Pattern Transfer using Step&Stamp Imprint Lithography

Tomi Haatainen (Corresponding Author), Jouni Ahopelto

    Research output: Contribution to journalArticleScientificpeer-review

    21 Citations (Scopus)

    Abstract

    Industrially efficient lithography process requires high throughput production, wafer scale patterning capable of handling wafers up to 8 inches. Nanoimprint lithography is a new candidate for patterning below 100 nm range. There are two methods to do large area imprinting: Wafer size parallel imprinting or sequential imprinting, mimicking the operation of an optical stepper. The step&stamp imprint lithography is a sequential printing method developed for patterning large areas using a small patterned stamp. A commercial flip chip bonder is used to demonstrate the process. A small silicon stamp with size of 3 × 3 mm2 was used as a mold to create test patterns on a silicon wafer. The stamp was patterned using optical lithography and dry etching, and contained test structures of 5 µm grid patterns. New thermoplastic polymers mr-I 8000, developed for imprint lithography, were used in the experiments.
    Original languageEnglish
    Pages (from-to)357-360
    Number of pages4
    JournalPhysica Scripta
    Volume67
    Issue number4
    DOIs
    Publication statusPublished - 2003
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Lithography
    Wafer
    Patterning
    lithography
    wafers
    Silicon
    Flip chip
    Nanoimprint Lithography
    Optical Lithography
    Etching
    High Throughput
    silicon
    Polymers
    printing
    Grid
    chips
    grids
    etching
    Range of data
    Demonstrate

    Cite this

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    abstract = "Industrially efficient lithography process requires high throughput production, wafer scale patterning capable of handling wafers up to 8 inches. Nanoimprint lithography is a new candidate for patterning below 100 nm range. There are two methods to do large area imprinting: Wafer size parallel imprinting or sequential imprinting, mimicking the operation of an optical stepper. The step&stamp imprint lithography is a sequential printing method developed for patterning large areas using a small patterned stamp. A commercial flip chip bonder is used to demonstrate the process. A small silicon stamp with size of 3 × 3 mm2 was used as a mold to create test patterns on a silicon wafer. The stamp was patterned using optical lithography and dry etching, and contained test structures of 5 µm grid patterns. New thermoplastic polymers mr-I 8000, developed for imprint lithography, were used in the experiments.",
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    Pattern Transfer using Step&Stamp Imprint Lithography. / Haatainen, Tomi (Corresponding Author); Ahopelto, Jouni.

    In: Physica Scripta, Vol. 67, No. 4, 2003, p. 357-360.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

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    AU - Ahopelto, Jouni

    PY - 2003

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