12/1

N2 - The resonance frequency of conventional PMUT varies with temperature. This paper discusses a passive method to reduce the temperature coefficient of resonance frequency (TCF) of PMUT. Temperature compensation is achieved by selecting surface areas, layer thickness and materials in such a way that the contribution of thermal expansion coefficient (α) is nullified by the contribution of temperature coefficient of young's modulus TC. Temperature compensated PMUTs are fabricated, and electrical, mechanical characterization is performed, and thermal stability is examined. Measurement results show that PMUTs with a TCF below 65 ppm/K can be developed using this technique.

AB - The resonance frequency of conventional PMUT varies with temperature. This paper discusses a passive method to reduce the temperature coefficient of resonance frequency (TCF) of PMUT. Temperature compensation is achieved by selecting surface areas, layer thickness and materials in such a way that the contribution of thermal expansion coefficient (α) is nullified by the contribution of temperature coefficient of young's modulus TC. Temperature compensated PMUTs are fabricated, and electrical, mechanical characterization is performed, and thermal stability is examined. Measurement results show that PMUTs with a TCF below 65 ppm/K can be developed using this technique.

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KW - PMUT

KW - Temperature compensation

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DO - 10.1109/IUS54386.2022.9958710

M3 - Conference article in proceedings

BT - IUS 2022 - IEEE International Ultrasonics Symposium

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - IEEE International Ultrasonics Symposium (IUS)

Y2 - 10 October 2022 through 13 October 2022

ER -

Passive Temperature Compensation of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

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Keywords

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