Pattern Transfer using Step&Stamp Imprint Lithography

Engineering

• Imprint Lithography 100%
• Nanoimprint Lithography 66%
• Optical Lithography 66%
• Large Area 66%
• Pattern Transfer 66%
• Polymer 33%
• Test Structure 33%
• Throughput 33%
• Silicon Wafer 33%
• Dry Etching 33%
• Experiments 33%
• Production 33%
• Demonstrates 33%

Material Science

• Patterning 100%
• Polymer 33%
• Silicon Wafer 33%
• Dry Etching 33%

Chemical Engineering

• Lithography 100%
• Polymer 33%
• Thermoplastics 33%
• Silicon 33%