Passive Temperature Compensation of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)


The resonance frequency of conventional PMUT varies with temperature. This paper discusses a passive method to reduce the temperature coefficient of resonance frequency (TCF) of PMUT. Temperature compensation is achieved by selecting surface areas, layer thickness and materials in such a way that the contribution of thermal expansion coefficient (α) is nullified by the contribution of temperature coefficient of young's modulus TC. Temperature compensated PMUTs are fabricated, and electrical, mechanical characterization is performed, and thermal stability is examined. Measurement results show that PMUTs with a TCF below 65 ppm/K can be developed using this technique.
Original languageEnglish
Title of host publicationIUS 2022 - IEEE International Ultrasonics Symposium
PublisherIEEE Institute of Electrical and Electronic Engineers
Number of pages4
ISBN (Electronic)978-1-6654-6657-8
Publication statusPublished - 1 Dec 2022
MoE publication typeA4 Article in a conference publication
EventIEEE International Ultrasonics Symposium (IUS) - Venice, Italy
Duration: 10 Oct 202213 Oct 2022


ConferenceIEEE International Ultrasonics Symposium (IUS)
Abbreviated titleIEEE IUS


  • Frequency variation
  • PMUT
  • Temperature compensation


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